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Volumn 11, Issue , 2011, Pages 481-490

Material properties of carbon-infiltrated carbon nanotube-templated structures for microfabrication of compliant mechanisms

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; COMPLIANT MECHANISMS; ELASTIC MODULI; FRACTURE; IRON; MAMMALS; MECHANISMS; STRAIN; SUBSTRATES;

EID: 84869156649     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2011-64168     Document Type: Conference Paper
Times cited : (14)

References (19)
  • 1
    • 0004273610 scopus 로고    scopus 로고
    • A Wiley-Interscience publication. Wiley
    • Howell, L., 2001. Compliant mechanisms. A Wiley-Interscience publication. Wiley.
    • (2001) Compliant Mechanisms
    • Howell, L.1
  • 7
    • 33749554122 scopus 로고    scopus 로고
    • Illinois ECE series. Pearson Prentice Hall
    • Liu, C., 2006. Foundations of MEMS. Illinois ECE series. Pearson Prentice Hall.
    • (2006) Foundations of MEMS
    • Liu, C.1
  • 12
    • 28944446433 scopus 로고    scopus 로고
    • Different carbon based thin films and their microtribological behaviour in MEMS applications
    • Bandorf, R., Lüthje, H., Henke, C., Wiebe, J., Sick, J., and Küster, R., 2005. "Different carbon based thin films and their microtribological behaviour in MEMS applications". Surface and coatings technology, 200(5-6), pp. 1777-1782.
    • (2005) Surface and Coatings Technology , vol.200 , Issue.5-6 , pp. 1777-1782
    • Bandorf, R.1    Lüthje, H.2    Henke, C.3    Wiebe, J.4    Sick, J.5    Küster, R.6
  • 13
    • 17944390289 scopus 로고    scopus 로고
    • Diamond and hard carbon films for microelectromechanical systems (MEMS)-A nanotribological study
    • Forbes, I., andWilson, J., 2002. "Diamond and hard carbon films for microelectromechanical systems (MEMS)-a nanotribological study". Thin solid films, 420, pp. 508-514.
    • (2002) Thin Solid Films , vol.420 , pp. 508-514
    • Forbes, I.1    Wilson, J.2
  • 16
    • 0032712529 scopus 로고    scopus 로고
    • Fabrication of glassy carbon microstructures by soft lithography
    • Schueller, O., Brittain, S., and Whitesides, G., 1999. "Fabrication of glassy carbon microstructures by soft lithography". Sensors and Actuators A: Physical, 72(2), pp. 125-139.
    • (1999) Sensors and Actuators A: Physical , vol.72 , Issue.2 , pp. 125-139
    • Schueller, O.1    Brittain, S.2    Whitesides, G.3
  • 17
    • 18844425734 scopus 로고    scopus 로고
    • A novel method for the fabrication of high-aspect ratio C-MEMS structures
    • april
    • Wang, C., Jia, G., Taherabadi, L., and Madou, M., 2005. "A novel method for the fabrication of high-aspect ratio C-MEMS structures". Microelectromechanical Systems, Journal of, 14(2), april, pp. 348 - 358.
    • (2005) Microelectromechanical Systems, Journal of , vol.14 , Issue.2 , pp. 348-358
    • Wang, C.1    Jia, G.2    Taherabadi, L.3    Madou, M.4
  • 18
    • 0033297078 scopus 로고    scopus 로고
    • Measurement of mechanical properties for MEMS materials
    • Yi, T., and Kim, C.-J., 1999. "Measurement of mechanical properties for MEMS materials". Measurement Science and Technology, 10(8), p. 706.
    • (1999) Measurement Science and Technology , vol.10 , Issue.8 , pp. 706
    • Yi, T.1    Kim, C.-J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.