High rate roll-to-roll atmospheric atomic layer deposition of Al 2O3 thin films towards gas diffusion barriers on polymers

Materials Letters

Volumn 136, Issue , 2014, Pages 90-94

  Ali, Kamran ^a   Choi, Kyung Hyun ^a   Jo, Jeongdai ^b   Lee, Yun Woo ^a  

^a Jeju National University   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

Atmospheric; Barrier; PET; Roll to roll atomic layer deposition

Indexed keywords

ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; ATMOSPHERICS; ATOMIC LAYER DEPOSITION; BINDING ENERGY; DEPOSITION; DIFFUSION BARRIERS; DIFFUSION IN GASES; POLYETHYLENE TEREPHTHALATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; ALUMINUM; ATMOSPHERIC HUMIDITY; ATOMS; GAS PERMEABILITY; IONIZATION OF GASES; PLASTIC BOTTLES; TEMPERATURE;

BARRIER; NOVEL TECHNIQUES; OPTICAL CHARACTERISTICS; POLYETHYLENE TEREPHTHALATES (PET); ROLL TO ROLL; TEST INSTRUMENTS; VERY LOW TEMPERATURES; WORKING PRESSURES;

ALUMINUM; GAS PERMEABLE MEMBRANES;

EID: 84906535747     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2014.07.186     Document Type: Article

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