Planar magnetron sputtering discharge enhanced with radio frequency or microwave magnetoactive plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 1999-2006

  Musil, J ^a,b   Misina M ^a   Hovorka, D ^b  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031503058     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580670     Document Type: Article

References (22)

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