Electromechanical sensing of charge retention on floating electrodes

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 150-156

  Elata, David ^a   Leus, Vitaly ^a   Provine, J ^b   Hirshberg, Arnon ^a   Howe, Roger T ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b STANFORD UNIVERSITY   (United States)

Author keywords

Electrostatic actuators; floating electrode; pull in

Indexed keywords

CHARGE DECAY; CHARGE RETENTION; DRIVING VOLTAGES; ELECTROMECHANICAL RESPONSE; ENERGY METHOD; FLOATING ELECTRODES; MODEL SYSTEM; PULL-IN; PULL-IN VOLTAGE; THEORETICAL PREDICTION;

ACTUATORS; ELECTROSTATICS;

ELECTROSTATIC ACTUATORS;

EID: 79551591132     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2090499     Document Type: Article

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