Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level

Sensors and Actuators, A: Physical

Volumn 210, Issue , 2014, Pages 1-9

  Janphuang, P ^a   Lockhart, R ^a   Uffer, N ^a   Briand, D ^a   De Rooij, N F ^a  

^a EPFL   (Switzerland)

Author keywords

Bulk PZT; Microelectromechanical system (MEMS); Vibration energy harvesting; Wafer level fabrication; Wafer bonding

Indexed keywords

EID: 84894532391     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2014.01.032     Document Type: Article

References (43)

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