Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters

Applied Physics Letters

Volumn 100, Issue 19, 2012, Pages

  Dwyer, C ^a   Maunders, C ^a   Zheng, C L ^a   Weyland, M ^a   Tiemeijer, P C ^b   Etheridge, J ^a  

^a MONASH UNIVERSITY   (Australia)

^b Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE INTENSITY; ADJUSTABLE PARAMETERS; ATOMIC-RESOLUTION; ATOMIC-RESOLUTION IMAGING; HIGH-ANGLE ANNULAR DARK FIELDS; IMAGE INTENSITIES; IN-SITU MEASUREMENT; INSTRUMENTAL PARAMETERS; QUANTITATIVE INTERPRETATION; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SOURCE DISTRIBUTION; SPATIAL FREQUENCY; STEM IMAGES;

PHYSICAL PROPERTIES; PHYSICS;

TRANSMISSION ELECTRON MICROSCOPY;

EID: 84862094735     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4711766     Document Type: Article

References (34)

1. O. L. Krivanek, M. F. Chisholm, V. Nicolosi, T. J. Pennycook, G. J. Corbin, N. Dellby, M. F. Murfitt, C. S. Own, Z. S. Szilagyi, M. P. Oxley, Nature (London) 464, 571 (2010). 10.1038/nature08879
2. J. M. LeBeau, S. D. Findlay, L. J. Allen, and S. Stemmer, Nano Lett. 10, 4405 (2010). 10.1021/nl102025s
3. S. Van Aert, K. J. Batenburg, M. D. Rossell, R. Erni, and G. Van Tendeloo, Nature (London) 470, 374 (2011). 10.1038/nature09741
4. M. Couillard, G. Radtke, A. P. Knights, and G. A. Botton, Phys. Rev. Lett. 107, 186104 (2011). 10.1103/PhysRevLett.107.186104
5. J. M. LeBeau, S. D. Findlay, L. J. Allen, and S. Stemmer, Phys. Rev. Lett. 100, 206101 (2008). 10.1103/PhysRevLett.100.206101
6. C. Dwyer, M. Weyland, L. Y. Chang, and B. C. Muddle, Appl. Phys. Lett. 98, 201909 (2011). 10.1063/1.3590171
7. C. B. Boothroyd, J. Microsc. 190, 99 (1998). 10.1046/j.1365-2818.1998. 2910843.x
8. J. M. Cowley, Ultramicroscopy 2, 3 (1976). 10.1016/S0304-3991(76)90161-3
9. W. O. Saxton, Optik 49, 51 (1977).
10. S. Hillyard and J. Silcox, Ultramicroscopy 52, 325 (1993). 10.1016/0304-3991(93)90043-W
11. E. M. James and J. M. Rodenburg, Appl. Surf. Sci. 111, 174 (1997). 10.1016/S0169-4332(96)00697-6
12. C. Dwyer, R. Erni, and J. Etheridge, Ultramicroscopy 110, 952 (2010). 10.1016/j.ultramic.2010.01.007
13. M. Haider, P. Hartel, H. Mülle, S. Uhlemann, and J. Zach, Microsc. Microanal. 16, 393 (2010). 10.1017/S1431927610013498
14. S. Uhlemann and M. Haider, Ultramicroscopy 72, 109 (1998). 10.1016/S0304-3991(97)00102-2
15. L. Y. Chang, R. R. Meyer, and A. I. Kirkland, Ultramicroscopy 104, 271 (2005). 10.1016/j.ultramic.2005.05.003
16. R. R. Meyer, A. I. Kirkland, R. E. Dunin-Borkowski, and J. L. Hutchison, Ultramicroscopy 85, 9 (2000). 10.1016/S0304-3991(00)00046-2
17. J. M. LeBeau and S. Stemmer, Ultramicroscopy 108, 1653 (2008). 10.1016/j.ultramic.2008.07.001
18. A. Thust, Phys. Rev. Lett. 102, 220801 (2009). 10.1103/PhysRevLett.102. 220801
19. C. Dwyer, Ultramicroscopy 110, 195 (2010). 10.1016/j.ultramic.2009.11.009
20. C. Maunders, C. Dwyer, P. C. Tiemeijer, and J. Etheridge, Ultramicroscopy 111, 1437 (2011). 10.1016/j.ultramic.2011.05.011
21. C. L. Zheng and J. Etheridge, Measurement of chromatic aberration in scanning transmission electron microscope by coherent convergent beam electron diffraction, Ultramicroscopy (to be published).
22. E. J. Kirkland, Advanced Computing in Electron Microscopy, 2nd ed. (Plenum Press, New York, 2010).
23. J. M. LeBeau, S. D. Findlay, L. J. Allen, and S. Stemmer, Ultramicroscopy 110, 118 (2010). 10.1016/j.ultramic.2009.10.001
24. H. L. Xin, Y. Zhu, and D. A. Muller, Determining on-axis crystal thickness with quantitative position-averaged incoherent bright-field signal in an aberration-corrected STEM, Microsc. Microanal., (in press).
25. C. H. Booth, J. L. Sarrao, M. F. Hundley, A. L. Cornelius, G. H. Kwei, A. Bianchi, Z. Fisk, and J. M. Lawrence, Phys. Rev. B 63, 224302 (2001). 10.1103/PhysRevB.63.224302
26. H. X. Gao and L. M. Peng, Acta Cryst. A 55, 926 (1999). 10.1107/S0108767399005176
27. C. Dwyer, R. Erni, and J. Etheridge, Appl. Phys. Lett. 93, 021115 (2008). 10.1063/1.2957648
28. S. D. Findlay, N. Shibata, H. Sawada, E. Okunishi, Y. Kondo, T. Yamamoto, and Y. Ikuhara, Appl. Phys. Lett. 95, 191913 (2009). 10.1063/1.3265946
29. R. Ishikawa, E. Okunishi, H. Sawada, Y. Kondo, F. Hosokawa, and E. Abe, Nature Mater. 10, 278 (2011). 10.1038/nmat2957
30. E. Okunishi, H. Sawada, Y. Kondo, and M. Kersker, Microsc. Microanal. 12 (Supp 2), 1150 (2006). 10.1017/S1431927606067481
31. M. Bosman, V. J. Keast, J. L. García-Muoz, A. J. D'Alfonso, S. D. Findlay, and L. J. Allen, Phys. Rev. Lett. 99, 086102 (2007). 10.1103/PhysRevLett.99.086102
32. K. Kimoto, T. Asaka, T. Nagai, M. Saito, Y. Matsui, and K. Ishizuka, Nature (London) 450, 702 (2007). 10.1038/nature06352
33. D. A. Muller, L. F. Kourkoutis, M. Murfitt, J. H. Song, H. Y. Hwang, J. Silcox, N. Dellby, and O. L. Krivanek, Science 319, 1073 (2008). 10.1126/science.1148820
34. G. A. Botton, S. Lazar, and C. Dwyer, Ultramicroscopy 110, 926 (2010). 10.1016/j.ultramic.2010.03.008