Catalytic surface reactions during nucleation and growth of atomic layer deposition of noble metals: A case study for platinum

ECS Transactions

Volumn 58, Issue 10, 2013, Pages 183-193

  Mackus, A J M ^a   Bol, A A ^a   Kessels, W M M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST ACTIVITY; DEPOSITION; NANOPARTICLES; PLATINUM; PRECIOUS METALS; SURFACE REACTIONS; SYNTHESIS (CHEMICAL);

CATALYTIC SURFACES; METAL ORGANIC PRECURSORS; METALLIC NANOPARTICLES; NANOPARTICLE SYNTHESIS; NANOPATTERNING; NUCLEATION AND GROWTH; REACTION MECHANISM; THIN METAL FILMS;

ATOMIC LAYER DEPOSITION;

EID: 84904901567     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/05810.0183ecst     Document Type: Conference Paper

References (44)

1. O.-K. Kwon, J.-H. Kim, H.-S. Park, and S.-W. Kang, J. Electrochem. Soc. 151, G109 (2004).
2. N. Leick, R.O.F. Verkuijlen, L. Lamagna, E. Langereis, S. Rushworth, F. Roozeboom, M.C.M. van de Sanden, and W.M.M. Kessels, J. Vac. Sci. Technol. A 29, 021016 (2011).
3. X. Jiang, H. Huang, F.B. Prinz, and S.F. Bent, Chem. Mater. 20, 3897 (2008).
4. J. Lu, B. Fu, M.C. Kung, G. Xiao, J.W. Elam, H.H. Kung, and P.C. Stair, Science 335, 1205 (2012).
5. P.C. Stair, J. Chem. Phys. 128, 182507 (2008).
6. J. Hämäläinen, T. Sajavaara, E. Puukilainen, M. Ritala, and M. Leskelä, Chem. Mater 24, 55 (2012).
7. T. Aaltonen, M. Ritala, and M. Leskelä, Electrochem. Solid-State Lett. 8, C99 (2005).
8. T. Aaltonen, M. Ritala, V. Sammelselg, and M. Leskelä, J. Electrochem. Soc. 151, G489 (2004).
9. M. Kariniemi, J. Niinistö, T. Hatanpää, M. Kemell, T. Sajavaara, M. Ritala, and M. Leskelä, Chem. Mater. 23, 2901 (2011).
10. K. Bernal Ramos, M.J. Saly, and Y.J. Chabal, Coord. Chem. Rev.(2013), In press, http://dx.doi.org/10.1016/j.ccr.2013.03.028
11. T. Aaltonen, M. Ritala, K. Arstila, J. Keinonen, and M. Leskelä, Chem. Vap. Deposition 10, 215 (2004).
12. T. Aaltonen, M. Ritala, T. Sajavaara, J. Keinonen, and M. Leskelä, Chem. Mater. 15, 1924 (2003).
13. T. Aaltonen, A. Rahtu, M. Ritala, and M. Leskelä, Electrochem. Solid-State Lett. 6, C130 (2003).
14. W.M.M. Kessels, H.C.M. Knoops, S.A.F. Dielissen, A.J.M. Mackus, and M.C.M. van de Sanden, Appl. Phys. Lett. 95, 013114 (2009).
15. S.T. Christensen and J.W. Elam, Chem. Mater. 22, 2517 (2010).
16. S.D. Elliott, Langmuir 26, 9179 (2010).
17. A.J.M. Mackus, N. Leick, L. Baker, and W.M.M. Kessels, Chem. Mater. 24, 1752 (2012).
18. S.M. Geyer, R. Methaapanon, B. Shong, P.A. Pianetta, and S.F. Bent, J. Phys. Chem. Lett. 4, 176 (2013).
