|
Volumn 157, Issue 1, 2000, Pages 14-22
|
X-ray photoelectron spectroscopy study on the composition and structure of BaTiO3 thin films deposited on silicon
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
BARIUM TITANATE;
BINDING ENERGY;
CRYSTAL ATOMIC STRUCTURE;
ELECTRON ENERGY LEVELS;
FERROELECTRIC MATERIALS;
OXIDATION;
SILICON;
SOL-GELS;
STOICHIOMETRY;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
FERROELECTRIC THIN FILMS;
DIELECTRIC FILMS;
|
EID: 0033886894
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(99)00495-X Document Type: Article |
Times cited : (70)
|
References (39)
|