Low pressure magnetron sputtering and selfsputtering discharges

Vacuum

Volumn 47, Issue 3, 1996, Pages 307-311

  Kadlec, S ^a   Musil, J ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC VARIABLES MEASUREMENT; MAGNETRON SPUTTERING; MAGNETRONS; PRESSURE MEASUREMENT; TARGETS; VACUUM APPLICATIONS; VACUUM PUMPS;

DISCHARGE POWER DENSITY; LOW PRESSURE MAGNETRON SPUTTERING; SELFSPUTTERING DISCHARGES;

SPUTTERING;

EID: 0030108633     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(96)80013-3     Document Type: Article

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