Mechanical property measurement of carbon infiltrated carbon nanotube structures for compliant micromechanisms

Journal of Microelectromechanical Systems

Volumn 23, Issue 6, 2014, Pages 1330-1339

  Hanna, Brandon H ^a   Fazio, Walter C ^a   Tanner, Jordan D ^a   Lund, Jason M ^a   Wood, Taylor S ^b   Davis, Robert C ^b   Vanfleet, Richard R ^b   Jensen, Brian D ^a  

^a Brigham Young University   (United States)

^b Brigham Young University   (United States)

Author keywords

carbon nanotubes; material properties; Micromechanical devices

Indexed keywords

BENDING TESTS; CARBON; CHEMICAL VAPOR DEPOSITION; COMPLIANT MECHANISMS; ELASTIC MODULI; ELECTROMECHANICAL DEVICES; MATERIALS PROPERTIES; MEMS; NANOCANTILEVERS; STRESS RELAXATION; STRUCTURAL PROPERTIES; YARN;

CARBON NANO-TUBE STRUCTURES; COMPLIANT MICROMECHANISMS; FRAMEWORK STRUCTURES; MECHANICAL PROPERTY MEASUREMENTS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMECHANICAL DEVICE; RECTANGULAR BEAMS; RESULTING MATERIALS;

CARBON NANOTUBES;

EID: 84915793152     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2312847     Document Type: Article

References (27)

1. L. Howell, Compliant Mechanisms. New York, NY, USA: Wiley, 2001.
2. X. Liu et al., "A doubly decoupled lateral axis micromachined gyroscope," Sens. Actuators A, Phys., vol. 154, no. 2, pp. 218-223, 2009.
3. D. Elata, V. Leus, J. Provine, A. Hirshberg, and R. Howe, "Electromechanical sensing of charge retention on floating electrodes," J. Microelectromech. Syst., vol. 20, no. 1, pp. 150-156, Feb. 2011.
4. E. Erdem et al., "Thermally actuated omnidirectional walking microrobot," J. Microelectromech. Syst., vol. 19, no. 3, pp. 433-442, 2010.
5. B. de Jong, D. Brouwer, M. de Boer, H. Jansen, H. Soemers, and G. Krijnen, "Design and fabrication of a planar three-DOFs MEMS-based manipulator," J. Microelectromech. Syst., vol. 19, no. 5, pp. 1116-1130, 2010.
6. S. Gokce, S. Holmstrom, C. Hibert, S. Olcer, D. Bowman, and H. Urey, "Two-dimensional MEMS stage integrated with microlens arrays for laser beam steering," J. Microelectromech. Syst., vol. 20, no. 1, pp. 15-17, Feb. 2011.
7. C. Liu, Foundations of MEMS. Englewood Cliffs, NJ, USA: Prentice-Hall, 2006.
8. W. Callister, Materials Science and Engineering: An Introduction. Hoboken, NJ, USA: Wiley, 2003.
9. C. Maier and T. Calafut, Polypropylene: The Definitive User's Guide and Databook. London, U.K.: William, 1998.
10. D. Hutchison et al., "Carbon nanotubes as a framework for high-aspectratio MEMS fabrication," J. Microelectromech. Syst., vol. 19, no. 1, pp. 75-82, 2010.
11. J. Song et al., "Carbon-nanotube-templated microfabrication of porous silicon-carbon materials with application to chemical separations," Adv. Funct. Mater., vol. 21, no. 6, pp. 1132-1139, 2011.
12. J. L. Li, G. Z. Bai, J. Feng, and W. Jiang, "Microstructure and mechanical properties of hot-pressed carbon nanotubes compacted by spark plasma sintering," Carbon, vol. 43, no. 13, pp. 2649-2653, 2005.
13. J.-H. Pöhls et al., "Physical properties of carbon nanotube sheets drawn from nanotube arrays," Carbon, vol. 50, no. 11, pp. 4175-4183, 2012.
14. W. Fazio, J. Lund, T. Wood, B. Jensen, R. Davis, and R. Vanfleet, "Material properties of carbon-infiltrated carbon nanotube-templated structures for microfabrication of compliant mechanisms," in Proc. ASME IMECE, 2011, pp. 481-490.
15. R. Bandorf, H. Lüthje, C. Henke, J. Wiebe, J. Sick, and R. Küster, "Different carbon based thin films and their microtribological behaviour in MEMS applications," Surf. Coat. Technol., vol. 200, nos. 5-6, pp. 1777-1782, 2005.
16. I. Forbes and J. Wilson, "Diamond and hard carbon films for microelectromechanical systems (MEMS)-a nanotribological study," Thin Solid Films, vol. 420, pp. 508-514, Dec. 2002.
17. E. Peiner, A. Tibrewala, R. Bandorf, H. Lüthje, L. Doering, and W. Limmer, "Diamond-like carbon for MEMS," J. Micromech. Microeng., vol. 17, no. 7, p. S83, 2007.
18. J. Luo, Y. Fu, H. Le, J. Williams, S. Spearing, and W. Milne, "Diamond and diamond-like carbon MEMS," J. Micromech. Microeng., vol. 17, no. 7, p. S147, 2007.
19. O. Schueller, S. Brittain, and G. Whitesides, "Fabrication of glassy carbon microstructures by soft lithography," Sens. Actuators A, Phys., vol. 72, no. 2, pp. 125-139, 1999.
20. C. Wang, G. Jia, L. Taherabadi, and M. Madou, "A novel method for the fabrication of high-aspect ratio C-MEMS structures," J. Microelectromech. Syst., vol. 14, no. 2, pp. 348-358, Apr. 2005.
21. T. Yi and C.-J. Kim, "Measurement of mechanical properties for MEMS materials," Meas. Sci. Technol., vol. 10, no. 8, p. 706, 1999.
22. B. Zhao, D. N. Futaba, S. Yasuda, M. Akoshima, T. Yamada, and K. Hata, "Exploring advantages of diverse carbon nanotube forests with tailored structures synthesized by supergrowth from engineered catalysts," ACS Nano, vol. 3, no. 1, pp. 108-114, 2009.
23. A. Stehle et al., "Low complexity RF-MEMS switch optimized for operation up to 120°c," in Proc. 37th Eur. Microw. Conf., Oct. 2007, pp. 431-434.
24. C. H. Je et al., "Sensitivity tunable capacitive type micro accelerometer," in Proc. IEEE Sensors, Oct. 2008, pp. 1020-1023.
25. J. G. Kaufman, Properties of Aluminum Alloys: Tensile, Creep, and Fatigue Data at High and Low Temperatures. Materials Park, OH, USA: ASM, 1999.
26. T. Ariyama, Y. Mori, and K. Kaneko, "Tensile properties and stress relaxation of polypropylene at elevated temperatures," Polymer Eng. Sci., vol. 37, no. 1, pp. 81-90, Jan. 1997.
27. M. Gad-el Hak, MEMS: Introduction and Fundamentals. New York,NY, USA: Taylor & Francis, 2005.