Switchable wetting and flexible SiC thin film with nanostructures for microfluidic surface-enhanced Raman scattering sensors

Sensors and Actuators, A: Physical

Volumn 208, Issue , 2014, Pages 166-173

  Zhang, Xiao Sheng ^a   Meng, Bo ^a   Zhu, Fu Yun ^a   Tang, Wei ^a   Zhang, Hai Xia ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Deep reactive ion etching; Flexible materials; SERS; Silicon carbide; Switchable wettability

Indexed keywords

EID: 84894629650     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.12.030     Document Type: Article

References (37)

1. Special issue on silicon carbide devices and technology IEEE Trans. Electron Dev. 55 2008 1795 2065
2. P.M. Sarro Silicon carbide as a new MEMS technology Sens. Actuators A 82 2000 210 218
3. S. Xie, V. Savu, W. Tang, O. Vazquez-Mena, K. Sidler, H. Zhang, and J. Brugger Robust PECVD SiC membrane made for stencil lithography Microelectron. Eng. 88 2011 2790 2793
4. C.R. Stoldt, M.C. Fritz, C. Carraro, and R. Maboudian Micromechanical properties of silicon-carbide thin films deposited using single-source chemical-vapor deposition Appl. Phys. Lett. 79 2001 347
5. K. Zekentes, and K. Rogdakis SiC nanowires: material and devices J. Phys. D: Appl. Phys. 44 2011 133001
6. C.R. Stoldt, C. Carraro, W.R. Ashurst, D. Gao, R.T. Howe, and R. Maboudian A low-temperature CVD process for silicon carbide MEMS Sens. Actuators A 97 98 2002 410 415 (Pubitemid 34758748)
7. W. Tang, B. Meng, W. Su, and H.X. Zhang Investigation of silicon/glass anodic bonding with PECVD silicon carbide as the intermediate layer J. Micromech. Microeng. 22 2012 095011
8. I. Laboriante, A. Suwandi, C. Carraro, and R. Maboudian Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating Sens. Actuators A 193 2013 238 245
9. H.X. Zhang, H. Guo, Y. Wang, G.B. Zhang, and Z.H. Li Study on a PECVD SiC-coated pressure sensor J. Micromech. Microeng. 17 2007 426 431 (Pubitemid 46778452)
10. L.S. Pakula, H. Yang, H.T.M. Pham, P.J. French, and P.M. Sarro Fabrication of a CMOS compatible pressure sensor for harsh environments J. Micromech. Microeng. 14 2004 1478 1483
11. G.H. Kroetz, M.H. Eickhoff, and H. Moeller Silicon compatible materials for harsh environment sensors Sens. Actuators A 74 1999 182 189
12. A. Kohei, W. Naoki, O. Hajime, Y. Hiroshi, K. Tsunenobu, and S. Jun Single-crystalline 4H-SiC micro cantilevers with a high quality factor Sens. Actuators A 197 2013 122 125
13. T. Sun, G. Wang, L. Feng, B. Liu, Y. Ma, L. Jiang, and D. Zhu Reversible switching between superhydrophilicity and superhydrophobicity Angew. Chem. Int. Ed. 43 2004 357 360 (Pubitemid 38090076)
14. X. Yu, Z. Wang, Y. Jiang, F. Shi, and X. Zhang Reversible pH-responsive surface: from superhydrophobicity to superhydrophilicity Adv. Mater. 17 2005 1289 1293 (Pubitemid 40682193)
15. J.J. Niu, J.N. Wang, and Q.F. Xu Aligned silicon carbide nanowire crossed nets with high superhydrophobicity Langmuir 24 2008 6918 6923
16. J.J. Niu, and J.N. Wang A novel self-cleaning coating with silicon carbide nanowires J. Phys. Chem. B 113 2009 2909 2912
17. Y. Liu, W. Lin, Z. Lin, Y. Xiu, and C.P. Wong A combined etching process toward robust superhydrophobic SiC surfaces Nanotechnology 23 2012 255703
18. J. Li, S. Sambandam, W. Lu, and C.M. Lukehart Carbon nanofibers 'spot-welded' to carbon felt: a mechanically stable, bulk mimic of lotus leaves Adv. Mater. 20 2008 420 424
