Lifetime assessment of atomic-layer-deposited Al2O 3-Parylene C bilayer coating for neural interfaces using accelerated age testing and electrochemical characterization

Acta Biomaterialia

Volumn 10, Issue 2, 2014, Pages 960-967

  Minnikanti, Saugandhika ^a   Diao, Guoqing ^a   Pancrazio, Joseph J ^a   Xie, Xianzong ^b   Rieth, Loren ^b   Solzbacher, Florian ^b   Peixoto, Nathalia ^a  

^a Krasnow Institute for Advanced Study   (United States)

^b University of Utah   (United States)

Author keywords

Accelerated lifetime testing; Electrochemical impedance spectroscopy; Interdigitated electrode arrays; Parylene C

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMIC LAYER DEPOSITION; BIOCOMPATIBILITY; BIOLOGICAL MATERIALS; COATINGS; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; POLYMERIC IMPLANTS;

ACCELERATED LIFETIME TESTING; ATOMIC LAYER DEPOSITED; BARRIER PROPERTIES; BI-LAYER COATINGS; ELECTROCHEMICAL-IMPEDANCE SPECTROSCOPIES; INTERDIGITATED ELECTRODES ARRAYS; LIFETIME ASSESSMENT; MEAN TIME TO FAILURE; NEURAL INTERFACES; PARYLENE C;

INSULATION;

ALUMINUM OXIDE;

ARTICLE; ATOM; BILAYER MEMBRANE; BRAIN COMPUTER INTERFACE; CHANNEL GATING; CONTROLLED STUDY; CORROSION; CYCLIC POTENTIOMETRY; DIELECTRIC CONSTANT; ELECTROCHEMICAL ANALYSIS; ELECTRODE; IMMERSION; LIFESPAN; PRIORITY JOURNAL; ROOM TEMPERATURE;

ACCELERATED LIFETIME TESTING; AL(2)O(3); ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; INTERDIGITATED ELECTRODE ARRAYS; PARYLENE C;

ALUMINUM OXIDE; COATED MATERIALS, BIOCOMPATIBLE; DIELECTRIC SPECTROSCOPY; ELASTIC MODULUS; ELECTRICITY; ELECTROCHEMICAL TECHNIQUES; ELECTRODES; NEURAL PROSTHESES; POLYMERS; TIME FACTORS; XYLENES;

EID: 84896546508     PISSN: 17427061     EISSN: 18787568     Source Type: Journal    
DOI: 10.1016/j.actbio.2013.10.031     Document Type: Article

References (69)

