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Volumn 109, Issue 11, 2011, Pages

Use of plasma treatment to grow carbon nanotube forests on TiN substrate

(13) Esconjauregui, S a Bayer, B C a Fouquet, M a Wirth, C T a Yan, F a Xie, R a Ducati, C a Baehtz, C b Castellarin Cudia, C c,d Bhardwaj, S d Cepek, C d Hofmann, S a Robertson, J a

a UNIVERSITY OF CAMBRIDGE (United Kingdom)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

c SINCROTRONE TRIESTE (Italy)

d LABORATORIO TASC (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST NANOPARTICLE; CRYSTALLOGRAPHIC STRUCTURE; ELECTRICAL MEASUREMENT; EX SITU; GROWTH MECHANISMS; HYDROGEN PLASMAS; IN-SITU; NANOTUBE FORESTS; NANOTUBE GROWTH; PLASMA PRE-TREATMENT; PLASMA TREATMENT; ROOT GROWTH; THERMAL PRE-TREATMENT;

CARBON NANOTUBES; CATALYSTS; PLASMA APPLICATIONS; PLASMAS; TITANIUM NITRIDE; X RAY DIFFRACTION;

SUBSTRATES;

EID: 79959481452 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3587234 Document Type: Article

Times cited : (36)

References (40)

1
- 0033593584
- Self-oriented regular arrays of carbon nanotubes and their field emission properties
- DOI 10.1126/science.283.5401.512
- S. Fan, M. G. Chapline, N. R. Franklin, T. W. Tombler, A. M. Cassell, and H. Dai, Science 283, 512 (1999). 10.1126/science.283.5401.512 (Pubitemid 29061185)
- (1999) Science , vol.283 , Issue.5401 , pp. 512-514
- Fan, S.¹ Chapline, M.G.² Franklin, N.R.³ Tombler, T.W.⁴ Cassell, A.M.⁵ Dai, H.⁶

2
- 54249088937
- 10.1143/JJAP.47.2024
- M. Katagiri, N. Sakuma, M. Suzuki, T. Sakai, S. Sato, T. Hyakushima, M. Nihei, and Y. Awano, Jpn. J. Appl. Phys. 47, 2024 (2008). 10.1143/JJAP.47.2024
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 2024
- Katagiri, M.¹ Sakuma, N.² Suzuki, M.³ Sakai, T.⁴ Sato, S.⁵ Hyakushima, T.⁶ Nihei, M.⁷ Awano, Y.⁸

3
- 3142647341
- 10.1143/JJAP.43.1856
- M. Nihei, M. Horibe, A. Kawabata, and Y. Awano, Jpn. J. Appl. Phys. 43, 1856 (2004). 10.1143/JJAP.43.1856
- (2004) Jpn. J. Appl. Phys. , vol.43 , pp. 1856
- Nihei, M.¹ Horibe, M.² Kawabata, A.³ Awano, Y.⁴

4
- 54949116928
- 10.1063/1.3000061
- J. Robertson, G. Zhong, H. Telg, C. Thomsen, J. M. Warner, G. A. D. Briggs, U. Detlaff, and S. Roth, Appl. Phys. Lett. 93, 163111 (2008). 10.1063/1.3000061
- (2008) Appl. Phys. Lett. , vol.93 , pp. 163111
- Robertson, J.¹ Zhong, G.² Telg, H.³ Thomsen, C.⁴ Warner, J.M.⁵ Briggs, G.A.D.⁶ Detlaff, U.⁷ Roth, S.⁸

5
- 79959469652
- Carbon nanotube forest growth on NiTi shape memory alloy thin films for thermal actuation
- B. C. Bayer, S. Sanjabi, C. Baehtz, C. T. Wirth, S. Esconjauregui, R. S. Weatherup, Z. H. Barber, S. Hofmann, and J. Robertson, Carbon nanotube forest growth on NiTi shape memory alloy thin films for thermal actuation., Thin Solid Films (in press).
- Thin Solid Films (In Press)
- Bayer, B.C.¹ Sanjabi, S.² Baehtz, C.³ Wirth, C.T.⁴ Esconjauregui, S.⁵ Weatherup, R.S.⁶ Barber, Z.H.⁷ Hofmann, S.⁸ Robertson, J.⁹

