Effects of Al content on grain growth of solid solution (Ti,Al)N films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 1, 2006, Pages 174-177

  Liu, Z J ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; X RAY DIFFRACTION ANALYSIS;

CRYSTAL GRAIN SIZE; FILM DEPOSITION; SOLUTE-DRAG EFFECT;

TITANIUM NITRIDE;

EID: 29444438151     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2148416     Document Type: Article

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