Piezoelectric MEMS for energy harvesting

MRS Bulletin

Volumn 37, Issue 11, 2012, Pages 1039-1050

  Kim, Sang Gook ^a   Priya, Shashank ^b   Kanno, Isaku ^c  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^c KOBE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT VIBRATIONS; AUTONOMOUS SENSORS; BATTERY-LESS; CHEMICAL BATTERIES; ENERGY HARVESTER; GRAIN TEXTURING; HIGH POWER DENSITY; LEAD-FREE PIEZOELECTRICS; MASS SCALE; MEDICAL SYSTEMS; MEMS PROCESS; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; PIEZOELECTRIC MEMS; RESONATOR STRUCTURES; ROBUST OPERATION; STATE OF THE ART; WIDE BANDWIDTH;

BANDWIDTH; ELECTROMECHANICAL DEVICES; EMBEDDED SYSTEMS; ENERGY CONVERSION; ENERGY HARVESTING; EPITAXIAL GROWTH; MEMS; PIEZOELECTRIC MATERIALS;

PIEZOELECTRICITY;

EID: 84869075298     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs.2012.275     Document Type: Review

References (89)

1. S. Priya, D. Inman, Eds., Energy Harvesting Technologies (Springer, NY, 2009).
2. A. Chandrakasan, R. Amirtharajah, J. Goodman, W. Rabiner, Proc. of the IEEE International Symposium on Circuits and Systems, ISCAS '98 (1998).
3. S.P. Beeby, M.J. Tudor, N.M. White, Meas. Sci. Technol. 17 (2006).
4. Z. Wang, J. Song, Science 312, 242 (2006).
5. A. Marin, S. Bressers, S. Priya, J. Phys. D: Appl. Phys. 44, 295501 (2011).
6. D.C. Bono, A. Sliski, J. Huang, R.C. O'Handley, US Patent 7,569,952 B1, (2009).
7. P. Krulevitch, A.P. Lee, P.B. Ramsey, J.C. Trevino, J. Hamilton, M.A. Northrup, J. Microelectromech. Syst. 5 (4), 270 (1996).
8. P. Muralt, R.G. Polcawich, S. Trolier-McKinstry, MRS Bull. 34 (9) (2009).
9. A. Hajati, S.G. Kim, Appl. Phys. Lett. 99, 083105 (2011).
10. H.-U. Kim, W.-H. Lee, H.V. Rasika Dias, S. Priya, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 56, 1555 (2009).
11. S. Roundy, P.K. Wright, Smart Mater. Struct. 13, 1131 (2004).
12. Y.B. Jeon, R. Sood, J.H. Jeong, S.-G. Kim, Sens. Actuators 122, 16 (2005).
13. K. Morimoto, I. Kanno, K. Wasa, H. Kotera, Sens. Actuators, A 163, 428 (2010).
14. H. Kim, S. Priya, H. Stephanou, K. Uchino, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54, 1851 (2007).
15. J. Jiang, R.N. Miles, J. Sound Vib. 220 (4), 683 (1999).
16. D. Findeisen, System Dynamics and Mechanical Vibrations: An Introduction (Springer, NY, 2000).
17. J.H. Ginsberg, Mechanical and Structural Vibrations: Theory and Applications (Wiley, NY, 2001).
18. K. Uchino, Ferroelectric Devices (Marcel Dekker, NY, 2000).
19. A. Hajati, PhD thesis, Massachusetts Institute of Technology (2010).
20. M. Renaud, K. Karakaya, T. Sterken, P. Fiorini, C. Van Hoof, R. Puers, Sens. Actuators, A 145-146, 380 (2008).