19. I.J.M. Erkens, A.J.M. Mackus, H.C.M. Knoops, P. Smits, T.H.M. van de Ven, F. Roozeboom, and W.M.M. Kessels, ECS J. Solid State Sci. Technol. 1, P255 (2012).
20. L. Baker, A.S. Cavanagh, D. Seghete, S.M. George, A.J.M. Mackus, W.M.M. Kessels, Z.H. Liu, and F.T. Wagner, J. Appl. Phys. 109, 084333 (2011).
21. S. Novak, B. Lee, X. Yang, and V. Misra, J. Electrochem. Soc. 157, H589 (2010).
22. J. Li, X. Liang, D.M. King, Y.-B. Jiang, and A.W. Weimer, Appl. Catal. B 97, 220 (2010).
23. W. Setthapun, W. Williams, S. Kim, H. Feng, J.W. Elam, F. Rabuffetti, K.R. Poeppelmeier, P.C. Stair, E.A. Stach, F.H. Ribeiro, J.T. Miller, and C.L. Marshall, J. Phys. Chem. C 114, 9758 (2010).
24. H. Feng, J.A. Libera, P.C. Stair, J.T. Miller, and J.W. Elam, ACS Catal. 1, 665 (2011).
25. M.J. Weber, A.J.M. Mackus, M.A. Verheijen, C. van der Marel, and W.M.M. Kessels, Chem. Mater. 24, 2973 (2012).
26. A.J.M. Mackus, J.J.L. Mulders, M.C.M. van de Sanden, and W.M.M. Kessels, J. Appl. Phys. 107, 116102 (2010).
27. A.J.M. Mackus, S.A.F. Dielissen, J.J.L. Mulders, and W.M.M. Kessels, Nanoscale 4, 4477 (2012).
28. A.J.M. Mackus, N.F.W. Thissen, J.J.L. Mulders, P.H.F. Trompenaars, M.A. Verheijen, A.A. Bol, and W.M.M. Kessels, J. Phys. Chem. C 117, 10788 (2013).
29. R.B. Getman, Y. Xu, and W.F. Schneider, J. Phys. Chem. C 112, 9559 (2008).
30. N.A. Saliba, Y.-L. Tsai, C. Panja, and B.E. Koel, Surf. Sci. 419, 79 (1999).
31. J.F. Weaver, J.-J. Chen, and A.L. Gerrard, Surf. Sci. 592, 83 (2005).
32. C.G. Freyschlag and R.J. Madix, Mater. Today 14, 134 (2011).
33. H.C.M. Knoops, A.J.M. Mackus, M.E. Donders, M.C.M. van de Sanden, P.H.L. Notten, and W.M.M. Kessels, Electrochem. Solid-State Lett. 12, G34 (2009).
34. H.B. Profijt, S.E. Potts, M.C.M. van de Sanden, and W.M.M. Kessels, J. Vac. Sci. Technol. A 29, 050801 (2011).
35. C.T. Campbell, Science 306, 234 (2004).
36. N. Leick, S. Agarwal, A.J.M. Mackus, and W.M.M. Kessels, Chem. Mater. 24, 3696 (2012).
37. R.W. McCabe, C. Wong, and H.S. Woo, J. Catal. 114, 354 (1988).
38. R.M. Rioux, B.B. Hsu, M.E. Grass, H. Song, and G.A. Somorjai, Catal. Lett. 126, 10 (2008).
39. Y. Zhou, C.L. Muhich, B.T. Neltner, A.W. Weimer, and C.B. Musgrave, J. Phys. Chem. C 116, 12114 (2012).
40. A.J.M. Mackus, M.A. Verheijen, N. Leick, A.A. Bol, and W.M.M. Kessels, Chem. Mater. 25, 1905 (2013).
41. P. Wynblatt, Acta Metallurgica 24, 1165 (1976).
42. S.B. Simonsen, I. Chorkendorff, S. Dahl, M. Skoglundh, J. Sehested, and S. Helveg, J. Am. Chem. Soc. 132, 7968 (2010).
43. B.K. Vu and E.W. Shin, Catal. Lett. 141, 699 (2011).
44. A.J.M. Mackus, D. Garcia-Alonso, H.C.M. Knoops, A.A. Bol, and W.M.M. Kessels, 25, 1769 (2013).