6
- 33748628518
- 10.1016/j.diamond.2009.02.008
- P. Avouris and J. Chen, Mater. Today 9, 46 (2006). 10.1016/j.diamond. 2009.02.008
- (2006) Mater. Today , vol.9 , pp. 46
- Avouris, P.¹ Chen, J.²

7
- 8844263043
- Water-assisted highly efficient synthesis of impurity-free single-walled carbon nanotubes
- DOI 10.1126/science.1104962
- K. Hata, D. N. Futaba, K. Mizuno, T. Namai, M. Yumura, and S. Iijima, Science 306, 1362 (2004). 10.1126/science.1104962 (Pubitemid 39532510)
- (2004) Science , vol.306 , Issue.5700 , pp. 1362-1364
- Hata, K.¹ Futaba, D.N.² Mizuno, K.³ Namai, T.⁴ Yumura, M.⁵ Iijima, S.⁶

8
- 1842586863
- Direct Spinning of Carbon Nanotube Fibers from Chemical Vapor Deposition Synthesis
- DOI 10.1126/science.1094982
- Y. L. Li, I. A. Kinloch, and A. H. Windle, Science 304, 276 (2004). 10.1126/science.1094982 (Pubitemid 38452177)
- (2004) Science , vol.304 , Issue.5668 , pp. 276-278
- Li, Y.-L.¹ Kinloch, I.A.² Windle, A.H.³

9
- 27544516391
- Bottom-up growth of carbon nanotube multilayers: Unprecedented growth
- DOI 10.1021/nl051486q
- X. Li, A. Cao, Y. J. Jung, R. Vijtai, and P. M. Ajayan, Nano Lett. 5, 1997 (2005). 10.1021/nl051486q (Pubitemid 41546326)
- (2005) Nano Letters , vol.5 , Issue.10 , pp. 1997-2000
- Li, X.¹ Cao, A.² Jung, Y.J.³ Vajtai, R.⁴ Ajayan, P.M.⁵

10
- 33745756392
- Catalytic chemical vapor deposition of single-wall carbon nanotubes at low temperatures
- DOI 10.1021/nl060068y
- M. Cantoro, S. Hofmann, S. Pisana, V. Scardaci, A. Parvez, C. Ducati, A. C. Ferrari, A. M. Blackburn, K. Y. Wang, and J. Robertson, Nano Lett. 6, 1107 (2006). 10.1021/nl060068y (Pubitemid 44013468)
- (2006) Nano Letters , vol.6 , Issue.6 , pp. 1107-1112
- Cantoro, M.¹ Hofmann, S.² Pisana, S.³ Scardaci, V.⁴ Parvez, A.⁵ Ducati, C.⁶ Ferrari, A.C.⁷ Blackburn, A.M.⁸ Wang, K.-Y.⁹ Robertson, J.¹⁰

11
- 70349664284
- 10.1126/science.1177599
- A. R. Harutyunyan, G. A. Chen, T. M. Paronyan, E. M. Pigos, O. A. Kuznetsov, K. Hewaparakrama, S. M. Kim, D. Zakarov, E. A. Stach, and G. U. Sumanasekera, Science 326, 116 (2009). 10.1126/science.1177599
- (2009) Science , vol.326 , pp. 116
- Harutyunyan, A.R.¹ Chen, G.A.² Paronyan, T.M.³ Pigos, E.M.⁴ Kuznetsov, O.A.⁵ Hewaparakrama, K.⁶ Kim, S.M.⁷ Zakarov, D.⁸ Stach, E.A.⁹ Sumanasekera, G.U.¹⁰

12
- 67349203984
- 10.1016/j.diamond.2009.02.008
- J. Robertson, G. Zhong, S. Hofmann, B. C. Bayer, S. Esconjauregui, H. Telg, and C. Thomsen, Diam. Rel. Mat. 18, 957 (2009). 10.1016/j.diamond.2009.02. 008
- (2009) Diam. Rel. Mat. , vol.18 , pp. 957
- Robertson, J.¹ Zhong, G.² Hofmann, S.³ Bayer, B.C.⁴ Esconjauregui, S.⁵ Telg, H.⁶ Thomsen, C.⁷

