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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 32, Issue 3, 2014, Pages

Ag:TiN nanocomposite thin films for bioelectrodes: The effect of annealing treatments on the electrical and mechanical behavior

(6) Pedrosa, Paulo a,b,c Machado, Diogo b Evaristo, Manuel a,b,c Cavaleiro, Albano a,b,c Fonseca, Carlos a,b,c Vaz, Filipe b

a UNIVERSITY OF COIMBRA (Portugal)

b UNIVERSITY OF MINHO (Portugal)

c UNIVERSITY OF PORTO (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COATINGS; ELASTICITY; GRAIN GROWTH; MAGNETRONS; SURFACE SEGREGATION; TITANIUM NITRIDE;

ANNEALING TEMPERATURES; ANNEALING TREATMENTS; EFFECT OF ANNEALING; ELECTRICAL AND MECHANICAL PROPERTIES; ELECTRICAL RESPONSE; MECHANICAL BEHAVIOR; MORPHOLOGICAL MODIFICATION; NANOCOMPOSITE THIN FILMS;

SILVER;

EID: 84899750371 PISSN: 07342101 EISSN: 15208559 Source Type: Journal
DOI: 10.1116/1.4873555 Document Type: Article

Times cited : (6)

References (47)

1
- 0037179724
- 10.1016/S0042-207X(02)00232-4
- T. de los Arcos, P. Oelhafen, U. Aebi, A. Hefti, M. Düggelin, D. Mathys, and R. Guggenheim, Vacuum 67, 463 (2002). 10.1016/S0042-207X(02)00232-4
- (2002) Vacuum , vol.67 , pp. 463
- De Los Arcos, T.¹ Oelhafen, P.² Aebi, U.³ Hefti, A.⁴ Düggelin, M.⁵ Mathys, D.⁶ Guggenheim, R.⁷

2
- 59149084375
- 10.1016/j.micron.2008.11.004
- K. Kitawaki, K. Kaneko, K. Inoke, J. C. Hernandez-Garrido, P. Midgley, H. Okuyama, M. Uda, and Y. Sakka, Micron 40, 308 (2009). 10.1016/j.micron.2008.11. 004
- (2009) Micron , vol.40 , pp. 308
- Kitawaki, K.¹ Kaneko, K.² Inoke, K.³ Hernandez-Garrido, J.C.⁴ Midgley, P.⁵ Okuyama, H.⁶ Uda, M.⁷ Sakka, Y.⁸

3
- 70349511936
- 10.1016/j.electacta.2009.08.004
- L. T. Cunha, P. Pedrosa, C. J. Tavares, E. Alves, F. Vaz, and C. Fonseca, Electrochim. Acta 55, 59 (2009). 10.1016/j.electacta.2009.08.004
- (2009) Electrochim. Acta , vol.55 , pp. 59
- Cunha, L.T.¹ Pedrosa, P.² Tavares, C.J.³ Alves, E.⁴ Vaz, F.⁵ Fonseca, C.⁶

4
- 84855892966
- 10.1016/j.corsci.2011.11.008
- P. Pedrosa, E. Alves, N. P. Barradas, P. Fiedler, J. Haueisen, F. Vaz, and C. Fonseca, Corros. Sci. 56, 49 (2012). 10.1016/j.corsci.2011.11.008
- (2012) Corros. Sci. , vol.56 , pp. 49
- Pedrosa, P.¹ Alves, E.² Barradas, N.P.³ Fiedler, P.⁴ Haueisen, J.⁵ Vaz, F.⁶ Fonseca, C.⁷

5
- 1642369286
- 10.1063/1.1646444
- G. Abadias, J. Appl. Phys. 95, 2414 (2004). 10.1063/1.1646444
- (2004) J. Appl. Phys. , vol.95 , pp. 2414
- Abadias, G.¹

6
- 84861561306
- 10.1016/j.apcatb.2012.04.047
- S. Rtimi, O. Baghriche, R. Sanjines, C. Pulgarin, M. Ben-Simon, J.-C. Lavanchy, A. Houas, and J. Kiwi, Appl. Catal., B 123-124, 306 (2012). 10.1016/j.apcatb.2012.04.047
- (2012) Appl. Catal., B , vol.123-124 , pp. 306
- Rtimi, S.¹ Baghriche, O.² Sanjines, R.³ Pulgarin, C.⁴ Ben-Simon, M.⁵ Lavanchy, J.-C.⁶ Houas, A.⁷ Kiwi, J.⁸

