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Applied Surface Science

Volumn 254, Issue 2, 2007, Pages 548-551

Thickness dependence on thermal stability of sputtered Ag nanolayer on Ti/Si(1 0 0)

(2) Akhavan, O a Moshfegh, A Z a

a SHARIF UNIVERSITY OF TECHNOLOGY (Iran)

Author keywords

AFM; Nano thickness; Silver; Ti interlayer

Indexed keywords

FLOW RATE; SCANNING ELECTRON MICROSCOPY; SILICON; THERMODYNAMIC STABILITY; TITANIUM; TOPOGRAPHY; X RAY DIFFRACTION;

ELECTRICAL PROPERTY; POST ANNEALING PROCESS; ROOM TEMPERATURE; TEMPERATURE RANGE;

SILVER;

EID: 35348835970 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2007.06.045 Document Type: Article

Times cited : (20)

References (17)

1
- 35348814000
- International Technology Roadmap for Semiconductors (ITRS), 2004.

2
- 0027884466
- Murarka S.P., Gutmann R.J., Kaloyeros A.E., and Lanford W.A. Thin Solid Films 236 (1993) 257
- (1993) Thin Solid Films , vol.236 , pp. 257
- Murarka, S.P.¹ Gutmann, R.J.² Kaloyeros, A.E.³ Lanford, W.A.⁴

3
- 0037598195
- McBrayer J.D., Swanson R.M., and Sigmon T.W. J. Electrochem. Soc. 133 (1986) 1243
- (1986) J. Electrochem. Soc. , vol.133 , pp. 1243
- McBrayer, J.D.¹ Swanson, R.M.² Sigmon, T.W.³

4
- 0018984629
- Sharma S.K., and Spitz J. Thin Solid Films 65 (1980) 339
- (1980) Thin Solid Films , vol.65 , pp. 339
- Sharma, S.K.¹ Spitz, J.²

5
- 0026895968
- Graedel T.E. J. Electrochem. Soc. 139 (1992) 1963
- (1992) J. Electrochem. Soc. , vol.139 , pp. 1963
- Graedel, T.E.¹

6
- 0037175834
- Kim H.C., Alford T.L., and Allee D.R. Appl. Phys. Lett. 81 (2002) 4287
- (2002) Appl. Phys. Lett. , vol.81 , pp. 4287
- Kim, H.C.¹ Alford, T.L.² Allee, D.R.³

7
- 0033721452
- and references therein
- Moshfegh A.Z., and Akhavan O. Thin Solid Films 370 (2000) 10 and references therein
- (2000) Thin Solid Films , vol.370 , pp. 10
- Moshfegh, A.Z.¹ Akhavan, O.²

8
- 33744548512
- Akhavan O., Azarm A., Moshfegh A.Z., and Bahrevar M.A. Appl. Surf. Sci. 252 (2006) 5335
- (2006) Appl. Surf. Sci. , vol.252 , pp. 5335
- Akhavan, O.¹ Azarm, A.² Moshfegh, A.Z.³ Bahrevar, M.A.⁴

9
- 33750819929
- Bhagat S., Han H., and Alford T.L. Thin Solid Films 515 (2006) 1998
- (2006) Thin Solid Films , vol.515 , pp. 1998
- Bhagat, S.¹ Han, H.² Alford, T.L.³

10
- 50249147275
- Hong C.Y., Peng Y.C., Chen L.J., Hsieh W.Y., and Hsieh Y.F. J. Vac. Sci. Technol. A 17 (1999) 1911
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 1911
- Hong, C.Y.¹ Peng, Y.C.² Chen, L.J.³ Hsieh, W.Y.⁴ Hsieh, Y.F.⁵

11
- 0037960181
- Alford T.L., Chen L., and Gadre K.S. Thin Solid Films 429 (2003) 248
- (2003) Thin Solid Films , vol.429 , pp. 248
- Alford, T.L.¹ Chen, L.² Gadre, K.S.³

12
- 10844277138
- Misra E., Marenco C., Theodore N.D., and Alford T.L. Thin Solid Films 474 (2005) 235
- (2005) Thin Solid Films , vol.474 , pp. 235
- Misra, E.¹ Marenco, C.² Theodore, N.D.³ Alford, T.L.⁴

13
- 9744271733
- Adams D., Malgas G.F., Theodore N.D., Gregory R., Kim H.C., Misra E., Alford T.L., and Mayer J.W. J. Vac. Sci. Technol. B 22 (2004) 2345
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 2345
- Adams, D.¹ Malgas, G.F.² Theodore, N.D.³ Gregory, R.⁴ Kim, H.C.⁵ Misra, E.⁶ Alford, T.L.⁷ Mayer, J.W.⁸

14
- 0038694712
- Adams D., and Alford T.L. Mater. Sci. Eng. R 40 (2003) 207
- (2003) Mater. Sci. Eng. R , vol.40 , pp. 207
- Adams, D.¹ Alford, T.L.²

15
- 0035859484
- Moshfegh A.Z., and Akhavan O. J. Phys. D: Appl. Phys. 34 (2001) 2103
- (2001) J. Phys. D: Appl. Phys. , vol.34 , pp. 2103
- Moshfegh, A.Z.¹ Akhavan, O.²

16
- 33751394008
- Akhavan O., and Moshfegh A.Z. Appl. Surf. Sci. 253 (2006) 2953
- (2006) Appl. Surf. Sci. , vol.253 , pp. 2953
- Akhavan, O.¹ Moshfegh, A.Z.²

17
- 0000865650
- Tracy D.P., Knorr D.B., and Roclbell K.P. J. Appl. Phys. 76 (1994) 2671
- (1994) J. Appl. Phys. , vol.76 , pp. 2671
- Tracy, D.P.¹ Knorr, D.B.² Roclbell, K.P.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.