Preparation and characterization of TiN-Ag nanocomposite films

Vacuum

Volumn 67, Issue 3-4, 2002, Pages 463-470

  De Los Arcos, T ^a   Oelhafen, P ^a   Aebi, U ^b   Hefti, A ^b   Duggelin M ^a   Mathys, D ^a   Guggenheim, R ^a  

^a UNIVERSITY OF BASEL   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

Author keywords

Ag clusters; Magnetron co sputtering; Nanocomposite films; TiN films

Indexed keywords

MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOCOMPOSITE FILMS;

THIN FILMS;

EID: 0037179724     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00232-4     Document Type: Conference Paper

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