High-throughput synthesis and characterization of (BaxSr 1-x)1+yTi1-yO3-δ and (Ba xSr1- x)1+yTi1-yO 3-zNz perovskite thin films

Crystal Growth and Design

Volumn 14, Issue 2, 2014, Pages 523-532

  David, Anaïs ^a   Guérin, Samuel ^a   Hayden, Brian E ^a   Noble, Robert ^a   Soulié, Jean Philippe ^a   Vian, Christopher ^a   Koutsaroff, Ivoyl P ^b   Higai, Shin'ichi ^b   Tanaka, Nobuhiko ^b   Konoike, Takehiro ^b   Ando, Akira ^b   Takagi, Hiroshi ^b   Yamamoto, Teiji ^b   Fukura, Tadao ^b   Ieki, Hideharu ^b  

^a Ilika Technologies   (United Kingdom)

^b MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL CHARACTERIZATION; HIGH-THROUGHPUT APPROACHES; HIGH-THROUGHPUT SYNTHESIS; HYSTERESIS MEASUREMENTS; PEROVSKITE STRUCTURES; PEROVSKITE THIN FILMS; RELATIVE PERMITTIVITY; STRUCTURAL CHARACTERIZATION;

DIELECTRIC LOSSES; ELECTRIC PROPERTIES; NITRIDES; NITROGEN; OXYGEN; PERMITTIVITY; PEROVSKITE; SAPPHIRE; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM;

THIN FILMS;

EID: 84893691370     PISSN: 15287483     EISSN: 15287505     Source Type: Journal    
DOI: 10.1021/cg401259r     Document Type: Article

References (32)

1. 3 thin film growth: X-ray diffraction and Raman spectroscopy J. Appl. Phys. 2009, 106 (3 034108
2. 3 thin films on various electrodes Jpn. J. Appl. Phys., Part 1 2000, 39 (4A) 1796-1800
3. 3 thin films Appl. Phys. Lett. 2007, 90 (14 142910
4. 3 films prepared by RF magnetron sputtering Jpn. J. Appl. Phys., Part 1 2005, 44 (9B) 6881-6884 (Pubitemid 43183028)
5. 3 films J. Appl. Phys. 2009, 105 (6 061606
6. 3 ceramic substrates Jpn. J. Appl. Phys., Part 1 2004, 43 (9B) 6740-6745
7. 3 prepared by sol-gel method J. Alloys Compd. 2010, 508 (2) 354-358
8. 3 buffer layer J. Mater. Sci.: Mater. Electron. 2008, 19 (5) 429-433 (Pubitemid 351314601)
9. Simoes, A. Z.; Moura, F.; Onofre, T. B.; Ramirez, M. A.; Varela, J. A.; Longo, E. Microwave-hydrothermal synthesis of barium strontium titanate nanoparticles J. Alloys Compd. 2010, 508 (2) 620-624
10. 3 thin films J. Electroceram. 2006, 16 (4) 587-591 (Pubitemid 44673940)
11. 3 thin films with enhanced dielectric properties Appl. Phys. A: Mater. Sci. Process. 2003, 77 (3-4) 499-505
12. 3 thick films deposited by ion beam sputtering on platinized silicon substrates J. Appl. Phys. 2009, 105 (4 044108
13. Padmini, P.; Taylor, T. R.; Lefevre, M. J.; Nagra, A. S.; York, R. A.; Speck, J. S. Realization of high tunability barium strontium titanate thin films by rf magnetron sputtering Appl. Phys. Lett. 1999, 75 (20) 3186-3188 (Pubitemid 129567636)
14. Pervez, N. K.; Hansen, P. J.; York, R. A. High tunability barium strontium titanate thin films for rf circuit applications Appl. Phys. Lett. 2004, 85 (19) 4451-4453 (Pubitemid 40001543)
15. Cross, J. S.; Koutsaroff, I. P. Review on ferroelectric thin film devices: Fundamental aspects and integration challenges Taikabutsu 2010, 62 (4) 162-174
16. 3 thin films J. Appl. Phys. 2009, 106 (6 064107
17. Guerin, S.; Hayden, B. E. Physical vapor deposition method for the high-throughput synthesis of solid-state material libraries J. Comb. Chem. 2006, 8 (1) 66-73 (Pubitemid 43166083)
18. Devi, S.; Jha, A. K. Structural, dielectric and ferroelectric studies of tungsten substituted barium strontium titanate Ferroelectrics 2010, 402, 168-174
19. Fan, Y. H.; Yu, S. H.; Sun, R.; Li, L.; Yin, Y. S.; Wong, K. W.; Du, R. X. Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils Appl. Surf. Sci. 2010, 256 (22) 6531-6535
20. 3 based combinatorial thin film capacitors library J. Appl. Phys. 2010, 108 (11 114108
21. 3 thin films J. Appl. Phys. 2007, 102 (6 064106
22. Koutsaroff, I. Presented at the Symposium 6 (Advances in Electro Ceramics), ICC3, Osaka, Japan, Nov 14-18 2010, 2010; Osaka, Japan, 2010, S6-006.
23. Wagner, C. D.; Davis, L. E.; Zeller, M. V.; Taylor, J. A.; Raymond, R. H.; Gale, L. H. Empirical atomic sensitivity factors for quantitative-analysis by electron-spectroscopy for chemical-analysis Surf. Interface Anal. 1981, 3 (5) 211-225 (Pubitemid 12513864)
24. Craciun, V.; Singh, R. K. Characteristics of the surface layer of barium strontium titanate thin films deposited by laser ablation Appl. Phys. Lett. 2000, 76 (14) 1932-1934
25. 3 thin films on n-type Si(100) Appl. Phys. Lett. 2006, 88 (13 132907
26. 3 thin films deposited on silicon Appl. Surf. Sci. 2000, 157 (1-2) 14-22 (Pubitemid 30565701)
27. Feng, L. W.; Chang, C. Y.; Chang, T. C.; Tu, C. H.; Wang, P. S.; Lin, C. C.; Chen, M. C.; Huang, H. C.; Gan, D. S.; Ho, N. J.; Chen, S. C. Formation and composition of titanium oxinitride nanocrystals synthesized via nitridizing titanium oxide for nonvolatile memory applications Thin Solid Films 2011, 519 (22) 7977-7981
28. Saha, N. C.; Tompkins, H. G. Titanium nitride oxidation chemistry-An X-ray photoelectron spectroscopy study J. Appl. Phys. 1992, 72 (7) 3072-3079
29. 3 films Appl. Phys. Lett. 2006, 89 (23 231922
30. 3 films: Electronic and optical properties studies J. Appl. Phys. 2007, 101 (6 063708
31. Simon, P.; Pignon, B.; Miao, B.; Coste-Leconte, S.; Leconte, Y.; Marguet, S.; Jegou, P.; Bouchet-Fabre, B.; Reynaud, C.; Herlin-Boime, N. N-doped titanium monoxide nanoparticles with TiO rock-salt structure, low energy band gap, and visible light activity Chem. Mater. 2010, 22 (12) 3704-3711
32. Spartak, G. Ferroelectrics in Microwave Devices, Circuits and Systems Physics, Modeling, Fabrication and Measurements; Springer: London, 2009.