21. S. Roundy, P.K. Wright, J.M. Rabaey, Energy Scavenging for Wireless Sensor Networks (Kluwer Academic Publishers, Boston, 2003).
22. E.K. Reilly, L.M. Miller, R. Fain, P. Wright, Proc. PowerMEMS 312 (2009).
23. A. Erturk, D.J. Inman, J. Intell. Mater. Syst. Struct. 19, 1311 (2008).
24. S. Roundy, P.K. Wright, J. Rabaey, Comput. Commun. 26 (11), 1131 (2003).
25. P. Muralt, M. Marzencki, B. Belgacem, F. Calame, S. Basrour, Proc. Chem. 1, 1191 (2009).
26. A. Massaro, S. De Guido, I. Ingrosso, R. Cingolani, M. De Vittorio, M. Cori, A. Bertacchini, L. Larcher, A. Passaseo, Appl. Phys. Lett. 98, 053502 (2011).
27. L.M. Miller, E. Halvorsen, T. Dong, P.K. Wright, J. Micromech. Microeng. 21, 045029 (2011).
28. H. Durou, G.A. Ardilla-Rodriguez, A. Ramond, X. Dollat, C. Rossi, D. Esteve, PowerMEMS (Leuven, Belgium, 2010).
29. D. Isarakorn, D. Briand, P. Janphuang, A. Sambri, S. Gariglio, J.-M. Triscone, F. Guy, J.W. Reiner, C.H. Ahn, N.F. de Rooij, Smart Mater. Struct. 20 (2), (2011).
30. M. Defosseux, M. Allain, P. Ivaldi, E. Defay, S. Basrour, Proc. of 16th International Conference on Solid-StateSensors, Actuators and Microsystems (Transducers 2011) (Beijing, China, June 2011), pp. 1859-1862 .
31. M. Marzencki, Y. Ammar, S. Basrour, Proc. Int. Conf. on Solid-State Sensors, Actuators, and Microsystems, Lyon (2007), pp. 887-890 .
32. T. Hirasawa, T.-T. Yen, P.K. Wright, A.P. Pisano, L. Lin, Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2010) (Leuven, Belgium, 2010), pp. 211-214 .
33. T.-T. Yen, T. Hirasawa, P.K. Wright, A.P. Pisano, L. Lin, J. Micromech. Microeng. 21, 085037 (2011).
34. A. Bertacchini, S. Scorcioni, D. Dondi, L. Larcher, P. Pavan, M.T. Todaro A. Campa, G. Caretto, S. Petroni, A. Passaseo, M. De Vittorio, Proceedings of the European Solid-State Device Research Conference (ESSDERC) 12-16 September 2011 (2011), pp. 119-122 .
35. R. van Schaijk, R. Elfrink, T.M. Kamel, M. Goedbloed, IEEE Sensors Conference (2008), pp. 45-48 .
36. R. Elfrink, V. Pop, D. Hohlfeld, T. Kamel, S. Matova, C. de Nooijer, M. Jambunathan, M. Goedbloed, L. Caballero Guindo, M. Renaud, J. Penders, R. van Schaijk, IEEE International Electron Devices Meeting (IEDM) (2009), pp. 543-546 .
37. R. Elfrink, T.M. Kamel, M. Goedbloed, S. Matova, D. Hohlfeld, Y. Van Andel, R. van Schaijk, J. Micromech. Microeng. 19, 095005 (2009).
38. R. Elfrink, M. Renaud, T.M. Kamel, C. de Nooijer, M. Jambunathan, M. Goedbloed, D. Hohlfeld, S. Matova, V. Pop, L. Caballero, R. van Schaijk, J. Micromech. Microeng. 20, 104001 (2010).
39. R. Xu, A. Lei, T.L. Christiansen, K. Hansen, M. Guizzetti, K. Birkelund, E.V. Thomsen, O. Hansen, Proc. of 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'11) (Beijing, China, 2011), pp. 679-682 .
