Investigation of silicon/glass anodic bonding with PECVD silicon carbide as the intermediate layer

Journal of Micromechanics and Microengineering

Volumn 22, Issue 9, 2012, Pages

  Tang, W ^a,b   Meng, B ^a   Su, W ^b   Zhang, H X ^a  

^a PEKING UNIVERSITY   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC BONDING; CHEMICAL VAPOR DEPOSITED SILICON CARBIDE; INTERMEDIATE LAYERS; LEAK RATE; PASSIVATION LAYER; STRESS GRADIENT;

ENGINEERING; MICROMECHANICS;

SILICON CARBIDE;

EID: 84866327657     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/9/095011     Document Type: Article

References (18)

1. Knowles K M and van Helvoort A T J 2006 Int. Mater. Rev. 51 273-311 (Pubitemid 44727187)
2. Cozma A and Puers B 1995 J. Micromech. Microeng. 5 98-102
3. Mack S, Baumann H, Gosele U, Werner H and Schlogl R 1997 J. Electrochem. Soc. 144 1106-10
4. Fabbri M and Senna J R 2008 J. Electrochem. Soc. 155 G274-82
5. Rogers T and Kowal J 1995 Sensors Actuators A 46-47 113-20
6. Veenstra T T, Berenschot J W, Gardeniers J G E, Sanders R G P, Elwenspoek M C and Van D B A 2001 J. Electrochem. Soc. 148 G68-72 (Pubitemid 33648647)
7. Lee T M H, Lee D H Y, Liaw C Y N, Lao A I K and Hsing I M 2000 Sensors Actuators A 86 103-7
8. Plaza J A, Esteve J and Lora-Tamayo E 1998 Sensors Actuators A 67 181-4
9. Hsieh G W, Tsai C H and Lin W C 2005 Microelectron. J. 36 678-82 (Pubitemid 40973310)
10. Sarro P M 2000 Sensors Actuators A 82 210-8
11. Zhang H X, Guo H, Wang Y, Zhang G B and Li Z H 2007 J. Micromech. Microeng. 17 426-31 (Pubitemid 46778452)
12. Tang W, Zheng B X, Liu L, Chen Z and Zhang H X 2011 Micro. Nano. Lett. 6 265-8
13. Henmi H, Shoji S, Yoshimi K and Esashi M 1994 Sensors Actuators A 43 243-8
14. Birkholz M, Selle B, Fuhs W, Christiansen S, Strunk H P and Reich R 2001 Phys. Rev. B 64 1-9
15. Van Drieenhuizen B P, Goosen J F L, French P J and Wolffenbuttel R F 1993 Sensors Actuators A 37-38 756-65
16. Flannery A F, Mourlas N J, Storment C W, Tsai S, Tan S H, Heck J, Monk D, Kim T, Gogoi B and Kovacs G T A 1998 Sensors Actuators A 70 48-55
17. Wang Z and Zhang R J 1991 Metall. Mater. Trans. A 22 1585-93
18. Fang W and Wickert J A 1996 J. Micromech. Microeng. 6 301-9