1. J.N. Mak, and J.R. Wolpaw Clinical Applications of Brain-Computer Interfaces: Current State and Future Prospects Biomed Eng IEEE Rev 2 2009 187 199
2. J.J. Pancrazio, and P.H. Peckham Neuroprosthetic devices: how far are we from recovering movement in paralyzed patients? Expert Rev Neurother 9 4 2009 427 430
3. A.B. Schwartz, X.T. Cui, D.J. Weber, and D.W. Moran Brain-controlled interfaces: movement restoration with neural prosthetics Neuron 52 1 2006 205 220
4. L.R. Hochberg et al. Neuronal ensemble control of prosthetic devices by a human with tetraplegia Nature 442 7099 2006 164 171
5. J.D. Simeral, S.P. Kim, M.J. Black, J.P. Donoghue, and L.R. Hochberg Neural control of cursor trajectory and click by a human with tetraplegia 1000 days after implant of an intracortical microelectrode array J Neural Eng 8 2 2011 025027
6. B. Ghane-Motlagh, and M. Sawan Design and implementation challenges of microelectrode arrays: a review Mater Sci Appl 4 2013 483 495
7. M.A.L. Nicolelis, D. Dimitrov, J.M. Carmena, R. Crist, G. Lehew, and J.D. Kralik et al. Chronic, multisite, multielectrode recordings in macaque monkeys Proc Natl Acad Sci 100 19 2003 11041 11046
8. R.J. Vetter, J.C. Williams, J.F. Hetke, E.A. Nunamaker, and D.R. Kipke Chronic neural recording using silicon-substrate microelectrode arrays implanted in cerebral cortex IEEE Trans Biomed Eng 51 6 2004 896 904
9. K.C. Cheung, P. Renaud, H. Tanila, and K. Djupsund Flexible polyimide microelectrode array for in vivo recordings and current source density analysis Biosens Bioelectron 22 8 2007 1783 1790
10. J.C. Sanchez, N. Alba, T. Nishida, C. Batich, and P.R. Carney Structural modifications in chronic microwire electrodes for cortical neuroprosthetics: a case study IEEE Trans Neural Syst Rehabil Eng 14 2 2006 217 221
11. F. Strumwasser Long-term recording from single neurons in brain of unrestrained mammals Science 127 3296 1958 469 470
12. B.D. Winslow, and P.A. Tresco Quantitative analysis of the tissue response to chronically implanted microwire electrodes in rat cortex Biomaterials 31 7 2010 1558 1567
13. S.A. Desai, J.D. Rolston, L. Guo, and S.M. Potter Improving impedance of implantable microwire multi-electrode arrays by ultrasonic electroplating of durable platinum black Front Neuroeng 3 2010
14. I.V. Viskontas, A.D. Ekstrom, C.L. Wilson, and I. Fried Characterizing interneuron and pyramidal cells in the human medial temporal lobe in vivo using extracellular recordings Hippocampus 17 1 2007 49 57
15. S.M. Richardson-Burns, J.L. Hendricks, B. Foster, L.K. Povlich, D.H. Kim, and D.C. Martin Polymerization of the conducting polymer poly (3,4-ethylenedioxythiophene)(PEDOT) around living neural cells Biomaterials 28 8 2007 1539 1552
16. L.H. Shi, F. Luo, D.J. Woodward, and J.Y. Chang Basal ganglia neural responses during behaviorally effective deep brain stimulation of the subthalamic nucleus in rats performing a treadmill locomotion test Synapse 59 7 2006 445 457
17. E.M. Schmidt, M.J. Bak, and J.S. McIntosh Long-term chronic recording from cortical neurons Exp Neurol 52 3 1976 496 506
18. P.J. Rousche, and R.A. Normann Chronic recording capability of the Utah intracortical electrode array in cat sensory cortex J Neurosci Methods 82 1 1998 1 15
19. D.R. Kipke, R.J. Vetter, J.C. Williams, and J.F. Hetke Silicon-substrate intracortical microelectrode arrays for long-term recording of neuronal spike activity in cerebral cortex IEEE Trans Neural Syst Rehabil Eng 11 2 2003 151 155
20. P.K. Campbell, K.E. Jones, R.J. Huber, K.W. Horch, and R.A. Normann A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array IEEE Trans Biomed Eng 38 8 1991 758 768
21. J.M. Hsu, L. Rieth, R.A. Normann, P. Tathireddy, and F. Solzbacher Encapsulation of an integrated neural interface device with Parylene C IEEE Trans Biomed Eng 56 1 2009 23 29
22. T. Stieglitz, H. Beutel, M. Schuettler, and J.U. Meyer Micromachined, polyimide-based devices for flexible neural interfaces Biomed Microdevices 2 4 2000 283 294
