Sensitivity tunable capacitive type micro accelerometer

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 1020-1023

  Je, Chang Han ^a   Lee, Sungsik ^a   Lee, Myung Lae ^a   Jung, Sunghae ^a   Lee, Ahra ^a   Hwang, Gunn ^a   Yu, Byoung Gon ^a   Choi, Chang Auck ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; BULK- MICROMACHINING; BULK-MICROMACHINED; CAPACITIVE TYPE; DC BIAS; HIGH ASPECT RATIO; HIGH SENSITIVITY; ICP ETCHING; LOADING EFFECTS; MEMS ACCELEROMETER; MEMS ACTUATORS; MICRO ACCELEROMETERS; SENSING ELECTRODE;

ACCELEROMETERS; ASPECT RATIO; ELECTRODES; GROUNDING ELECTRODES; MEMS; MICROACTUATORS; PHOTORESISTS; SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 67649990206     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716616     Document Type: Conference Paper

References (6)

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2. J. Chae, H. Kulah, and K. Najafi, "An In-plane High-Sensitivity, Low-Noise Micro-G Silicon Accelerometer, " Digest MEMS 2003, 2003, pp.466-469.
3. P. Monajemi and F. Ayazi, "Design Optimization and Implementation of a Microgravity Capacitive HARSS Accelerometer, " IEEE Sensors Journal, Vol.6, No.1, 2006, pp. 39-46. (Pubitemid 43131693)
4. J. Chae and K. Najafi, "A Monolithic Three-Axis Micro-g Micromachined Silicon Capacitive Accelerometer," Journal of Microelectromechanical system, Vol.14, No.2, 2005, pp. 235-242.
5. C. Je, M. Lee, S. Jung, S. Lee, G. Hwang, and C. Choi, " Sensing gap reconfigurable capacitive type MEMS accelerometer," Proceedings of the SPIE, Volume 6800,2007, pp. 68001Z.
6. S. Lee, A. Lee, C. Je, M. Lee, G. Hwang, C. Choi, "A 1.5V sub-mW CMOS Interface Circuit for the Capacitive Sensor Applications in Ubiquitous Sensor Network (USN)," submitted to ETRI Journal, Feb. 2008