Parylene coated silicon probes for neural prosthesis

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 947-950

  Huang, Ray ^a   Pang, Changlin ^a   Tai, Yu Chong ^a   Emken, Jeremy ^a   Ustun, Cevat ^a   Andersen, Richard ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Neural prosthesis; Parylene cable; Silicon probe

Indexed keywords

BIOCOMPATIBILITY; ELECTRODES; NEURAL PROSTHESES; PROBES; PROSTHETICS;

CORTICAL STRUCTURES; ELECTRODE ARRAYS; IN-VIVO; NEURAL PROSTHETIC; PARYLENE CABLE; PARYLENES; SENSING ELECTRODE; SILICON ELECTRODE; SILICON PROBE; SOAK TESTING;

SILICON;

EID: 50249110179     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484478     Document Type: Conference Paper

References (5)

1. C. Pang, S. Musallam, Y.-C. Tai, J. W. Burdick, and R. A. Andersen, "Novel Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses," IEEE-EMBS MMB, 2006.
2. W. Li, D.C. Rodger, J.D. Weiland, M.S. Humayun, Y.C. Tai, "Integrated Flexible Ocular Coil for Power and Data Transfer in Retinal Prostheses," Proc. 27th Eng. in Med. and Biol. Soc., 2005
3. P. Srinivasan, F. R. Beyette, and I. Papautsky, "Micromachined Arrays of Cantilevered Glass Probes," Appl. Opt. 43, 776-782 (2004)
4. J. Vossen, W. Kern, Thin Film Processes, Academic Press, 1978, p. 440
5. D. Robinson, "The Electrical Properties of Metal Microelectrodes," Preceedings of the IEEE, Vol. 56, No 6. 1968