메뉴 건너뛰기




Volumn 106, Issue 6, 2009, Pages

Internal residual stress studies and enhanced dielectric properties in La0.7 Sr0.3 CoO3 buffered (Ba,Sr) TiO3 thin films

Author keywords

[No Author keywords available]

Indexed keywords

BST THIN FILMS; DIELECTRIC CONSTANTS; GRAIN SIZE; LOSS TANGENT; PREFERRED ORIENTATIONS; PT(111); RANDOM ORIENTATIONS; SI SUBSTRATES; TENSILE RESIDUAL STRESS; THERMAL EXPANSION COEFFICIENTS; TUNABILITIES; X-RAY DIFFRACTION STUDIES;

EID: 70349646112     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3223325     Document Type: Article
Times cited : (8)

References (33)
  • 3
    • 33748852388 scopus 로고    scopus 로고
    • Preface: Science of ferroelectric thin films and application to devices
    • DOI 10.1063/1.2336995
    • S. Baik, N. Setter, and O. Auciello, J. Appl. Phys. 0021-8979 100, 051501 (2006). 10.1063/1.2336995 (Pubitemid 44422005)
    • (2006) Journal of Applied Physics , vol.100 , Issue.5 , pp. 051501
    • Baik, S.1    Setter, N.2    Auciello, O.3
  • 7
    • 20944446579 scopus 로고    scopus 로고
    • 3 thin films
    • DOI 10.1063/1.1903099, 104107
    • K. Morito and T. Suzuki, J. Appl. Phys. 0021-8979 97, 104107 (2005). 10.1063/1.1903099 (Pubitemid 40866104)
    • (2005) Journal of Applied Physics , vol.97 , Issue.10 , pp. 1-5
    • Morito, K.1    Suzuki, T.2
  • 9
    • 34047261788 scopus 로고    scopus 로고
    • Effect of the thermal expansion matching on the dielectric tunability of (100)-one-axis-oriented (Ba0.5 Sr0.5) Ti O3 thin films
    • DOI 10.1063/1.2719621
    • S. Ito, H. Funakubo, I. P. Koutsaroff, M. Zeiner, and A. Cervin-Lawry, Appl. Phys. Lett. 0003-6951 90, 142910 (2007). 10.1063/1.2719621 (Pubitemid 46550129)
    • (2007) Applied Physics Letters , vol.90 , Issue.14 , pp. 142910
    • Ito, S.1    Funakubo, H.2    Koutsaroff, I.P.3    Zelner, M.4    Cervin-Lawry, A.5
  • 11
    • 0036607423 scopus 로고    scopus 로고
    • Phase diagrams and dielectric response of epitaxial barium strontium titanate films: A theoretical analysis
    • DOI 10.1063/1.1473675
    • Z. G. Ban and S. P. Alpay, J. Appl. Phys. 0021-8979 91, 9288 (2002). 10.1063/1.1473675 (Pubitemid 34638054)
    • (2002) Journal of Applied Physics , vol.91 , Issue.11 , pp. 9288
    • Ban, Z.-G.1    Alpay, S.P.2
  • 13
    • 23844531562 scopus 로고    scopus 로고
    • 3 -based active thin films with silicon-compatible materials and process science protocols to enable affordable on-the-move communications technologies
    • DOI 10.1063/1.1977201, 024507
    • M. W. Cole, W. D. Nothwang, J. D. Demaree, and S. Hirsch, J. Appl. Phys. 0021-8979 98, 024507 (2005). 10.1063/1.1977201 (Pubitemid 41144589)
    • (2005) Journal of Applied Physics , vol.98 , Issue.2 , pp. 1-6
    • Cole, M.W.1    Nothwang, W.D.2    Demaree, J.D.3    Hirsch, S.4
  • 15
    • 45149129446 scopus 로고    scopus 로고
    • 0003-6951,. 10.1063/1.2945290
    • S. Lu and Z. Xu, Appl. Phys. Lett. 0003-6951 92, 232907 (2008). 10.1063/1.2945290
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 232907
    • Lu, S.1    Xu, Z.2
  • 23
    • 0001162210 scopus 로고
    • 0096-8250,. 10.1103/PhysRev.56.978
    • A. L. Patterson, Phys. Rev. 0096-8250 56, 978 (1939). 10.1103/PhysRev.56.978
    • (1939) Phys. Rev. , vol.56 , pp. 978
    • Patterson, A.L.1
  • 24
    • 0027552523 scopus 로고
    • 0002-7820,. 10.1111/j.1151-2916.1993.tb03645.x
    • N. Q. Minh, J. Am. Ceram. Soc. 0002-7820 76, 563 (1993). 10.1111/j.1151-2916.1993.tb03645.x
    • (1993) J. Am. Ceram. Soc. , vol.76 , pp. 563
    • Minh, N.Q.1
  • 26
    • 0021463798 scopus 로고
    • PRECISE DETERMINATION OF LATTICE PARAMETER AND THERMAL EXPANSION COEFFICIENT OF SILICON BETWEEN 300 AND 1500 K.
    • DOI 10.1063/1.333965
    • Y. Okada and Y. Tokumaru, J. Appl. Phys. 0021-8979 56, 314 (1984). 10.1063/1.333965 (Pubitemid 14626802)
    • (1984) Journal of Applied Physics , vol.56 , Issue.2 , pp. 314-320
    • Okada Yasumasa1    Tokumaru Yozo2
  • 27
    • 33644757721 scopus 로고    scopus 로고
    • Grain growth and residual stress in BST thin films
    • DOI 10.1080/10584580590964736, Proceedigns of Symposium on Ferroelectricity and Piezoelectricity, IMRC 2004
    • W. D. Nothwang, M. W. Cole, and S. G. Hirsch, Integr. Ferroelectr. 1058-4587 71, 107 (2005). 10.1080/10584580590964736 (Pubitemid 43338656)
    • (2005) Integrated Ferroelectrics , vol.71 , pp. 107-113
    • Nothwang, W.D.1    Cole, M.W.2    Hirsch, S.G.3
  • 33
    • 0000163330 scopus 로고    scopus 로고
    • 0021-8979,. 10.1063/1.1288018
    • S. Saha and S. B. Krupanidhi, J. Appl. Phys. 0021-8979 88, 3506 (2000). 10.1063/1.1288018
    • (2000) J. Appl. Phys. , vol.88 , pp. 3506
    • Saha, S.1    Krupanidhi, S.B.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.