Density control of carbon nanowalls grown by CH4/H2 plasma and their electrical properties

Carbon

Volumn 68, Issue , 2014, Pages 380-388

  Cho, Hyung Jun ^a   Kondo, Hiroki ^a   Ishikawa, Kenji ^a   Sekine, Makoto ^a   Hiramatsu, Mineo ^b   Hori, Masaru ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b MEIJO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOWALLS; CHEMICAL BONDING STATE; CRYSTAL QUALITIES; DISCHARGE POWER; ELECTRICAL CONDUCTIVITY; H-ATOM DENSITY; LINEAR DENSITY; PER UNIT LENGTH;

CARBON; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; CHEMICAL BONDS; OPTICAL EMISSION SPECTROSCOPY;

ELECTRIC PROPERTIES; QUALITY CONTROL;

EID: 84891557118     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2013.11.014     Document Type: Article

References (50)

1. P. Avouris, Z. Cihen, and V. Perebeinos Carbon-based electronics Nat Nanotechnol 2 2007 605 615
2. K. Nakada, M. Fujita, G. Dresselhaus, and M.S. Dresselhaus Edge state in graphene ribbons: nanometer size effect and edge shape dependence Phys Rev B 54 1996 17954 17961
3. X. Jia, M. Hofmann, V. Meunier, B.G. Sumpter, J. Campos-Delgado, and J.M. Romo-Herrera et al. Controlled formation of sharp zigzag and armchair edges in graphitic nanoribbons Science 323 2009 1701 1705
4. H. Zheng, and W. Duley First-principles study of edge chemical modifications in graphene nanodots Phys Rev B 78 2008 045421-1-5
5. Y.M. Lin, and P. Avouris Strong suppression of electrical noise in bilayer graphene nanodevices Nano Lett 8 2008 2119 2125
6. M. Hiramatsu, and M. Hori Carbon nanowalls: synthesis and emerging applications 2010 Springer International
7. M. Hiramatsu, K. Shiji, H. Amano, and M. Hori Fabrication of vertically aligned carbon nanowalls using capacitively coupled plasma-enhanced chemical vapor deposition assisted by hydrogen radical injection Appl Phys Lett 84 2004 4708 4710
8. M. Hiramatsu, K. Ito, C.H. Lau, J.S. Foord, and M. Hori Fabrication of vertically aligned carbon nanostructures by microwave plasma-enhanced chemical vapor deposition Diamond Relat Mater 12 2003 786 789
9. K. Shiji, M. Hiramatsu, A. Enomoto, M. Nakamura, H. Amano, and M. Hori Vertical growth of carbon nanowalls using rf plasma-enhanced chemical vapor deposition Diamond Relat Mater 14 2005 831 834
10. M. Hiramatsu, and M. Hori Fabrication of carbon nanowalls using novel plasma processing Jpn J Appl Phys 45 2006 5522 5527
11. W. Takeuchi, M. Ura, M. Hiramatsu, Y. Tokuda, H. Kano, and M. Hori Electrical conduction control of carbon nanowalls Appl Phys Lett 2008 213103-1-3
12. W. Takeuchi, H. Sasaki, S. Kato, S. Takashima, M. Hiramatsu, and M. Hori Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a micro discharge hollow cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas J Appl Phys 105 2009 113305-1-6
13. T. Mori, M. Hiramatsu, K. Yamakawa, K. Takeda, and M. Hori Fabrication of carbon nanowalls using electron beam excited plasma-enhanced chemical vapor deposition Diamond Relat Mater 17 2008 1513 1517
14. S. Kondo, M. Hori, K. Yamakawa, S. Den, H. Kano, and M. Hiramatsu Highly reliable growth process of carbon nanowalls using radical injection plasma-enhanced chemical vapor deposition J Vac Sci Technol B 26 2008 1294 1300
