Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating

Sensors and Actuators, A: Physical

Volumn 193, Issue , 2013, Pages 238-245

  Laboriante, Ian ^a,b   Suwandi, Anton ^a   Carraro, Carlo ^a   Maboudian, Roya ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b MICRON TECHNOLOGY INC   (United States)

Author keywords

High aspect ratio structures; MEMS; Polycrystalline silicon; Silicon carbide; Solid lubrication; Stiction; Surface modification; Wear resistance

Indexed keywords

ADHESION FORCES; ADHESION TEST; CONTACT RELIABILITY; CONTACTING SURFACES; CYCLIC CONTACTS; HIGH ASPECT RATIO STRUCTURES; MICROFABRICATED; PHYSICOCHEMICAL PROPERTY; SIC COATINGS; SILICON CARBIDE COATINGS; SILICON CARBIDE FILMS; SOLID LUBRICATION; WEAR-RESISTANT;

ADHESION; COATINGS; CONTACTS (FLUID MECHANICS); LUBRICATION; MEMS; SILICON CARBIDE; SOLID LUBRICANTS; STICTION; SURFACE TREATMENT; WEAR RESISTANCE;

POLYSILICON;

EID: 84874036494     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.01.036     Document Type: Article

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