The spatial coherence function in scanning transmission electron microscopy and spectroscopy

Ultramicroscopy

Volumn 146, Issue , 2014, Pages 6-16

  Nguyen, D T ^a   Findlay, S D ^a   Etheridge, J ^a  

^a MONASH UNIVERSITY   (Australia)

Author keywords

ADF; Channelling; Partial spatial coherence; STEM

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; ENERGY DISSIPATION;

ADF; CHANNELLING; ELECTRON ENERGY LOSS; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SCATTERED ELECTRONS; SOURCE DISTRIBUTION; SPATIAL COHERENCE; STEM;

TRANSMISSION ELECTRON MICROSCOPY;

ANNULAR DARK FIELD SCANNING TRANSMISSION ELECTRON MICROSCOPY; ARTICLE; ELECTRON; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISPERSIVE X RAY SPECTROSCOPY; QUANTITATIVE ANALYSIS; ROENTGEN SPECTROSCOPY; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SPATIAL ANALYSIS; SPATIAL COHERENCE FUNCTION; SPECTROSCOPY; STATISTICAL PARAMETERS; ANALYTIC METHOD; ANNULAR DARK FIELD; CHEMICAL BINDING; CHEMICAL COMPOSITION; IMAGING; SIGNAL DETECTION; STATISTICAL DISTRIBUTION; STATISTICAL MODEL; STRUCTURE ANALYSIS;

EID: 84901440001     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2014.04.008     Document Type: Article

References (41)

