SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 107, Issue , 2013, Pages 210-218

Synthesis of carbon nanotubes and graphene for VLSI interconnects

(5) Robertson, J a Zhong, G a Esconjauregui, S a Zhang, C a Hofmann, S a

a UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

Carbon nanotubes; Chemical vapour deposition; Graphene; Interconnects

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; COBALT ALLOYS; DEPOSITION; GRAPHENE; INTEGRATED CIRCUIT INTERCONNECTS; NANOTUBES; OPTICAL INTERCONNECTS; VAPOR DEPOSITION; VLSI CIRCUITS; YARN;

CATALYTIC GROWTH; CHEMICAL VAPOUR DEPOSITION; HORIZONTAL GROWTHS; LOWER TEMPERATURES; MULTILAYER GRAPHENE; ORIENTED CARBON NANOTUBES; VERTICALLY ALIGNED CARBON NANOTUBE; VLSI INTERCONNECTS;

CARBON NANOTUBES;

EID: 84897980292 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2012.08.010 Document Type: Article

Times cited : (16)

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