13
- 34047121249
- In situ observations of catalyst dynamics during surface-bound carbon nanotube nucleation
- DOI 10.1021/nl0624824
- S. Hofmann, R. Sharma, C. Ducati, G. Du, C. Mattevi, C. Cepek, M. Cantoro, S. Pisana, A. Parvez, A.C. Ferrari, R. Dunin-Borkowski, S. Lizzit, L. Petaccia, A. Goldoni, and J. Robertson, Nano Lett. 7, 602 (2007). 10.1021/nl0624824 (Pubitemid 46516033)
- (2007) Nano Letters , vol.7 , Issue.3 , pp. 602-608
- Hofmann, S.¹ Sharma, R.² Ducati, C.³ Du, G.⁴ Mattevi, C.⁵ Cepek, C.⁶ Cantoro, M.⁷ Pisana, S.⁸ Parvez, A.⁹ Cervantes-Sodi, F.¹⁰ Ferrari, A.C.¹¹ Dunin-Borkowski, R.¹² Lizzit, S.¹³ Petaccia, L.¹⁴ Goldoni, A.¹⁵ Robertson, J.¹⁶

14
- 63749117280
- 10.1021/jp808560p
- S. Hofmann, R. Blume, C. T. Wirth, M. Cantoro, R. Sharma, C. Ducati, M. Havecker, S. Zafeiratos, P. Schnoerch, A. Oestereich, D. Teschner, M. Albrecht, A. Knop-Gericke, R. Schlogl, and J. Robertson, J. Phys. Chem. C 113, 1648 (2009). 10.1021/jp808560p
- (2009) J. Phys. Chem. C , vol.113 , pp. 1648
- Hofmann, S.¹ Blume, R.² Wirth, C.T.³ Cantoro, M.⁴ Sharma, R.⁵ Ducati, C.⁶ Havecker, M.⁷ Zafeiratos, S.⁸ Schnoerch, P.⁹ Oestereich, A.¹⁰ Teschner, D.¹¹ Albrecht, M.¹² Knop-Gericke, A.¹³ Schlogl, R.¹⁴ Robertson, J.¹⁵

15
- 50649098250
- 10.1021/jp802474g
- C. Mattevi, C. T. Wirth, S. Hofmann, R. Blume, M. Cantoro, C. Ducati, C. Cepek, A. Knop-Gericke, S. Milne, C. Castellarin-Cudia, S. Dolafi, A. Goldoni, R. Schloegl, and J. Robertson, J. Phys. Chem. C 112, 12207 (2008). 10.1021/jp802474g
- (2008) J. Phys. Chem. C , vol.112 , pp. 12207
- Mattevi, C.¹ Wirth, C.T.² Hofmann, S.³ Blume, R.⁴ Cantoro, M.⁵ Ducati, C.⁶ Cepek, C.⁷ Knop-Gericke, A.⁸ Milne, S.⁹ Castellarin-Cudia, C.¹⁰ Dolafi, S.¹¹ Goldoni, A.¹² Schloegl, R.¹³ Robertson, J.¹⁴

16
- 30744475740
- Evidence of sequential lift in growth of aligned multiwalled carbon nanotube multilayers
- DOI 10.1021/nl051472k
- M. Pinault, V. Pichot, H. Khodja, P. Launois, C. Reynaud, and M. Mayne-L'Hermite, Nano Lett. 5, 2394 (2005). 10.1021/nl051472k (Pubitemid 43090839)
- (2005) Nano Letters , vol.5 , Issue.12 , pp. 2394-2398
- Pinault, M.¹ Pichot, V.² Khodja, H.³ Launois, P.⁴ Reynaud, C.⁵ Mayne-L'Hermite, M.⁶

17
- 34548681659
- Growth of dense single-walled carbon nanotubes in nano-sized silicon dioxide holes for future microelectronics
- DOI 10.1016/j.carbon.2007.07.013, PII S0008622307003582
- T. Iwasaki, R. Morikane, T. Edura, M. Tokuda, K. Tsutsui, Y. Wada., and H. Kawarada, Carbon 45, 2351 (2007). 10.1016/j.carbon.2007.07.013 (Pubitemid 47418755)
- (2007) Carbon , vol.45 , Issue.12 , pp. 2351-2355
- Iwasaki, T.¹ Morikane, R.² Edura, T.³ Tokuda, M.⁴ Tsutsui, K.⁵ Wada, Y.⁶ Kawarada, H.⁷

