Growth of carbon with vertically aligned nanoscale flake structure in capacitively coupled rf glow discharge

Vacuum

Volumn 82, Issue 8, 2008, Pages 754-759

  Zhang, Hui ^a   Kikuchi, Naoto ^a   Kogure, Toshihiro ^b   Kusano, Eiji ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Carbon; Nanoflake; Nanostructure; rf Glow discharge

Indexed keywords

GLOW DISCHARGES; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; NANOSTRUCTURES; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

COUPLED RF GLOW DISCHARGE; NANOSCALE FLAKE STRUCTURES;

CARBON;

EID: 41149102051     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.11.001     Document Type: Article

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