23. C. Metallo, R.D. White, and B.A. Trimmer Flexible parylene-based microelectrode arrays for high resolution EMG recordings in freely moving small animals J Neurosci Methods 195 2 2011 176 184
24. J. Kruger, F. Caruana, R.D. Volta, and G. Rizzolatti Seven years of recording from monkey cortex with a chronically implanted multiple microelectrode Front Neuroeng 3 2010
25. V.S. Polikov, P.A. Tresco, and W.M. Reichert Response of brain tissue to chronically implanted neural electrodes J Neurosci Methods 148 1 2005 1 18
26. A. Prasad, Q.S. Xue, V. Sankar, T. Nishida, G. Shaw, and W.J. Streit et al. Comprehensive characterization and failure modes of tungsten microwire arrays in chronic neural implants J Neural Eng 9 5 2012 056015
27. Huang R, Pang C, Tai Y, Emken J, Ustun C, Andersen R. Parylene coated silicon probes for neural prosthesis. In: 3rd IEEE international conference on nano/micro engineered and molecular systems (NEMS) 2008; 947-50.
28. Bellmann C, Beshchasna N, Uhlemann J, K.-J. Wolter KJ. Parylene C and silicone as biocompatible protection encapsulants for PCBs. In: 32nd International spring seminar on electronics technology (ISSE) 2009; 1-6.
29. Bhandari R, Negi S, Van Wagenen R, Solzbacher F. Parylene C-based flexible interface for neuroprosthetic applications. In: Electronic components and technology conference (ECTC), Proceedings 60th, 2010; 1010-14.
30. J.D. Dorn, and A.K. Ahuja The detection of motion by blind subjects with the epiretinal 60-electrode (argus ii) retinal prosthesis JAMA Ophthalmol 131 2 2013 183 189
31. T.Y. Chang et al. Cell and protein compatibility of Parylene-C surfaces Langmuir 23 2007 11718 11725
32. A. Ramachandran, M. Junk, K.P. Koch, and K.P. Hoffmann A study of Parylene C polymer deposition inside microscale gaps IEEE Trans Adv Packag 30 4 2007 712 724
33. C. Hassler, R.P. Von Metzen, P. Ruther, and T. Stieglitz Characterization of parylene C as an encapsulation material for implanted neural prostheses J Biomed Mater Res B 93B 1 2010 266 274
34. C. Hassler, T. Boretius, and T. Stieglitz Polymers for neural implants J Polym Sci Part B Polym Phys 49 1 2011 18 33
35. Hara SA, Kim BJ, Kuo JTW, Lee C, Gutierrez CA, Hoang T, Meng E, Pre-implantation electrochemical characterization of a Parylene C sheath microelectrode array probe. In: Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC) 2012; 5126-9.
36. F.G. Yamagishi Investigations of plasma-polymerized films as primers for Parylene-C coatings on neural prosthesis materials Thin Solid Films 202 1 1991 39 50
37. J.P. Seymour, Y.M. Elkasabi, H.Y. Chen, J. Lahann, and D.R. Kipke The insulation performance of reactive parylene films in implantable electronic devices Biomaterials 30 31 2009 6158 6167
38. D. Ziegler, T. Suzuki, and S. Takeuchi Fabrication of flexible neural probes with built-in microfluidic channels by thermal bonding of Parylene J Microelectromech Syst 15 6 2006 1477 1482
39. A.K. Sharma, and H. Yasuda Effect of glow discharge treatment of substrates on parylene-substrate adhesion J Vac Sci Technol 21 4 1982 994 998
40. J.H. Lee, K.S. Hwang, K.H. Yoon, T.S. Kim, and S. Ahn Microstructure and adhesion of Au deposited on Parylene-C substrate with surface modification for potential immunoassay application IEEE Trans Plasma Sci 32 2 2004 505 509
41. H. Kim, and K. Najafi Characterization of low-temperature wafer bonding using thin-film parylene J Microelectromech Syst 14 6 2005 1347 1355
42. H. Yasuda, Q. Yu, and M. Chen Interfacial factors in corrosion protection: an EIS study of model systems Prog Org Coatings 41 4 2001 273 279
43. 3 and parylene C bi-layer encapsulation for chronic implantable electronics Appl Phys Lett 101 9 2012 093702 093705
44. B. Díaz, E. Härkönen, J. Światowska, V. Maurice, A. Seyeux, and P. Marcus et al. Low-temperature atomic layer deposition of Al2O3 thin coatings for corrosion protection of steel: Surface and electrochemical analysis Corros Sci 53 6 2011 2168 2175