18
- 0001662947
- 10.1063/1.126790
- A. M. Rao, D. Jacques, R. C. Haddon, W. Zhu, C. Bower, and S. Jin, Appl. Phys. Lett. 76, 3813 (2000). 10.1063/1.126790
- (2000) Appl. Phys. Lett. , vol.76 , pp. 3813
- Rao, A.M.¹ Jacques, D.² Haddon, R.C.³ Zhu, W.⁴ Bower, C.⁵ Jin, S.⁶

19
- 79956005251
- Influence of iron-silicon interaction on the growth of carbon nanotubes produced by chemical vapor deposition
- DOI 10.1063/1.1465529
- T. de los Arcos, F. Vonau, M. G. Garnier, V. Thommen, H.-G. Boyen, P. Oelhafen, M. Duggelin, D. Mathis, and R. Guggenheim, Appl. Phys. Lett. 80, 2383 (2002). 10.1063/1.1465529 (Pubitemid 34435273)
- (2002) Applied Physics Letters , vol.80 , Issue.13 , pp. 2383
- De Los Arcos, T.¹ Vonau, F.² Gamier, M.G.³ Thommen, V.⁴ Boyen, H.-G.⁵ Oelhafen, P.⁶ Duggelin, M.⁷ Mathis, D.⁸ Guggenheim, R.⁹

20
- 34547326854
- Comparison study of catalyst nanoparticle formation and carbon nanotube growth: Support effect
- DOI 10.1063/1.2749412
- Y. Wang, Z. Luo, B. Li, P. Ho, Z. Yao, L. Shi, E. N. Bryan, and R. J. Nemanich, J. Appl. Phys. 101, 124310 (2007). 10.1063/1.2749412 (Pubitemid 47141363)
- (2007) Journal of Applied Physics , vol.101 , Issue.12 , pp. 124310
- Wang, Y.¹ Luo, Z.² Li, B.³ Ho, P.S.⁴ Yao, Z.⁵ Shi, L.⁶ Bryan, E.N.⁷ Nemanich, R.J.⁸

21
- 37549010257
- 10.1063/1.2824390
- D. Yokoyama, T. Iwasaki, T. Yoshida, H. Kawarada, S. Sato, T. Hyakushima, M. Nihei, and Y. Awano, Appl. Phys. Lett. 91, 263101 (2007). 10.1063/1.2824390
- (2007) Appl. Phys. Lett. , vol.91 , pp. 263101
- Yokoyama, D.¹ Iwasaki, T.² Yoshida, T.³ Kawarada, H.⁴ Sato, S.⁵ Hyakushima, T.⁶ Nihei, M.⁷ Awano, Y.⁸

22
- 58549117851
- 10.1016/j.carbon.2008.10.045
- J. Garca-Céspedes, S. Thomasson, K. B. K. Teo, I. A. Kinloch, W. I. Milne, E. Pascual, and E. Bertran, Carbon 47, 613 (2009). 10.1016/j.carbon.2008.10.045
- (2009) Carbon , vol.47 , pp. 613
- Garca-Céspedes, J.¹ Thomasson, S.² Teo, K.B.K.³ Kinloch, I.A.⁴ Milne, W.I.⁵ Pascual, E.⁶ Bertran, E.⁷

23
- 70350705791
- 10.1063/1.3256012
- S. Esconjauregui, B. C. Bayer, M. Fouquet, C. T. Wirth, C. Ducati, S. Hofmann, and J. Robertson, Appl. Phys. Lett. 95, 173115 (2009). 10.1063/1.3256012
- (2009) Appl. Phys. Lett. , vol.95 , pp. 173115
- Esconjauregui, S.¹ Bayer, B.C.² Fouquet, M.³ Wirth, C.T.⁴ Ducati, C.⁵ Hofmann, S.⁶ Robertson, J.⁷

