SCOPUS 정보 검색 플랫폼

Physica Status Solidi (B) Basic Research

Volumn 247, Issue 11-12, 2010, Pages 2669-2672

High-density growth of horizontally aligned carbon nanotubes for interconnects

(5) Yan, F a Zhang, C a Cott, D b Zhong, G a Robertson, J a

a UNIVERSITY OF CAMBRIDGE (United Kingdom)

b IMEC (Belgium)

Author keywords

Carbon nanotube; Chemical vapor deposition; Electrical; Horizontal growth; Interconnect

Indexed keywords

EID: 78649702859 PISSN: 03701972 EISSN: 15213951 Source Type: Journal
DOI: 10.1002/pssb.201000134 Document Type: Article

Times cited : (21)

References (29)

1
- 0032511085
- S. Frank, P. Poncharal, Z. L. Wang, and W. A. de Heer, Science 280, 1744 (1998).
- (1998) Science , vol.280 , pp. 1744
- Frank, S.¹ Poncharal, P.² Wang, Z.L.³ de Heer, W.A.⁴

2
- 0035920684
- B. Q. Wei, R. Vajtai, and P. M. Ajayan, Appl. Phys. Lett. 79, 1172 (2001).
- (2001) Appl. Phys. Lett. , vol.79 , pp. 1172
- Wei, B.Q.¹ Vajtai, R.² Ajayan, P.M.³

3
- 1642528399
- J. Y. Park, S. Rosenblatt, Y. Yaish, V. Sazonova, H. Ustunel, S. A. Braig, T. A. Arias, P. W. Bronner, and P. L. McEuen, Nano Lett. 4, 517 (2004).
- (2004) Nano Lett. , vol.4 , pp. 517
- Park, J.Y.¹ Rosenblatt, S.² Yaish, Y.³ Sazonova, V.⁴ Ustunel, H.⁵ Braig, S.A.⁶ Arias, T.A.⁷ Bronner, P.W.⁸ McEuen, P.L.⁹

4
- 0036776404
- F. Kreupl, A. P. Graham, G. S. Duesberg, W. Steinhogl, M. Liebau, E. Unger, and W. Honlein, Microelectron. Eng. 64, 399 (2002).
- (2002) Microelectron. Eng. , vol.64 , pp. 399
- Kreupl, F.¹ Graham, A.P.² Duesberg, G.S.³ Steinhogl, W.⁴ Liebau, M.⁵ Unger, E.⁶ Honlein, W.⁷

5
- 3142647341
- M. Nihei, M. Horibe, A. Kawabata, and Y. Awano, Jpn. J. Appl. Phys. 43, 1856 (2004).
- (2004) Jpn. J. Appl. Phys. , vol.43 , pp. 1856
- Nihei, M.¹ Horibe, M.² Kawabata, A.³ Awano, Y.⁴

6
- 34248366606
- Y. Awano, S. Sato, D. Kondo, M. Ohfuti, A. Kawabata, M. Nihei, and N. Yokoyama, Phys. Status Solidi A 203, 3611 (2006).
- (2006) Phys. Status Solidi A , vol.203 , pp. 3611
- Awano, Y.¹ Sato, S.² Kondo, D.³ Ohfuti, M.⁴ Kawabata, A.⁵ Nihei, M.⁶ Yokoyama, N.⁷

7
- 70349441354
- Y. Yamazaki, N. Sakuma, M. Katagiri, M. Suzuki, T. Sakai, S. Sato, M. Nihei, and Y. Awano, Appl. Phys. Express 1, 034004 (2008).
- (2008) Appl. Phys. Express , vol.1 , pp. 034004
- Yamazaki, Y.¹ Sakuma, N.² Katagiri, M.³ Suzuki, M.⁴ Sakai, T.⁵ Sato, S.⁶ Nihei, M.⁷ Awano, Y.⁸

8
- 37549010257
- D. Yokoyama, T. Iwasaki, T. Yoshida, H. Kawarada, S. Sato, T. Hyakushima, M. Nihei, and Y. Awano, Appl. Phys. Lett. 91, 263101 (2007).
- (2007) Appl. Phys. Lett. , vol.91 , pp. 263101
- Yokoyama, D.¹ Iwasaki, T.² Yoshida, T.³ Kawarada, H.⁴ Sato, S.⁵ Hyakushima, T.⁶ Nihei, M.⁷ Awano, Y.⁸