15. S. Kondo, S. Kawai, W. Takeuchi, K. Yamakawa, S. Den, and H. Kano et al. Initial growth process of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition J Appl Phys 106 2009 094302-6-1
16. + beam with hydrogen and fluorocarbon radical injection Appl Phys Express 3 2010 045102-1-3
17. S. Kawai, S. Kondo, W. Takeuchi, H. Kondo, M. Hiramatsu, and M. Hori Optical properties of evolutionary grown layers of carbon nanowalls analyzed by spectroscopic ellipsometry Jpn J Appl Phys 49 2010 060220-1-3
18. W. Takeuchi, H. Kondo, T. Obayashi, M. Hiramatsu, and M. Hori Electron field emission enhancement of carbon nanowalls by plasma surface nitridation Appl Phys Lett 98 2011 123107-1-3
19. W. Takeuchi, K. Takeda, M. Hiramatsu, Y. Tokuda, H. Kano, and S. Kimura et al. Monolithic self-sustaining nanographene sheet grown using plasma-enhanced chemical vapor deposition Phys Stat Solid A 207 2010 139 143
20. Y. Wu, and B. Yang Effects of localized electric field on the growth of carbon nanowalls Nano Lett 2 2002 355 359
21. N.G. Shang, F.C.K. Au, X.M. Meng, C.S. Lee, I. Bello, and S.T. Lee Uniform carbon nanoflake films and their field emissions Chem Phys Lett 358 2002 187 191
22. J.J. Wang, M.Y. Zhu, R.A. Outlaw, X. Zhao, D.M. Manos, and B.C. Holloway et al. Free standing subnanometer graphite sheets Appl Phys Lett 85 2004 1265 1267
23. J.J. Wang, M.Y. Zhu, R.A. Outlaw, X. Zhao, D.M. Manos, and B.C. Holloway Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition Carbon 42 2004 2867 2872
24. S. Suzuki, A. Chatterjee, C.L. Cheng, and M. Yoshimura Effect of hydrogen on carbon nanowall growth by microwave plasma-enhanced chemical vapor deposition Jpn J Appl Phys 50 2011 01AF08-1-4
25. A. Achour, B.E. Belkerk, K.A. Aissa, S. Vizireanu, E. Gautron, and M. Carette et al. Thermal properties of carbon nanowall layers measured by a pulsed photothermal technique Appl Phys Lett 102 2013 061903-1-4
26. J. Li, S. Su, L. Zhou, V. Kundrat, A.M. Abbot, and F. Mushtaq et al. Carbon nanowalls grown by microwave plasma enhanced chemical vapor deposition during the carbonization of polyacrylonitrile fibers J Appl Phys 113 2013 024313-1-6
27. A. Achour, S. Vizireanu, G. Dinescu, L.L. Brizouala, M.A. Djouadia, and M. Boujtitad Electrochemical anodic oxidation of nitrogen doped carbon nanowall films: X-ray photoelectron and Micro-Raman spectroscopy study Appl Surf Sci 273 2013 49 57
28. A. Yoshimura, H. Yoshimura, S.C. Shin, K. Kobayashi, M. Tanimura, and M. Tachibana Atomic force microscopy and Raman spectroscopy study of the early stages of carbon nanowall growth by dc plasma-enhanced chemical vapor deposition Carbon 50 2012 2698 2702
29. N. Soin, S.S. Roy, C. O'Kane, J.A.D. McLaughlin, T.H. Limb, and C.J.D. Hetherington Exploring the fundamental effects of deposition time on the microstructure of graphene nanoflakes by Raman scattering and X-ray diffraction CrystEngComm 13 2011 312 318
30. A. Malesevic, R. Vitchev, K. Schouteden, A. Volodin, L. Zhang, and G. Van Tendeloo et al. Synthesis of few-layer graphene via microwave plasma-enhanced chemical vapor deposition Nanotechnology 19 2008 305604-1-6