24
- 79952822866
- 10.1021/jp102986f
- B. C. Bayer, S. Hofmann, C. Castellarin-Cudia, R. Blume, C. Baehtz, S. Esconjauregui, C. T. Wirth, R. A. Olivier, C. Ducati, A. Knop-Gericke, R. Schlgl, A. Goldoni, C. Cepek, S. Hofmann, and J. Robertson, J. Phys. Chem. C 115, 4359 (2011). 10.1021/jp102986f
- (2011) J. Phys. Chem. C , vol.115 , pp. 4359
- Bayer, B.C.¹ Hofmann, S.² Castellarin-Cudia, C.³ Blume, R.⁴ Baehtz, C.⁵ Esconjauregui, S.⁶ Wirth, C.T.⁷ Olivier, R.A.⁸ Ducati, C.⁹ Knop-Gericke, A.¹⁰ Schlgl, R.¹¹ Goldoni, A.¹² Cepek, C.¹³ Hofmann, S.¹⁴ Robertson, J.¹⁵

25
- 77955780563
- 10.1063/1.3456168
- C. Zhang, F. Yan, C. S. Allen, B. C. Bayer, B. J. Hickey, D. Cott, G. Zhong, and J. Robertson, J. Appl. Phys. 108, 024311 (2010). 10.1063/1.3456168
- (2010) J. Appl. Phys. , vol.108 , pp. 024311
- Zhang, C.¹ Yan, F.² Allen, C.S.³ Bayer, B.C.⁴ Hickey, B.J.⁵ Cott, D.⁶ Zhong, G.⁷ Robertson, J.⁸

26
- 33646893875
- Semi-quantitative study on the fabrication of densely packed and vertically aligned single-walled carbon nanotubes
- DOI 10.1016/j.carbon.2006.01.027, PII S0008622306000807
- G. Zhong, T. Iwasaki, and H. Kawarada, Carbon 44, 2009 (2006). 10.1016/j.carbon.2006.01.027 (Pubitemid 43782592)
- (2006) Carbon , vol.44 , Issue.10 , pp. 2009-2014
- Zhong, G.F.¹ Iwasaki, T.² Kawarada, H.³

27
- 0022451398
- 10.1116/1.573708
- O. Knotek, M. Bhmer, and T. Leyendecker, J. Vac. Sci. Technol. A 4, 2695 (1986). 10.1116/1.573708
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2695
- Knotek, O.¹ Bhmer, M.² Leyendecker, T.³

28
- 0035465603
- Structural transitions in hard Si-based TiN coatings: The effect of bias voltage and temperature
- DOI 10.1016/S0257-8972(01)01395-0, PII S0257897201013950
- F. Vaz, L. Rebouta, P. Goudeaub, T. Girardeaub, J. Pacaudb, J. P. Riviereb, and A. Traversec, Surf. Coat. Tech. 146-147, 274 (2001). 10.1016/S0257-8972(01)01395-0 (Pubitemid 34018615)
- (2001) Surface and Coatings Technology , vol.146-147 , pp. 274-279
- Vaz, F.¹ Rebouta, L.² Goudeau, Ph.³ Girardeau, T.⁴ Pacaud, J.⁵ Riviere, J.P.⁶ Traverse, A.⁷

29
- 84957282142
- 10.1116/1.574092
- B. J. Burrow, A. E. Morgan, and R. C. Ellwanger, J. Vac. Sci. Technol. A 4, 2463 (1986). 10.1116/1.574092
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2463
- Burrow, B.J.¹ Morgan, A.E.² Ellwanger, R.C.³

30
- 36449001763
- 10.1063/1.351465
- N. C. Saha and H. G. Tompkins, J. Appl. Phys. 72, 3072 (1992). 10.1063/1.351465
- (1992) J. Appl. Phys. , vol.72 , pp. 3072
- Saha, N.C.¹ Tompkins, H.G.²

31
- 0029292418
- 10.1016/0169-4332(94)00545-1
- I. Bertti, M. Mohai, J. L. Sullivan, and S. O. Saied, Appl. Surf. Sci. 84, 357 (1995). 10.1016/0169-4332(94)00545-1
- (1995) Appl. Surf. Sci. , vol.84 , pp. 357
- Bertti, I.¹ Mohai, M.² Sullivan, J.L.³ Saied, S.O.⁴

