Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Sensors and Actuators, A: Physical

Volumn 188, Issue , 2012, Pages 383-388

  Xu, R ^a   Lei, A ^a   Dahl Petersen, C ^a   Hansen, K ^b   Guizzetti, M ^b   Birkelund, K ^a   Thomsen, E V ^a   Hansen, O ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Meggitt PLC   (United Kingdom)

Author keywords

Bimorph; Energy harvester; High pressure treatment; MEMS; PZT; Screen printing; Thick film

Indexed keywords

BIMORPH; CANTILEVER DEVICES; EFFICIENCY INCREASE; ENERGY HARVESTER; HARVESTING DEVICES; HIGH PRESSURE; HIGH PRESSURE TREATMENTS; MECHANICAL SUPPORT; PIEZOELECTRIC ELEMENTS; PIEZOELECTRIC ENERGY HARVESTING; POWER OUT PUT; PROOF MASS; PZT; SCREEN-PRINTED; SUPPORT MATERIALS; VIBRATION ENERGIES; VIBRATION ENERGY HARVESTING;

ELECTROMECHANICAL DEVICES; ENERGY HARVESTING; LEAD; MEMS; SCREEN PRINTING; SINTERING; STRESSES; THICK FILMS; VIBRATIONS (MECHANICAL); ZIRCONIUM;

PIEZOELECTRIC MATERIALS;

EID: 84870054197     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.12.035     Document Type: Conference Paper

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