Fabrication and analysis of high-performance piezoelectric MEMS generators

Journal of Micromechanics and Microengineering

Volumn 22, Issue 6, 2012, Pages

  Tang, Gang ^a,b   Liu, Jing Quan ^a   Yang, Bin ^a   Luo, Jiang Bo ^a   Liu, He Sheng ^c   Li, Yi Gui ^a   Yang, Chun Sheng ^a   He, Dan Nong ^a   Dao, Viet Dzung ^d   Tanaka, Katsuhiko ^d   Sugiyama, Susumu ^d  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b NANCHANG INSTITUTE OF TECHNOLOGY   (China)

^c SHANGRAO NORMAL UNIVERSITY   (China)

^d RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BULK CERAMICS; BULK PZT; COMBINED METHOD; COMPOSITE BEAM; CONDUCTIVE EPOXY; ENERGY HARVESTER; FABRICATION PROCESS; KEY TECHNIQUES; LOW TEMPERATURE BONDING; MECHANICAL LAPPING; MICROGENERATORS; NOVEL TECHNIQUES; OUTPUT PERFORMANCE; OUTPUT POWER; OUTPUT VOLTAGES; PB(ZR , TI)O; PIEZOELECTRIC MEMS; POWER DENSITIES; PROOF MASS; PZT; RESISTIVE LOADS; SILICON LAYER; SILICON ON INSULATOR WAFERS;

BONDING; EPOXY RESINS; FABRICATION; LEAD; NATURAL FREQUENCIES; OPTIMIZATION; PIEZOELECTRIC CERAMICS; PIEZOELECTRICITY; WAFER BONDING; ZIRCONIUM;

SILICON WAFERS;

EID: 84861446730     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/6/065017     Document Type: Article

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