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Transition from E to H mode in inductively coupled oxygen plasma: Hysteresis and the behaviour of oxygen atom density
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doi10.1209/0295-5075/95/55001.
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Zaplotnik, R.; Vesel, A.; Mozetic, M. Transition from E to H mode in inductively coupled oxygen plasma: Hysteresis and the behaviour of oxygen atom density. Europhys. Lett. 2011, 95, doi:10.1209/0295-5075/95/55001.
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(2011)
Europhys. Lett.
, vol.95
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Zaplotnik, R.1
Vesel, A.2
Mozetic, M.3
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