7
- 33846556080
- 10.1016/j.surfcoat.2006.07.172
- J. Zhao, H. J. Feng, H. Q. Tang, and J. H. Zheng, Surf. Coat. Technol. 201, 5676 (2007). 10.1016/j.surfcoat.2006.07.172
- (2007) Surf. Coat. Technol. , vol.201 , pp. 5676
- Zhao, J.¹ Feng, H.J.² Tang, H.Q.³ Zheng, J.H.⁴

8
- 71849094170
- 10.1016/j.surfcoat.2009.05.012
- P. J. Kelly, H. Li, K. Whitehead, J. Verran, R. D. Arnell, and I. Iordanova, Surf. Coat. Technol. 204, 1137 (2009). 10.1016/j.surfcoat.2009.05.012
- (2009) Surf. Coat. Technol. , vol.204 , pp. 1137
- Kelly, P.J.¹ Li, H.² Whitehead, K.³ Verran, J.⁴ Arnell, R.D.⁵ Iordanova, I.⁶

9
- 84886086266
- 10.1016/j.apsusc.2013.07.154.
- P. Pedrosa, D. Machado, C. Lopes, E. Alves, N. P. Barradas, N. Martin, F. Macedo, C. Fonseca, and F. Vaz, Appl. Surf. Sci. 285, 40 (2013) 10.1016/j.apsusc.2013.07.154.
- (2013) Appl. Surf. Sci. , vol.285 , pp. 40
- Pedrosa, P.¹ Machado, D.² Lopes, C.³ Alves, E.⁴ Barradas, N.P.⁵ Martin, N.⁶ Macedo, F.⁷ Fonseca, C.⁸ Vaz, F.⁹

10
- 63749124519
- 10.1063/1.3100043.
- K. Sivaramakrishnan, A. T. Ngo, S. Iyer, and T. L. Alford, J. Appl. Phys. 105, 063525 (2009) 10.1063/1.3100043.
- (2009) J. Appl. Phys. , vol.105 , pp. 063525
- Sivaramakrishnan, K.¹ Ngo, A.T.² Iyer, S.³ Alford, T.L.⁴

11
- 70249138362
- 10.1088/0022-3727/42/10/105305
- O. Akhavan, J. Phys. D: Appl. Phys. 42, 105305 (2009). 10.1088/0022-3727/42/10/105305
- (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 105305
- Akhavan, O.¹

12
- 84899722510
- A. W. Groenland, I. Brunets, A. Boogaard, A. A. I. Aarnink, A. Y. Kovalgin, and J. Schmitz, Proc. SAFE, 468 (2008).
- (2008) Proc. SAFE , pp. 468
- Groenland, A.W.¹ Brunets, I.² Boogaard, A.³ Aarnink, A.A.I.⁴ Kovalgin, A.Y.⁵ Schmitz, J.⁶

13
- 84899708127
- L. Vj, A. Katzenmeyer, M. S. Islam, N. P. Kobayashi, W. Wu, P. Chaturvedi, N. X. Fang, S. Y. Wang, and R. S. Williams, IEEE NANO, 92 (2008).
- (2008) IEEE NANO , pp. 92
- Vj, L.¹ Katzenmeyer, A.² Islam, M.S.³ Kobayashi, N.P.⁴ Wu, W.⁵ Chaturvedi, P.⁶ Fang, N.X.⁷ Wang, S.Y.⁸ Williams, R.S.⁹

14
- 84856388441
- 10.1016/j.tsf.2011.11.048
- N. J. Simrick, J. A. Kilner, and A. Atkinson, Thin Solid Films 520, 2855 (2012). 10.1016/j.tsf.2011.11.048
- (2012) Thin Solid Films , vol.520 , pp. 2855
- Simrick, N.J.¹ Kilner, J.A.² Atkinson, A.³

15
- 33751239142
- 10.1016/j.ca2006.02.007
- S. D. Kim, Curr. Appl. Phys. 7, 124 (2007). 10.1016/j.cap.2006.02.007
- (2007) Curr. Appl. Phys. , vol.7 , pp. 124
- Kim, S.D.¹