1. Hillyard S., Loane R.F., Silcox J. Annular dark-field imaging: resolution and thickness effects. Ultramicroscopy 1993, 49:14-25.
2. Plamann T., Hÿtch M.J. Tests on the validity of the atomic column approximation for STEM probe propagation. Ultramicroscopy 1999, 78:153-161.
3. Ishizuka K. Prospects of atomic resolution imaging with an aberration-corrected STEM. J. Electron Microsc. 2001, 50:291-305.
4. Allen L.J., Findlay S.D., Oxley M.P., Rossouw C.J. Lattice-resolution contrast from a focused coherent electron probe. Part I. Ultramicroscopy 2003, 96:47-63.
5. Dwyer C., Etheridge J. Scattering of Å-scale electron probes in silicon. Ultramicroscopy 2003, 96:343-360.
6. Voyles P.M., Grazul J.L., Muller D.A. Imaging individual atoms inside crystals with ADF-STEM. Ultramicroscopy 2003, 96:251-273.
7. Rossouw C.J., Allen L.J., Findlay S.D., Oxley M.P. Channelling effects in atomic resolution STEM. Ultramicroscopy 2003, 96:299-312.
8. Pennycook S.J., Nellist P.D. Scanning Transmission Electron Microscopy: Imaging and Anaysis 2011, Springer, New York, NY.
9. Loane R.F., Xu P., Silcox J. Incoherent imaging of zone axis crystals with ADF STEM. Ultramicroscopy 1992, 40:121-138.
10. Silcox J., Xu P., Loane R.F. Resolution limits in annular dark field STEM. Ultramicroscopy 1992, 47:173-186.
11. Yamazaki T., Kawasaki M., Watanabe K., Hashimoto I., Shiojiri M. Artificial bright spots in atomic-resolution high-angle annular dark field STEM images. J. Electron Microsc. 2001, 50:517-521.
12. Kirkland E.J. On the optimum probe in aberration corrected ADF-STEM. Ultramicroscopy 2011, 111:1523-1530.
13. Spence J.C.H. High resolution electron microscopy 2013, Oxford University Press, New York, NY. 4th ed.
14. Maunders C., Dwyer C., Tiemeijer P.C., Etheridge J. Practical methods for the measurement of spatial coherence-a comparative study. Ultramicroscopy 2011, 111:1437-1446.
15. Hopkins H.H. The concept of partial coherence in optics. Proc. R. Soc. A 1951, 208:263-277.
16. Hopkins H.H. Applications of coherence theory in microscopy and interferometry. J. Opt. Soc. Am. 1957, 47:508-526.
17. Dwyer C., Erni R., Etheridge J. Method to measure spatial coherence of subangstrom electron beams. Appl. Phys. Lett. 2008, 93:021115.
18. LeBeau J.M., Findlay S.D., Allen L.J., Stemmer S. Quantitative atomic resolution scanning transmission electron microscopy. Phys. Rev. Lett. 2008, 100:206101.
19. LeBeau J.M., Findlay S.D., Wang X., Jacobson A.J., Allen L.J., Stemmer S. High-angle scattering of fast electrons from crystals containing heavy elements: simulation and experiment. Phys. Rev. B 2009, 79:214110.
20. LeBeau J.M., Findlay S.D., Allen L.J., Stemmer S. Standardless atom counting in scanning transmission electron microscopy. Nano Lett. 2010, 10:4405-4408.
21. Nellist P.D., Rodenburg J.M. Beyond the conventional information limit: the relevant coherence function. Ultramicroscopy 1994, 54:61-74.
22. Molina S.I., Guerrero M.P., Galindo P.L., Sales D.L., Varela M., Pennycook S.J. Calculation of integrated intensities in aberration-corrected Z-contrast images. J. Electron Microsc. 2011, 60:29-33.
23. Verbeeck J., Béché A., Van den Broek W. A holographic method to measure the source size broadening in STEM. Ultramicroscopy 2012, 120:35-40.
24. Dwyer C., Maunders C., Zheng C.L., Weyland M., Tiemeijer P.C., Etheridge J. Sub-0.1nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters. Appl. Phys. Lett. 2012, 100:191915.
25. Dwyer C., Erni R., Etheridge J. Measurement of effective source distribution and its importance for quantitative interpretation of STEM images. Ultramicroscopy 2010, 110:952-957.
26. Cherns D., Howie A., Jacobs M.H. Characteristic X-ray production in thin crystals. Z. Naturforschung Tl. A 1973, 28:565-571.
27. Findlay S.D., Oxley M.P., Allen L.J. Modeling atomic-resolution scanning transmission electron microscopy images. Microsc. Microanal. 2008, 14:48-59.
28. Maslen V.W., Rossouw C.J. Implications of (e,2e) scattering for inelastic electron diffraction in crystals I. Theor. Philos. Mag. A 1984, 49:735-742.
29. Allen L.J., Josefsson T.W. Inelastic scattering of fast electrons by crystals. Phys. Rev. B 1995, 52:3185-3198.
30. Ishizuka K. A practical approach for STEM image simulation based on the FFT multislice method. Ultramicroscopy 2002, 90:71-83.
31. Allen L.J., Findlay S.D., Oxley M.P., Witte C., Zaluzec N.J. Channeling effects in high-angular-resolution electron spectroscopy. Phys. Rev. B 2006, 73:094104.
32. Loane R.F., Xu P., Silcox J. Thermal vibrations in convergent-beam electron diffraction. Acta Crystallogr. Sect. A Found. Crystallogr. 1991, 47:267-278.
33. Dwyer C., Findlay S.D., Allen L.J. Multiple elastic scattering of core-loss electrons in atomic resolution imaging. Phys. Rev. B 2008, 77:184107.
34. Hall C.R., Hirsch P.B. Effect of thermal diffuse scattering on propagation of high energy electrons through crystals. Proc. R. Soc. A 1965, 286:158-177.
35. Spence J.C.H., Cowley J.M. Lattice imaging in STEM. Optik 1977, 50:129-142.
36. Grillo V., Carlino E., Glas F. Influence of the static atomic displacement on atomic resolution Z-contrast imaging. Phys. Rev. B 2008, 77:054103.
37. LeBeau J.M., Findlay S.D., Allen L.J., Stemmer S. Position averaged convergent beam electron diffraction: theory and applications. Ultramicroscopy 2010, 110:118-125.
38. Hovden R., Xin H.L., Muller D.A. Channeling of a subangstrom electron beam in a crystal mapped to two-dimensional molecular orbitals. Phys. Rev. B 2012, 86:195415.
39. MacArthur H.E,K.E., Pennycook T.J., Okunishi E., D'Alfonso A.J., Lugg N.R., Allen L.J., Nellist P.D. Probe integrated scattering cross sections in the analysis of atomic resolution HAADF STEM images. Ultramicroscopy 2013, 133:109-119.
40. Rossouw C.J., Dwyer C., Katz-Boon H., Etheridge J. Channelling contrast analysis of lattice images: conditions for probe-insensitive STEM. Ultramicroscopy 2014, 136:216-223.
41. Muller D.A., Silcox J. Delocalization in inelastic scattering. Ultramicroscopy 1995, 59:195-213.