40. A. Lei, R. Xu, A. Thyssen, A.C. Stoot, T.L. Christiansen, K. Hansen, R. Lou-Møller, E.V. Thomsen, K. Birkelund, Proc. of The 24th International Conference on Micro Electro Mechanical Systems (MEMS'11) (Cancun, Mexico, 2011), pp. 125-128 .
41. J.C. Park, J.Y. Park, Y.-P. Lee, J. Microelectromech. Syst. 19 (5), 1215 (2010).
42. H.-B. Fang, J.-Q. Liu, Z.-Y. Xu, L. Dong, L. Wang, D. Chen, B.-C. Cai, Y. Liu, Microelectron. J. 37, 1280 (2006).
43. D. Shen, J.-H. Park, J. Ajitsaria, S.-Y. Choe, H.C. Wikle III, D.-J. Kim, J. Micromech. Microeng. 18, 055017 (2008).
44. B.S. Lee, S.C. Lin, W.J. Wu, X.Y. Wang, P.Z. Chang, C.K. Lee, J. Micromech. Microeng. 19 (6), 065014 (2009).
45. E.E. Aktakka, PhD thesis, University of Michigan (2012).
46. S. Priya, J. Electroceram. 19, 165 (2007).
47. A. Marin, S. Priya, Active and Passive Smart Structures and Integrated Systems 2012, H.A. Sodano, Ed. (SPIE, San Diego, CA), p. 83411L .
48. R. Xu, MS thesis, Massachusetts Institute of Technology (2012).
49. N. Dutoit, B. Wardle, S.-G. Kim, Integr. Ferroelectr. 71 (1), 121 (2005).
50. Q.-M. Wang, X.-H. Du, B. Xu, L.E. Cross, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 46, 638 (1999).
51. J.J. Bernstein, J. Bottari, K. Houston, G. Kirkos, R. Miller, B. Xu, Y. Ye, L.E. Cross, IEEE 1999 Ultrasonics Symposium (Lake Tahoe, NV, 1999).
52. R. Xu, S.G. Kim, Power MEMS 2012, accepted.
53. V. Bedekar, J. Oliver, S. Priya, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57, 1513 (2010).
54. S. Priya, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57, 2610 (2010).
55. M. Defosseux, M. Allain, P. Ivaldi, E. Defay, S. Basrour, Transducers '11, Beijing, China, 5-9 June 2011 (2011), pp. 1859-1862 .
56. N. Ledermann, P. Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, A. Seifert, N. Setter, Sens. Actuators, A 105, 162 (2003).
57. F. Martin, P. Muralt, M.-A. Dubois, A. Pezous, J. Vac. Sci. Technol., A 22, 361 (2004).
58. K. Tsubouchi, N. Mikoshiba, IEEE Trans. Sonics Ultrason. SU-32, 634 (1985).
59. K. Najafi, T. Galchev, E.E. Aktakka, R.L. Peterson, J. McCullagh, Transducers 2011, Beijing, China, pp. 1845-1850 (2011).
60. W. Al-ashtari, M. Hunstig, T. Hemsel, W. Sextro, Mechatronics 35019 (2012).
61. M.O. Mansour, M.H. Arafa, S.M. Megahed, Sens. Actuators, A 163 (1), 297 (2010).
62. K. Uchino, Ferroelectric Devices, 2nd ed.(CRC Press, Boca Raton, FL, 2009).
63. G. Han, J. Ryu, W. Yoon, J. Choi, B. Hahn, J. Kim, D. Park, C. Ahn, S. Priya, D. Jeong, J. Appl. Phys. 110, 124101 (2011).
