Modification of hexatriacontane by O2-N2 microwave post-discharges

Plasma Chemistry and Plasma Processing

Volumn 26, Issue 3, 2006, Pages 251-266

  Hody, V ^a   Belmonte, T ^a   Pintassilgo, C D ^b,c   Poncin Epaillard, F ^d   Czerwiec, T ^a   Henrion, G ^a   Segui, Y ^e   Loureiro, J ^c  

^a INSTITUT JEAN LAMOUR   (France)

^b UNIVERSITY OF PORTO   (Portugal)

^c INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^d UNIVERSITÉ DU MAINE   (France)

^e UNIVERSITÉ PAUL SABATIER   (France)

Author keywords

Cleaning; Hexatriacontane; Post discharge

Indexed keywords

CLEANING; ETCHING; HYDROCARBONS; HYDROGEN PEROXIDE; MIXTURES; ULTRAVIOLET RADIATION;

HEXATRIACONTANE; POST-DISCHARGE; RADICAL CHAINS;

ELECTRIC DISCHARGES;

EID: 33646531219     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11090-006-9017-3     Document Type: Article

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