32
- 0000482833
- 10.1063/1.350465
- M. Delfino, J. A. Fair, and D. Hodul, J. Appl. Phys. 71, 6079 (1992). 10.1063/1.350465
- (1992) J. Appl. Phys. , vol.71 , pp. 6079
- Delfino, M.¹ Fair, J.A.² Hodul, D.³

33
- 0343431519
- 2(110): effect of the surface stoichiometry and roughness
- DOI 10.1016/S0039-6028(99)00699-8
- H. Mostéfa-Sba, B. Domenichini, and S. Bourgeois, Surf. Sci. 437, 107 (1999) 10.1016/S0039-6028(99)00699-8 (Pubitemid 30500575)
- (1999) Surface Science , vol.437 , Issue.1 , pp. 107-115
- Mostefa-Sba, H.¹ Domenichini, B.² Bourgeois, S.³

34
- 35348933734
- 10.1016/j.surfre2007.07.001
- Q. Fua and T. Wagnera, Surf. Sci. Rep. 62, 431 (2007). 10.1016/j.surfrep.2007.07.001
- (2007) Surf. Sci. Rep. , vol.62 , pp. 431
- Fua, Q.¹ Wagnera, T.²

35
- 65549107950
- 10.1088/0957-4484/20/10/105608
- J. Park, Y. Ryu, H. Kim, and Y. Choongho, Nanotechnology 20, 105608 (2009). 10.1088/0957-4484/20/10/105608
- (2009) Nanotechnology , vol.20 , pp. 105608
- Park, J.¹ Ryu, Y.² Kim, H.³ Choongho, Y.⁴

36
- 63749119402
- 10.1063/1.3091394
- M. Cantoro, S. Hofmann, C. Mattevi, S. Pisana, A. Parzev, A. Fasoli, C. Ducati, V. Scardaci, A. C. Ferrari, and J. Robertson, J. Appl. Phys. 105, 064304 (2009). 10.1063/1.3091394
- (2009) J. Appl. Phys. , vol.105 , pp. 064304
- Cantoro, M.¹ Hofmann, S.² Mattevi, C.³ Pisana, S.⁴ Parzev, A.⁵ Fasoli, A.⁶ Ducati, C.⁷ Scardaci, V.⁸ Ferrari, A.C.⁹ Robertson, J.¹⁰

37
- 33746559482
- 10.1116/1.575951
- W. F. Egelhoff and D. A. Steigerwald, J. Vac. Sci. Technol. A7, 2167 (1989). 10.1116/1.575951
- (1989) J. Vac. Sci. Technol. , vol.7 , pp. 2167
- Egelhoff, W.F.¹ Steigerwald, D.A.²

38
- 0003697947
- (Dekker, New York)
- Z. Paal and P. G. Menon, Hydrogen Effects in Catalysis (Dekker, New York, 1988).
- (1988) Hydrogen Effects in Catalysis
- Paal, Z.¹ Menon, P.G.²

39
- 78650755800
- 10.1021/nn1025675
- S. Esconjauregui, M. Fouquet, B. C. Bayer, C. Ducati, R. Smajda, S. Hofmann, and J. Robertson, ACS Nano 4, 7431 (2010). 10.1021/nn1025675
- (2010) ACS Nano , vol.4 , pp. 7431
- Esconjauregui, S.¹ Fouquet, M.² Bayer, B.C.³ Ducati, C.⁴ Smajda, R.⁵ Hofmann, S.⁶ Robertson, J.⁷

40
- 79952119905
- 10.1063/1.3549813
- S. Esconjauregui, M. Fouquet, B. C. Bayer, S. Eslava, S. Khachadorian, S. Hofmann, and J. Robertson, J. Appl. Phys. 109, 044303 (2011). 10.1063/1.3549813
- (2011) J. Appl. Phys. , vol.109 , pp. 044303
- Esconjauregui, S.¹ Fouquet, M.² Bayer, B.C.³ Eslava, S.⁴ Khachadorian, S.⁵ Hofmann, S.⁶ Robertson, J.⁷

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