MEMS-based thick film PZT vibrational energy harvester

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 125-128

  Lei, A ^a   Xu, R ^a   Thyssen, A ^a   Stoot, A C ^a   Christiansen, T L ^a   Hansen, K ^a   Lou Moller R ^b   Thomsen, E V ^b   Birkelund, K ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Meggitt PLC   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY HARVESTER; PZT; PZT THICK FILMS; RESISTIVE LOADS; RESONANT FREQUENCIES; SCREEN-PRINTED; SILICON-BASED; SOI WAFERS; UNIMORPH; VIBRATIONAL ENERGIES;

HARVESTERS; MECHANICAL ENGINEERING; MECHANICS; MEMS; NATURAL FREQUENCIES; POTASSIUM HYDROXIDE; REACTIVE ION ETCHING; SILICON WAFERS; THICK FILMS;

ENERGY HARVESTING;

EID: 79953800819     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734377     Document Type: Conference Paper

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