31. H. Zhanga, N. Kikuchia, T. Kogure, and E. Kusano Growth of carbon with vertically aligned nanoscale flake structure in capacitively coupled rf glow discharge Vacuum 82 2008 754 759
32. M. Zhu, J. Wang, B.C. Holloway, R.A. Outlaw, X. Zhao, and K. Hou et al. A mechanism for carbon nanosheet formation Carbon 45 2007 2229 2234
33. S. Vizireanu, D. Stoica, C. Luculescu, L.C. Nistor, B. Mitu, and G. Dinescu Plasma techniques for nanostructured carbon materials synthesis. A case study: carbon nanowall growth by low pressure expanding rf plasma Plasma Sources Sci Technol 19 2010 034016-1-10
34. J.W. Coburn, and M. Chen Optical emission spectroscopy of reactive plasmas: a method for correlating emission intensities to reactive particle density J Appl Phys 51 1980 3134 3136
35. J. Kastner, T. Pichler, H. Kuzmany, S. Curran, W. Blau, and D.N. Weldon et al. Resonance Raman and infrared spectroscopy of carbon nanotubes Chem Phys Lett 221 1994 53 58
36. A.C. Ferrari, and J. Robertson Interpretation of Raman spectra of disordered and amorphous carbon J Phys Rev B 61 2000 14095 14107
37. F. Tuinstra, and J.L. Koenig Raman spectrum of graphite J Chem Phys 53 1970 1126 1130
38. R.J. Nemanich, and S.A. Solin First and second order Raman scattering from finite size crystals of graphite Phys Rev B 20 1979 392 401
39. 2 carbon: crystalline graphene nanoribbons Nano Lett 8 2008 2773 2778
40. S.T. Jackson, and R.G. Nuzzo Determining hybridization differences for amorphous carbon from the XPS C1s envelope Appl Surf Sci 90 1995 195 203
41. D. Yang, A. Velamakanni, G. Bozoklu, S. Park, M. Stoller, and R. Piner et al. Chemical analysis of graphene oxide films after heat and chemical treatments by X-ray photoelectron and Micro-Raman spectroscopy Carbon 47 2009 145 152
42. L. Mandeltort, P. Choudhury, J.K. Johnson, and J.T. Yates Jr Reaction of the basal plane of graphite with the methyl radical J Phys Chem Lett 3 2012 1680 1683
43. x (x = 1, 2, 3) in graphene growth: A theoretical perspective Chem Phys Chem 13 2012 774 779
44. J. Wu, and F. Hagelberg Adsorption of small hydrocarbon radicals on single walled carbon nanotubes of finite length Phys Rev B 81 2010 155407-1-8
45. Y. Carissan, and W. Klopper Growing graphene sheets from reactions with methyl radicals: A quantum chemical study Chem Phys Chem 7 2006 1770 1778
46. 3 bond energies at borders of polycyclic aromatic hydrocarbons Phys Chem Chem Phys 2 2000 5084 5088
47. T. Farouk, B. Farouk, A. Gutsol, and A. Fridman Atmospheric pressure methane-hydrogen dc micro-glow discharge for thin film deposition J Phys D Appl Phys 41 2008
48. 2 plasmas for low-temperature deposition of ordered carbon nanostructures J Appl Phys 95 2004 2713 2724
49. V.A. Krivchenko, V.V. Dvorkin, N.N. Dzbanovsky, M.A. Timofeyev, A.S. Stepanov, and A.T. Rakhimov et al. Evolution of carbon film structure during its catalyst-free growth in the plasma of direct current glow discharge Carbon 50 2012 1477 1487
50. V. Krivchenko, P. Shevnin, A. Pilevsky, A. Egorov, N. Suetin, and V. Sen et al. Influence of the growth temperature on structural and electron field emission properties of carbon nanowall/nanotube films synthesized by catalyst-free PECVD J Mater Chem 22 2012 16458 16464