Scattering of Å-scale electron probes in silicon

Ultramicroscopy

Volumn 96, Issue 3-4, 2003, Pages 343-360

  Dwyer, C ^a   Etheridge, J ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b MONASH UNIVERSITY   (Australia)

Author keywords

Electron energy loss spectroscopy; Image simulation; Scanning transmission electron microscopy

Indexed keywords

CRYSTAL ORIENTATION; ELECTRON ENERGY LOSS SPECTROSCOPY; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON PROBES; SPATIAL RESOLUTION;

ELECTRON SCATTERING;

SILICON;

ALGORITHM; CONFERENCE PAPER; CRYSTAL STRUCTURE; DATA ANALYSIS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON PROBE MICROANALYSIS; MOLECULAR PROBE; RADIATION SCATTERING; SCANNING TRANSMISSION ELECTRON MICROSCOPY; STATISTICAL SIGNIFICANCE; STRUCTURE ANALYSIS;

EID: 0038163510     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(03)00100-1     Document Type: Conference Paper

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