16
- 79960561534
- 10.1016/j.jpowsour.2011.05.040
- T. Kushi, K. Sato, A. Unemoto, S. Hashimoto, K. Amezawa, and T. Kawada, J. Power Sources 196, 7989 (2011). 10.1016/j.jpowsour.2011.05.040
- (2011) J. Power Sources , vol.196 , pp. 7989
- Kushi, T.¹ Sato, K.² Unemoto, A.³ Hashimoto, S.⁴ Amezawa, K.⁵ Kawada, T.⁶

17
- 1842817544
- 10.1016/j.jpowsour.2003.11.006
- R. Ponnappan and T. S. Ravigururajan, J. Power Sources 129, 7 (2004). 10.1016/j.jpowsour.2003.11.006
- (2004) J. Power Sources , vol.129 , pp. 7
- Ponnappan, R.¹ Ravigururajan, T.S.²

18
- 49349090182
- R. Pestana and S. G. S. Filho, Rev. Bras. Apl. Vacuo 24, 117 (2005).
- (2005) Rev. Bras. Apl. Vacuo , vol.24 , pp. 117
- Pestana, R.¹ Filho, S.G.S.²

19
- 0034205442
- 10.1016/S1359-6462(00)00359-6
- E. Rabkin, Scr. Mater. 42, 1199 (2000). 10.1016/S1359-6462(00)00359-6
- (2000) Scr. Mater. , vol.42 , pp. 1199
- Rabkin, E.¹

20
- 38649128480
- 10.1016/j.tsf.2007.08.059
- H. Köstenbauer, G. A. Fontalvo, J. Keckes, and C. Mitterer, Thin Solid Films 516, 1920 (2008). 10.1016/j.tsf.2007.08.059
- (2008) Thin Solid Films , vol.516 , pp. 1920
- Köstenbauer, H.¹ Fontalvo, G.A.² Keckes, J.³ Mitterer, C.⁴

21
- 84924200876
- 10.1016/j.vacuum.2012.02.021
- M. Kawamura, Z. Zhang, R. Kiyono, and Y. Abe, Vacuum 87, 222 (2013). 10.1016/j.vacuum.2012.02.021
- (2013) Vacuum , vol.87 , pp. 222
- Kawamura, M.¹ Zhang, Z.² Kiyono, R.³ Abe, Y.⁴

22
- 35348835970
- 10.1016/j.apsusc.2007.06.045
- O. Akhavan and A. Z. Moshfegh, Appl. Surf. Sci. 254, 548 (2007). 10.1016/j.apsusc.2007.06.045
- (2007) Appl. Surf. Sci. , vol.254 , pp. 548
- Akhavan, O.¹ Moshfegh, A.Z.²

23
- 0037960181
- 10.1016/S0040-6090(03)00034-8
- T. L. Alford, L. Chen, and K. S. Gadre, Thin Solid Films 429, 248 (2003). 10.1016/S0040-6090(03)00034-8
- (2003) Thin Solid Films , vol.429 , pp. 248
- Alford, T.L.¹ Chen, L.² Gadre, K.S.³

24
- 0032140905
- 10.1016/S0927-0248(98)00087-7
- T. Kaltenbach, W. Graf, and M. Ko, Sol. Energy Mater. Sol. Cells 54, 363 (1998). 10.1016/S0927-0248(98)00087-7
- (1998) Sol. Energy Mater. Sol. Cells , vol.54 , pp. 363
- Kaltenbach, T.¹ Graf, W.² Ko, M.³

25
- 0032684355
- 10.1016/S1359-6454(99)00178-0
- H. Gao, L. Zhang, W. D. Nix, C. V. Thompson, and E. Arzt, Acta Mater. 47, 2865 (1999). 10.1016/S1359-6454(99)00178-0
- (1999) Acta Mater. , vol.47 , pp. 2865
- Gao, H.¹ Zhang, L.² Nix, W.D.³ Thompson, C.V.⁴ Arzt, E.⁵

26
- 0019633490
- 10.1063/1.328659
- M. Wittmer, J. Noser, and H. Melchior, J. Appl. Phys. 52, 6659 (1981). 10.1063/1.328659
- (1981) J. Appl. Phys. , vol.52 , pp. 6659
- Wittmer, M.¹ Noser, J.² Melchior, H.³