19. H.Y. Mao, W.G. Wu, D.D. She, G.C. Sun, P.P. Lv, and J. Xu Microfluidic surface-enhanced Raman scattering sensors based on nanopillar forests realized by an oxygen-plasma-stripping-of-photoresist technique Small 2013 10.1002/smll.201300036
20. D.A. Stuart, J.M. Yuen, N. Shah, O. Lyandres, C. Yonzon, M.R. Glucksberg, J.T. Walsh, and R.P. van Duyne In vivo glucose measurement by surface-enhanced Raman spectroscopy Anal. Chem. 78 2006 7211 7215 (Pubitemid 44607565)
21. V. Deckert, D. Zeisel, R. Zenobi, and T. Vo-Dinh Near-field surface-enhanced Raman imaging of dye-labeled DNA with 100-nm resolution Anal. Chem. 70 1998 2646 2650
22. K. Chen, M. Leona, K. Vo-Dinh, F. Yan, M.B. Wabuyele, and T. Vo-Dinh Application of surface-enhanced Raman scattering (SERS) for the identification of anthraquinone dyes used in works of art J. Raman Spectrosc. 37 2006 520 527
23. X.S. Zhang, Q.L. Di, F.Y. Zhu, G.Y. Sun, and H.X. Zhang Wideband anti-reflective micro/nano dual-scale structures: fabrication and optical properties Micro Nano Lett. 6 2011 947 950
24. X.S. Zhang, F.Y. Zhu, G.Y. Sun, and H.X. Zhang Fabrication and characterization of squama-shape micro/nano multi-scale silicon material Sci. China Ser. E: Technol. Sci. 55 2012 3395 3400
25. X.S. Zhang, Q.L. Di, F.Y. Zhu, G.Y. Sun, and H.X. Zhang Superhydrophobic micro/nano dual-scale structures J. Nanosci. Nanotechnol. 13 2013 1539 1542
26. G. Sun, T. Gao, X. Zhao, and H. Zhang Fabrication of micro/nano dual-scale structures by improved deep reactive ion etching J. Micromech. Microeng. 20 2010 075028
27. D. Xia, L.M. Johnson, and G.P. López Anisotropic wetting surfaces with one-dimensional and directional structures: fabrication approaches, wetting properties and potential applications Adv. Mater. 24 2012 1287 1302
28. Y. Tian, and L. Jiang Intrinsically robust hydrophobicity Nat. Mater. 12 2013 291 292
29. B. Cortese, S. D'Amone, M. Manca, I. Viola, R. Cingolani, and G. Gigli Superhydrophobicity due to the hierarchical scale roughness of PDMS surfaces Langmuir 24 2008 2712 2718 (Pubitemid 351542678)
30. X.S. Zhang, F.Y. Zhu, M.D. Han, X.M. Sun, X.H. Peng, and H.X. Zhang Self-cleaning poly(dimethylsiloxane) film with functional micro/nano hierarchical structures Langmuir 29 2013 10769 10775
31. 2 Langmuir 21 2005 12213 12217 (Pubitemid 43040006)
32. A.H. Kuptsov, and G.N. Zhizhin Handbook of Fourier Transform Raman and Infrared Spectra of Polymers 1st ed. 1998 Elsevier Science Amsterdam
33. G. Socrates Infrared Characteristic Group Frequencies 3rd ed. 2001 John Wiley & Sons Chichester
34. M.A.E. Khakani, M. Chaker, A. Jean, S. Boily, H. Pépin, J.C. Kieffer, and S.C. Gujrathi Effect of rapid thermal annealing on both the stress and the bonding states of a-SiC:H films J. Appl. Phys. 74 1993 2834 2840
35. K. Nakamoto Infrared and Raman Spectra of Inorganic and Coordination Compounds. Part A: Theory and Applications in Inorganic Chemistry 6th ed. 2009 John Wiley & Sons Hoboken
36. D.L. Jeanmaire, and R.P. van Duyne Surface Raman spectroelectrochemistry: Part I. Heterocyclic, aromatic, and aliphatic amines adsorbed on anodized silver electrode J. Electroanal. Chem. 84 1977 1 20
37. E.C.L. Ru, and P.G. Etchegoin Principles of Surface-enhanced Raman Spectroscopy 2009 Elsevier Science & Technology