XPS investigation of the atomic layer deposition half reactions of bis(N-tert-butyl-N′-ethylpropionamidinato) cobalt(II)

Chemistry of Materials

Volumn 26, Issue 8, 2014, Pages 2642-2646

  Elko Hansen, Tyler D M ^a   Ekerdt, John G ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; COBALT; DEPOSITION; PHOTOELECTRONS; SURFACE CHEMISTRY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMIDINATES; CARBON-DOPED OXIDES; COREACTANT; CU SURFACES; CYCLING CONDITIONS; HALF REACTIONS;

ATOMIC LAYER DEPOSITION;

EID: 84899435801     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm5002237     Document Type: Article

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