9
- 33646248381
- IEEE Trans. Electron Devices, 54, 26, 2007).
- A. Naeeimi and J. D. Meindl, IEEE Electron Device Lett. 27, 338 (2006). A. Naeemi, and J. D. Meindl, IEEE Trans. Electron Devices 54, 26 (2007).
- (2006) IEEE Electron Device Lett. , vol.27 , pp. 338
- Naeeimi, A.¹ Meindl, J.D.² Naeemi, A.³ Meindl, J.D.⁴

10
- 54949116928
- J. Robertson, G. Zhong, S. Hofmann, B. C. Bayer, C. S. Esconjauregui, H. Telg, C. Thomsen, G. A. D. Briggs, U. Detlaff, and S. Roth, Appl. Phys. Lett. 93, 163111 (2008).
- (2008) Appl. Phys. Lett. , vol.93 , pp. 163111
- Robertson, J.¹ Zhong, G.² Hofmann, S.³ Bayer, B.C.⁴ Esconjauregui, C.S.⁵ Telg, H.⁶ Thomsen, C.⁷ Briggs, G.A.D.⁸ Detlaff, U.⁹ Roth, S.¹⁰

11
- 72849153719
- G. D. Nessim, M. Seita, K. P. O'Brien, A. J. Hart, R. K. Bonaparte, R. R. Mitchell, and C. V. Thompson, Nano Lett. 9, 3398 (2009).
- (2009) Nano Lett. , vol.9 , pp. 3398
- Nessim, G.D.¹ Seita, M.² O'Brien, K.P.³ Hart, A.J.⁴ Bonaparte, R.K.⁵ Mitchell, R.R.⁶ Thompson, C.V.⁷

12
- 67349203984
- J. Robertson, G. Zhong, S. Hofmann, B. C. Bayer, C. S. Esconjauregui, H. Telg, and C. Thomsen, Diamond Relat. Mater. 18, 957 (2009).
- (2009) Diamond Relat. Mater. , vol.18 , pp. 957
- Robertson, J.¹ Zhong, G.² Hofmann, S.³ Bayer, B.C.⁴ Esconjauregui, C.S.⁵ Telg, H.⁶ Thomsen, C.⁷

13
- 70350705791
- S. Esconjauregui, B. C. Bayer, M. Fouquet, C. T. Wirth, C. Ducati, S. Hofmann, and J. Robertson, Appl. Phys. Lett. 95, 173515 (2009).
- (2009) Appl. Phys. Lett. , vol.95 , pp. 173515
- Esconjauregui, S.¹ Bayer, B.C.² Fouquet, M.³ Wirth, C.T.⁴ Ducati, C.⁵ Hofmann, S.⁶ Robertson, J.⁷

14
- 77950369944
- J. Dijon, A. Fournier, D. P. Szkutnik, H. Okano, C. Jayet, and M. Fayolle, Diamond Relat. Mater. 19, 382 (2010).
- (2010) Diamond Relat. Mater. , vol.19 , pp. 382
- Dijon, J.¹ Fournier, A.² Szkutnik, D.P.³ Okano, H.⁴ Jayet, C.⁵ Fayolle, M.⁶

15
- 0041846713
- A. Cao, R. Baskaran, M. J. Frederick, K. Turner, and P. M. Ajayan, Adv. Mater. 15, 1105 (2003).
- (2003) Adv. Mater. , vol.15 , pp. 1105
- Cao, A.¹ Baskaran, R.² Frederick, M.J.³ Turner, K.⁴ Ajayan, P.M.⁵

16
- 33646893875
- G. F. Zhong, T. Iwasaki, and H. Kawarada, Carbon 44, 2009 (2006).
- (2006) Carbon , vol.44 , pp. 2009
- Zhong, G.F.¹ Iwasaki, T.² Kawarada, H.³

17
- 79956055275
- A. Ural, Y. M. Li, and H. Dai, J. Appl. Phys. Lett. 81, 3464 (2002).
- (2002) J. Appl. Phys. Lett. , vol.81 , pp. 3464
- Ural, A.¹ Li, Y.M.² Dai, H.³

18
- 0037620647
- S. Huang, X. Cai, and J. Liu, J. Am. Chem. Soc. 125, 5636 (2003).
- (2003) J. Am. Chem. Soc. , vol.125 , pp. 5636
- Huang, S.¹ Cai, X.² Liu, J.³

19
- 28044470923
- A. Ismach, L. Segev, E. Wachtel, and E. Joselevich, Angew. Chem. 16, 6266 (2004).
- (2004) Angew. Chem. , vol.16 , pp. 6266
- Ismach, A.¹ Segev, L.² Wachtel, E.³ Joselevich, E.⁴

