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Volumn 218, Issue , 1997, Pages 19-24
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Section 2. Advanced technologies by vacuum deposition: New approaches for reactive sputtering of dielectric materials on large scale substrates
a
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Author keywords
[No Author keywords available]
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Indexed keywords
GLASS;
MAGNETRON SPUTTERING;
OPTICAL COATINGS;
REFRACTIVE INDEX;
SILICA;
SILICON NITRIDE;
SPUTTER DEPOSITION;
SUBSTRATES;
TANTALUM COMPOUNDS;
TIN COMPOUNDS;
TITANIUM DIOXIDE;
ZINC OXIDE;
FUNCTIONAL COATINGS;
REACTIVE SPUTTERING;
TANTALUM OXIDE;
TIN OXIDE;
DIELECTRIC FILMS;
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EID: 0001940556
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/s0022-3093(97)00159-2 Document Type: Article |
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Times cited : (35)
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References (4)
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