Carbon nanotubes as a framework for high-aspect-ratio MEMS fabrication

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 75-82

  Hutchison, David N ^a,b   Morrill, Nicholas B ^a   Aten, Quentin ^c   Turner, Brendan W ^a,d   Jensen, Brian D ^c   Howell, Larry L ^c   Vanfleet, Richard R ^a   Davis, Robert C ^a  

^a Brigham Young University   (United States)

^b Cornell University   (United States)

^c Department of Electrical and Computer Engineering   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Carbon; Fabrication; Microelectromechanical devices; Nanotechnology

Indexed keywords

BISTABLE MECHANISMS; ELECTRICALLY CONDUCTIVE; FILLER MATERIALS; FRAMEWORK TECHNIQUES; HIGH ASPECT RATIO; HIGH TEMPERATURE STABILITY; MEMS FABRICATION; MEMSDEVICES; NANOTUBE COMPOSITES; NANOTUBE FORESTS; SACRIFICIAL LAYER; THERMO-MECHANICAL;

ASPECT RATIO; CARBON NANOTUBES; COMPOSITE MICROMECHANICS; FABRICATION; FILLERS; MATERIALS PROPERTIES; MEMS; NANOTECHNOLOGY; SEEPAGE; SILICON NITRIDE; SOIL MECHANICS; VAPORS;

MICROELECTROMECHANICAL DEVICES;

EID: 76349104430     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2035639     Document Type: Article

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