27
- 0020748299
- 10.1149/1.2119919.
- F. Suni, D. Sigurd, K. T. Ho, and M. A. Nicolet, J. Electrochem. Soc. 130, 1210 (1983) 10.1149/1.2119919.
- (1983) J. Electrochem. Soc. , vol.130 , pp. 1210
- Suni, F.¹ Sigurd, D.² Ho, K.T.³ Nicolet, M.A.⁴

28
- 0002679588
- 10.1063/1.119524
- N. P. Barradas, C. Jeynes, and R. P. Webb, Appl. Phys. Lett. 71, 291 (1997). 10.1063/1.119524
- (1997) Appl. Phys. Lett. , vol.71 , pp. 291
- Barradas, N.P.¹ Jeynes, C.² Webb, R.P.³

29
- 0004243285
- L. J. Van der Pauw, Philips Res. Rep. 13, 1 (1958).
- (1958) Philips Res. Rep. , vol.13 , pp. 1
- Van Der Pauw, L.J.¹

30
- 84871938946
- 10.1016/j.apsusc.2012.10.151
- M. M. Viana, N. D. S. Mohallem, D. R. Miquita, K. Balzuweit, and E. Silva-Pinto, Appl. Surf. Sci. 265, 130 (2013). 10.1016/j.apsusc.2012.10.151
- (2013) Appl. Surf. Sci. , vol.265 , pp. 130
- Viana, M.M.¹ Mohallem, N.D.S.² Miquita, D.R.³ Balzuweit, K.⁴ Silva-Pinto, E.⁵

31
- 84856209430
- 10.1016/j.apsusc.2011.12.095
- R. C. Adochite et al., Appl. Surf. Sci. 258, 4028 (2012). 10.1016/j.apsusc.2011.12.095
- (2012) Appl. Surf. Sci. , vol.258 , pp. 4028
- Adochite, R.C.¹

32
- 78649966243
- 10.1016/j.surfcoat.2010.07.029
- P. J. Kelly, H. Li, P. S. Benson, K. A. Whitehead, J. Verran, R. D. Arnell, and I. Iordanova, Surf. Coat. Technol. 205, 1606 (2010). 10.1016/j.surfcoat.2010.07.029
- (2010) Surf. Coat. Technol. , vol.205 , pp. 1606
- Kelly, P.J.¹ Li, H.² Benson, P.S.³ Whitehead, K.A.⁴ Verran, J.⁵ Arnell, R.D.⁶ Iordanova, I.⁷

33
- 85010244380
- 10.1016/j.susc.2006.08.030
- V. Moreno, J. Creuze, F. Berthier, C. Mottet, G. Tréglia, and B. Legrand, Surf. Sci. 600, 5011 (2006). 10.1016/j.susc.2006.08.030
- (2006) Surf. Sci. , vol.600 , pp. 5011
- Moreno, V.¹ Creuze, J.² Berthier, F.³ Mottet, C.⁴ Tréglia, G.⁵ Legrand, B.⁶

34
- 33748569832
- 10.1016/j.surfcoat.2006.02.017
- W. Gulbiński and T. Suszko, Surf. Coat. Technol. 201, 1469 (2006). 10.1016/j.surfcoat.2006.02.017
- (2006) Surf. Coat. Technol. , vol.201 , pp. 1469
- Gulbiński, W.¹ Suszko, T.²

35
- 49349087090
- 10.1016/j.tsf.2008.03.050
- D. Resnik, J. Kovač, D. Vrtačnik, and S. Amon, Thin Solid Films 516, 7497 (2008). 10.1016/j.tsf.2008.03.050
- (2008) Thin Solid Films , vol.516 , pp. 7497
- Resnik, D.¹ Kovač, J.² Vrtačnik, D.³ Amon, S.⁴

36
- 58049185115
- 10.1016/j.susc.2008.10.029
- A. U. Nilekar, A. V. Ruban, and M. Mavrikakis, Surf. Sci. 603, 91 (2009). 10.1016/j.susc.2008.10.029
- (2009) Surf. Sci. , vol.603 , pp. 91
- Nilekar, A.U.¹ Ruban, A.V.² Mavrikakis, M.³