20
- 29144522055
- C. Kocabas, S. H. Hur, A. Gaur, M. A. Meitl, M. Shib, and J. A. Rogers, Small 1, 1110 (2005).
- (2005) Small , vol.1 , pp. 1110
- Kocabas, C.¹ Hur, S.H.² Gaur, A.³ Meitl, M.A.⁴ Shib, M.⁵ Rogers, J.A.⁶

21
- 54949117568
- C. Zhang, D. Cott, N. Chiodarelli, P. Vereecken, J. Robertson, and C. M. Whelan, Phys. Status Solidi B 245, 2308 (2008).
- (2008) Phys. Status Solidi B , vol.245 , pp. 2308
- Zhang, C.¹ Cott, D.² Chiodarelli, N.³ Vereecken, P.⁴ Robertson, J.⁵ Whelan, C.M.⁶

22
- 77950669944
- C. Santini, D. J. Cott, A. Romo Negreira, S. Riva Sanseverino, S. De Gendt, and P. M. Vereecken, ECS Trans. 18, 845 (2009).
- (2009) ECS Trans. , vol.18 , pp. 845
- Santini, C.¹ Cott, D.J.² Romo Negreira, A.³ Riva Sanseverino, S.⁴ De Gendt, S.⁵ Vereecken, P.M.⁶

23
- 77955780563
- C. Zhang, F. Yan, C. S. Allen, B. C. Bayer, S. Hofmann, B. J. Hickey, D. Cott, G. Zhong, and J. Robertson, J. Appl. Phys. 108, 024311 (2010).
- (2010) J. Appl. Phys. , vol.108 , pp. 024311
- Zhang, C.¹ Yan, F.² Allen, C.S.³ Bayer, B.C.⁴ Hofmann, S.⁵ Hickey, B.J.⁶ Cott, D.⁷ Zhong, G.⁸ Robertson, J.⁹

24
- 70350029326
- G. Zhong, S. Hofmann, F. Yan, H. Telg, J. H. Warner, D. Eder, C. Thomsen, W. I. Milne, and J. Robertson, J. Phys. Chem. C 113, 17321 (2009).
- (2009) J. Phys. Chem. C , vol.113 , pp. 17321
- Zhong, G.¹ Hofmann, S.² Yan, F.³ Telg, H.⁴ Warner, J.H.⁵ Eder, D.⁶ Thomsen, C.⁷ Milne, W.I.⁸ Robertson, J.⁹

25
- 33845239459
- L. Zhang, Z. Li, Y. Tan, G. Lolli, N. Sakulchaicharoen, F. G. Requejo, B. S. Mun, and D. E. Resasco, Chem. Mater. 18, 5624 (2006).
- (2006) Chem. Mater. , vol.18 , pp. 5624
- Zhang, L.¹ Li, Z.² Tan, Y.³ Lolli, G.⁴ Sakulchaicharoen, N.⁵ Requejo, F.G.⁶ Mun, B.S.⁷ Resasco, D.E.⁸

26
- 33747509667
- Y. H. Lee, J. H. Lee, S. J. Chung, S. Lee, and B. K. Ju, Appl. Phys. Lett. 89, 073109 (2006).
- (2006) Appl. Phys. Lett. , vol.89 , pp. 073109
- Lee, Y.H.¹ Lee, J.H.² Chung, S.J.³ Lee, S.⁴ Ju, B.K.⁵

27
- 33644541114
- M. P. Anantram, and F. Leonard, Rep. Prog. Phys. 69, 507 (2006).
- (2006) Rep. Prog. Phys. , vol.69 , pp. 507
- Anantram, M.P.¹ Leonard, F.²

28
- 2142649257
- A. Javey, J. Guo, M. Paulsson, Q. Wang, D. Mann, M. Lundstrom, and H. Dai, Phys. Rev. Lett. 92, 106804 (2004).
- (2004) Phys. Rev. Lett. , vol.92 , pp. 106804
- Javey, A.¹ Guo, J.² Paulsson, M.³ Wang, Q.⁴ Mann, D.⁵ Lundstrom, M.⁶ Dai, H.⁷

29
- 0035957717
- P. C. Collins, M. S. Arnold, and P. Avouris, Science 292, 706 (2001).
- (2001) Science , vol.292 , pp. 706
- Collins, P.C.¹ Arnold, M.S.² Avouris, P.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.