Characterization of thin-film decoupling and high-frequency (Ba,Sr)TiO 3 capacitors on Al2O3 ceramic substrates

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9 B, 2004, Pages 6740-6745

  Koutsaroff, Ivoyl P ^a   Bernacki, Thomas A ^a   Zelner, Marina ^a   Cervin Lawry, Andrew ^a   Jimbo, Takehito ^b   Suu, Koukou ^b  

^a Gennum Corporation   (Canada)

^b ULVAC INC   (Japan)

Author keywords

BST; Capacitor; Commutation quality factor; CSD; Decoupling; Loss tangent; Microwave; MOD; RF sputter; Thin film; Tunability; Varactor

Indexed keywords

ALUMINUM COMPOUNDS; CAPACITORS; CHARACTERIZATION; MICROWAVE CIRCUITS; SUBSTRATES; THIN FILMS; TITANIUM OXIDES; VARACTORS;

(BA1-X,SRX)TIO3 (BST); CHEMICAL SOLUTION DEPOSITION (CSD); COMMUTATION QUALITY FACTOR (CQF); DECOUPLING; LOSS TANGENT; METAL-ORGANIC DECOMPOSITION (MOD); MICROWAVE; RF SPUTTER; TUNABILITY;

CERAMIC MATERIALS;

EID: 10444281997     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.6740     Document Type: Conference Paper

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