45. X. Xie, L. Reith, P. Tathireddy, and F. Solzbacher Long-term in-vitro investigation of Parylene-C as encapsulation material for neural interfaces Procedia Eng 25 2011 4
46. W.F. Gorham A new, general synthetic method for the preparation of linear poly-p-xylylenes J Polym Sci [A1] 4 12 1966 3027 3039
47. S.F. Cogan Neural stimulation and recording electrodes Annu Rev Biomed Eng 10 1 2008 275 309
48. A. Kahouli et al. Structural and dielectric study of parylene C thin films Appl Phys Lett 94 15 2009 152901
49. G. Bierwagen, D. Tallman, J. Li, L. He, and C. Jeffcoate EIS studies of coated metals in accelerated exposure Prog Org Coatings 46 2 2003 149 158
50. A. Amirudin, and D. Thieny Application of electrochemical impedance spectroscopy to study the degradation of polymer-coated metals Prog Org Coatings 26 1 1995 1 28
51. C. Fernández-Sánchez, C.J. McNeil, and K. Rawson Electrochemical impedance spectroscopy studies of polymer degradation: application to biosensor development Trac Trends Anal Chem 24 1 2005 37 48
52. M.E. Orazem, and B. Tribollet Electrochemical impedance spectroscopy 2008 Wiley New York
53. M. Cieślik, K. Engvall, J. Pan, and A. Kotarba Silane-parylene coating for improving corrosion resistance of stainless steel 316L implant material Corros Sci 53 1 2011 296 301
54. E. Akbarinezhad, and H.R. Faridi Different approaches in evaluating organic paint coatings with electrochemical impedance spectroscopy Surf Eng 24 4 2008 280 286
55. D.W.L. Hukins, A. Mahomed, and S.N. Kukureka Accelerated aging for testing polymeric biomaterials and medical devices Med Eng Phys 30 10 2008 1270 1274
56. Uematsu M, Frank EU. Static Dielectric Constant of Water and Steam (American Chemical Society and the American Institute of Physics for the National Bureau of Standards, 1981).
57. E. Barsoukov, and J.R. Macdonald Impedance spectroscopy: theory, experiment, and applications 2005 Wiley New York
58. S.R. Taylor Assessing the moisture barrier properties of polymeric coatings using electrical and electrochemical methods IEEE Trans Electr Insul 24 5 1989 787 806
59. F. Deflorian, L. Fedrizzi, S. Rossi, and P. Bonora Organic coating capacitance measurement by EIS: ideal and actual trends Electrochim Acta 44 24 1999 4243 4249
60. A. Sabot, and S. Krause Simultaneous quartz crystal microbalance impedance and electrochemical impedance measurements. investigation into the degradation of thin polymer films Anal Chem 74 14 2002 3304 3311
61. 2 atomic layer deposition on copper for water corrosion resistance ACS Appl Mater Interfaces 3 12 2011 4593 4601
62. G.T. Hwang et al. In vivo silicon-based flexible radio frequency integrated circuits monolithically encapsulated with biocompatible liquid crystal polymers ACS Nano 7 5 2013 4545 4553
63. S.W. Lee, K.S. Min, J. Jeong, J. Kim, and S.J. Kim Monolithic encapsulation of implantable neuroprosthetic devices using liquid crystal polymers IEEE Trans Biomed Eng 58 8 2011 2255 2263
64. S.W. Lee, J.M. Seo, S. Ha, E.T. Kim, H. Chung, and S.J. Kim Development of microelectrode arrays for artificial retinal implants using liquid crystal polymers Invest Ophthalmol Vis Sci 50 12 2009 5859 5866
65. L.K. Massey Permeability properties of plastics and elastomers: a guide to packaging and barrier materials second ed. 2002 William Andrew Norwich, NY
66. W. Li, D.C. Rodger, E. Meng, J.D. Weiland, M.S. Humayun, and Y.C. Tai Wafer-level parylene packaging with integrated RF electronics for wireless retinal prostheses J Microelectromech Syst 19 4 2010 735 742
67. Stark BH, Najafi K. An ultra-thin hermetic package utilizing electroplated gold. In: Dig. 11th IEEE int. conf. solid-state sensors and actuators (transducers' 01) 2001; 194-7.
68. Y. Zuo, R. Pang, W. Li, J.P. Xiong, and Y.M. Tang The evaluation of coating performance by the variations of phase angles in middle and high frequency domains of EIS Corros Sci 50 12 2008 3322 3328
69. A. Prasad, and J.C. Sanchez Quantifying long-term microelectrode array functionality using chronic in vivo impedance testing J Neural Eng 9 2 2012 026028