Intrinsic stresses and stress relaxation in TiN/Ag multilayer coatings during thermal cycling

Thin Solid Films

Volumn 516, Issue 8, 2008, Pages 1920-1924

  Kostenbauer H ^a   Fontalvo, G A ^a   Keckes, J ^a,b   Mitterer, C ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

^b ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

Author keywords

Multilayers; Silver; Stress; Titanium nitride

Indexed keywords

DEPOSITION; HIGH TEMPERATURE EFFECTS; SILVER; STRESS RELAXATION; THIN FILMS; TITANIUM NITRIDE;

MULTILAYER THIN FILMS; TEMPERATURE CURVES;

MULTILAYER FILMS;

EID: 38649128480     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.08.059     Document Type: Article

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