An investigation of the electrical properties of pyrolytic carbon in reduced dimensions: Vias and wires

Journal of Applied Physics

Volumn 107, Issue 11, 2010, Pages

  Graham, A P ^a   Schindler, G ^b   Duesberg, G S ^c   Lutz, T ^c   Weber, W ^a  

^a NAMLAB GGMBH   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

^c TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON LAYERS; CARBON WIRES; CHEMICAL VAPOR DEPOSITED; ELECTRICAL PROPERTY; INTERCONNECT STRUCTURES; MAXIMUM CURRENT DENSITY; NANO SCALE; PYROLYTIC CARBON; SIZE EFFECTS;

ACETYLENE; ELECTRIC PROPERTIES; ELECTRON BEAMS; WIRE;

REACTIVE ION ETCHING;

EID: 77953624646     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3374691     Document Type: Article

References (9)

1. G. Aichmayr, G. S. Duesberg, F. Kreupl, S. Kudelka, M. Liebau, A. Saenger, J. Schumann, and O. Storbeck, " Carbon/high-k trench capacitor for the 40 nm DRAM generation.," Proceedings of IEEE Symposium on VLSI Technology, 2007, pp. 186-187.
2. F. Kreupl, R. Bruchhaus, P. Majewski, J. B. Philipp, R. Symanczyk, T. Happ, C. Arndt, M. Vogt, R. Zimmermann, A. Buerke, A. P. Graham, and M. Kund, " Carbon-based resistive memory.," Proceedings of International Electron Devices Meeting (IEDM), 2008, Technical Digest, pp. 521-524.
3. G. Raghavan, J. L. Hoyt, and J. F. Gibbons, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 32, 380 (1993). 10.1143/JJAP.32.380
4. A. Becker and K. J. Hüttinger, Carbon CRBNAH 0008-6223 36, 117 (1998). 10.1016/S0008-6223(97)00155-3
5. E. R. Cohen, D. R. Lide, and G. L. Trigg, AIP Physics Desk Reference, (Springer, New York, 2003), p. 396.
6. S. Suzuki, C. Bower, T. Kiyokura, K. G. Nath, Y. Watanabe, and O. Zhou, J. Electron Spectrosc. Relat. Phenom. JESRAW 0368-2048 114-116, 225 (2001). 10.1016/S0368-2048(00)00294-2 (Pubitemid 32263892)
7. Finite element simulations performed using FEMLAB software from COMSOL Multiphysics GmbH.
8. W. Steinhögl, G. Schindler, G. Steinlesberger, M. Traving, and M. Engelhardt, J. Appl. Phys. JAPIAU 0021-8979 97, 023706 (2005). 10.1063/1.1834982 (Pubitemid 40183040)
9. H. O. Pierson, Handbook of Carbon, Graphite, Diamond, and Fullerenes (Noyes Publications, New Jersey, 1993), p. 160.