Single-crystalline 4H-SiC micro cantilevers with a high quality factor

Sensors and Actuators, A: Physical

Volumn 197, Issue , 2013, Pages 122-125

  Adachi, Kohei ^a   Watanabe, Naoki ^a   Okamoto, Hajime ^b   Yamaguchi, Hiroshi ^b   Kimoto, Tsunenobu ^a   Suda, Jun ^a  

^a KYOTO UNIVERSITY   (Japan)

^b Bio Medical Informatics Research Center   (Japan)

Author keywords

Cantilever; MEMS; Quality factor; Resonator; Single crystalline 4H SiC

Indexed keywords

CANTILEVER; HIGH QUALITY FACTORS; MICRO-CANTILEVERS; QUALITY FACTORS; RESONANCE CHARACTERISTIC; SELECTIVE ELECTROCHEMICAL ETCHINGS; SINGLE-CRYSTALLINE; VACUUM CONDITION;

CRYSTALLINE MATERIALS; FABRICATION; MEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; RESONATORS;

SILICON CARBIDE;

EID: 84877785130     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.04.014     Document Type: Article

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