Two-dimensional MEMS stage integrated with microlens arrays for laser beam steering

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 15-17

  Gokce, Sertan Kutal ^a   Holmstrom, Sven ^a   Hibert, Cyrille ^b   Olcer, Selim ^a   Bowman, David ^c   Urey, Hakan ^a  

^a KOÇ UNIVERSITY   (Turkey)

^b EPFL   (Switzerland)

^c MICROVISION INC   (United States)

Author keywords

Beam steering; comb drive; endoscopic imaging; microelectromechanical systems (MEMS) stage; microlens array (MLA)

Indexed keywords

BEAM-STEERING; COMB DRIVE; ENDOSCOPIC IMAGING; MICROELECTROMECHANICAL SYSTEMS; MICROLENS ARRAY (MLA);

ENDOSCOPY; LASER BEAMS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; MICROOPTICS; OPTICAL INSTRUMENT LENSES;

COMPOSITE MICROMECHANICS;

EID: 79551607626     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2090507     Document Type: Article

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