64. B.A. Tuttle, J.A. Voigt, T.J. Garino, D.C. Goodnow, R.W. Schwartz, D.L. Lamppa, T.J. Headley, M.O. Eatough, Proceedings of the 8th IEEE International Symposium on Application of Ferroelectrics (1992), p. P344 .
65. G.L. Brennecka, W. Huebner, B.A. Tuttle, P.G. Clem, J. Am. Ceram. Soc. 87, 1459 (2004).
66. S. Yokoyama, T. Ozeki, T. Oikawa, H. Funakubo, Jpn. J. Appl. Phys. 41, 6705 (2002).
67. I. Kanno, S. Fujii, T. Kamada, R. Takayama, Appl. Phys, Lett. 70, 1378 (1997).
68. Y. Qi, J. Kim, T.D. Nguyen, B. Lisko, P.K. Purohit, M.C. McAlpine, Nano Lett. 11 (3), 1331 (2011).
69. S.E. Park, T.R. Shrout, J. Appl. Phys. 82, 1804 (1997).
70. J. Kuwata, K. Uchino, S. Nomura, Jpn. J. Appl. Phys. 21, 1298 (1982).
71. S.H. Baek, J. Park, D.M. Kim, V.A. Aksyuk, R.R. Das, S.D. Bu, D.A. Felker, J. Lettieri, V. Vaithyanathan, S.S.N. Bharadwaja, N. Bassiri-Gharb, Y.B. Chen, H.P. Sun, C.M. Folkman, H.W. Jang, D.J. Kreft, S.K. Streiffer, R. Ramesh, X.Q. Pan, S. Trolier-McKinstry, D.G. Schlom, M.S. Rzchowski, R.H. Blick, C.B. Eom, Science 334, 958 (2011).
72. C.W. Ahn, C.H. Choi, H.Y. Park, S. Nahm, S. Priya, J. Mater. Sci. 43, 6784 (2008).
73. C.W. Ahn, C.S. Park, D. Viehland, S. Nahm, D.H. Kang, K.S. Bae, S. Priya, Jpn. J. Appl. Phys. 47, 8880 (2008).
74. C.W. Ahn, D. Maurya, C.S. Park, S. Nahm, S. Priya, J. Appl. Phys. 105, 114108 (2009).
75. K. Shibata, K. Suenaga, K. Watanabe, F. Horikiri, A. Nomoto, T. Mishima, Jpn. J. Appl. Phys. 50, 041503 (2011).
76. I. Kanno, T. Ichida, K. Adachi, H. Kotera, K. Shibata, T. Mishima, Sens. Actuators, A 179, 132 (2012).
77. P. Muralt, J. Am. Ceram. Soc. 91, 1385 (2008).
78. R. van Schaijk, R. Elfrink, T.M. Kamel, M. Goedbloed, IEEE Sensors 2008 Conference (2008), pp. 45-48 .
79. N. Heidrich, F. Knoebber, R.E. Sah, W. Pletschen, S. Hampl, V. Cimalla, V. Lebedev, Transducers'11, Beijing, China, 5-9 June 2011 (2011), pp. 1642-1644.
80. T.-T. Yen, T. Hirasawa, P.K. Wright, A.P. Pisano, L. Lin, J. Micromech. Microeng. 21, 085037 (2011).
81. F. Stoppel, C. Schroeder, F. Senger, B. Wagner, W. Benecke, Procedia Eng. 25, 721 (2011).
82. B. Marinkovich, H. Koser, Appl. Phys. Lett. 94, 103505 (2009).
83. B.P. Mann, N.D. Sims, J. Sound Vib. 319, 515 (2009).
84. D.A.W. Barton, S.G. Burrow, L.R. Clare, J. Vib. Acoust. 132, 1 (2010).
85. A. Erturk, D.J. Inman, J. Sound Vib. 330 (10), 2339 (2011).
86. B. Andò, S. Baglio, C. Trigona, N. Dumas, L. Latorre, P. Nouet, J. Micromech. Microeng. 20, 125020 (2010).
87. F. Cottone, L. Gammaitoni, H. Vocca, M. Ferrari, V. Ferrari, Smart Mater. Struct. 21 (2012).
88. R. Xu, A. Hajati, S.G. Kim, Power MEMS 2011 (Seoul, Korea, 2011).
89. A. Badel, D. Guyomar, F. Lefeuvre, C. Richard, J. Intell. Mater. Syst. Struct. 16, 889 (2005).