37
- 80755140659
- 10.1016/j.jpowsour.2011.10.022
- M. Zhang, L. Hu, G. Lin, and Z. Shao, J. Power Sources 198, 196 (2012). 10.1016/j.jpowsour.2011.10.022
- (2012) J. Power Sources , vol.198 , pp. 196
- Zhang, M.¹ Hu, L.² Lin, G.³ Shao, Z.⁴

38
- 84855258069
- 10.1016/j.surfcoat.2011.09.059
- J. C. Sánchez-López, M. D. Abad, I. Carvalho, R. Escobar Galindo, N. Benito, S. Ribeiro, M. Henriques, A. Cavaleiro, and S. Carvalho, Surf. Coat. Technol. 206, 2192 (2012). 10.1016/j.surfcoat.2011.09.059
- (2012) Surf. Coat. Technol. , vol.206 , pp. 2192
- Sánchez-López, J.C.¹ Abad, M.D.² Carvalho, I.³ Escobar Galindo, R.⁴ Benito, N.⁵ Ribeiro, S.⁶ Henriques, M.⁷ Cavaleiro, A.⁸ Carvalho, S.⁹

39
- 84948109557
- 10.1107/S0021889887087090
- P. Thompson, D. E. Cox, and J. B. Hastings, J. Appl. Cryst. 20, 79 (1987). 10.1107/S0021889887087090
- (1987) J. Appl. Cryst. , vol.20 , pp. 79
- Thompson, P.¹ Cox, D.E.² Hastings, J.B.³

40
- 29444438151
- 10.1116/1.2148416
- Z.-J. Liu and Y. G. Shen, J. Vac. Sci. Technol. A 24, 174 (2006). 10.1116/1.2148416
- (2006) J. Vac. Sci. Technol. A , vol.24 , pp. 174
- Liu, Z.-J.¹ Shen, Y.G.²

41
- 80053195376
- 10.1116/1.572727
- H. T. G. Hentzell, C. R. M. Grovenor, and D. A. Smith, J. Vac. Sci. Technol. A 2, 218 (1984). 10.1116/1.572727
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 218
- Hentzell, H.T.G.¹ Grovenor, C.R.M.² Smith, D.A.³

42
- 33646263833
- 10.1016/j.mejo.2005.09.016
- K.-Y. Chan, T.-Y. Tou, and B.-S. Teo, Microelectron. J. 37, 608 (2006). 10.1016/j.mejo.2005.09.016
- (2006) Microelectron. J. , vol.37 , pp. 608
- Chan, K.-Y.¹ Tou, T.-Y.² Teo, B.-S.³

43
- 84957162876
- 10.1017/S0305004100019952
- K. Fuchs, Proc. Cambridge Philos. Soc. 34, 100 (1938). 10.1017/S0305004100019952
- (1938) Proc. Cambridge Philos. Soc. , vol.34 , pp. 100
- Fuchs, K.¹

44
- 36149008879
- 10.1103/PhysRev.80.401
- E. H. Sondheimer, Phys. Rev. 80, 401 (1950). 10.1103/PhysRev.80.401
- (1950) Phys. Rev. , vol.80 , pp. 401
- Sondheimer, E.H.¹

45
- 0014521905
- 10.1063/1.1652680
- A. F. Mayadas, M. Shatzkes, and J. F. Janak, Appl. Phys. Lett. 14, 345 (1969). 10.1063/1.1652680
- (1969) Appl. Phys. Lett. , vol.14 , pp. 345
- Mayadas, A.F.¹ Shatzkes, M.² Janak, J.F.³

46
- 25944438622
- 10.1103/PhysRevB.1.1382
- A. F. Mayadas and M. Shatzkes, Phys. Rev. B 1, 1382 (1970). 10.1103/PhysRevB.1.1382
- (1970) Phys. Rev. B , vol.1 , pp. 1382
- Mayadas, A.F.¹ Shatzkes, M.²

47
- 0029208634
- 10.1016/0040-6090(94)06259-N
- M. E. Day, M. Delfino, J. A. Fair, and W. Tsai, Thin Solid Films 254, 285 (1995). 10.1016/0040-6090(94)06259-N
- (1995) Thin Solid Films , vol.254 , pp. 285
- Day, M.E.¹ Delfino, M.² Fair, J.A.³ Tsai, W.⁴

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