A doubly decoupled lateral axis micromachined gyroscope

Sensors and Actuators, A: Physical

Volumn 154, Issue 2, 2009, Pages 218-223

  Liu, X S ^a   Yang, Z C ^a   Chi, X Z ^a   Cui, J ^a   Ding, H T ^a   Guo, Z Y ^a   Lv, B ^a   Lin, L T ^a   Zhao, Q C ^a   Yan, G Z ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Doubly decoupled; Gyroscope; Micromachined

Indexed keywords

AIR DAMPING; COMB CAPACITORS; COMB FINGERS; DOUBLY DECOUPLED; FABRICATION PROCESS; INERTIAL MEASUREMENT UNIT; LOW COSTS; MECHANICAL COUPLING; MICRO-MACHINED GYROSCOPE; MICROMACHINED; NOISE FLOOR; NON-LINEARITY; OUT-OF-PLANE; SENSING CAPACITORS; TORSIONAL MOVEMENTS; VACUUM PACKAGING; X-AXIS GYROSCOPE;

ATMOSPHERIC PRESSURE; CAPACITANCE; CAPACITORS; UNITS OF MEASUREMENT;

GYROSCOPES;

EID: 69549118933     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.10.015     Document Type: Article

References (9)

1. Geiger W., Butt W.U., Gaiβer A., et al. Decoupled microgyros and the design principle DAVED. Sens. Actuat. A 95 (2002) 239-249
2. Alper S.E., and Akin T. A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate. J. Microelectromech. Syst. 14 4 (2005) 707-717
3. Alper S.E., Azgin K., and Akin T. High-performance SOI-MEMS gyroscope with decoupled oscillation modes. MEMS'06 Conference. Istanbul, January 22-26 (2006) 70-73
4. Gómez U.M., Kuhlmann B., and Classen J. New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications. Transducers'05 Conference. Seoul, June 5-9 (2005) 184-187
5. Kranz M.S., and Fedder G.K. Micromechanical vibratory rate gyroscopes fabricated in conventional CMOS. Symposium Gyro Technology 1997. Stuttgart, Germany, September 16-17 (1997) 30-38
6. Mochida Y., Tamura M., and Ohwada K. A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes. Sens. Actuat. A 80 (2000) 170-178
7. Yang Z.C., Wang C.S., Yan G.Z., et al. A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors. Transducers'05 Conference. Seoul, June 5-9 (2005) 121-124
8. Liu X.S., Yang Z.C., Chi X.Z., Cui J., Ding H.T., et al. An x-axis micromachined gyroscope with doubly decoupled oscillation modes. MEMS'08 Conference. Tucson, AZ, January 13-17 (2008) 860-863
9. Liu X.S., Yang Z.C., Yan G.Z., et al. Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors. NEMS'06 Conference. Zhuhai, January 18-21 (2006) 762-765