Synthesis of few-layer graphene via microwave plasma-enhanced chemical vapour deposition

Nanotechnology

Volumn 19, Issue 30, 2008, Pages

  Malesevic, Alexander ^a,b   Vitchev, Roumen ^a   Schouteden, Koen ^b   Volodin, Alexander ^b   Zhang, Liang ^c   Tendeloo, Gustaaf Van ^c   Vanhulsel, Annick ^a   Haesendonck, Chris Van ^b  

^a FLEMISH INSTITUTE FOR TECHNOLOGICAL RESEARCH VITO   (Belgium)

^b KU LEUVEN   (Belgium)

^c UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ARCHITECTURAL ACOUSTICS; DIAMOND FILMS; IMAGING TECHNIQUES; MICROSCOPIC EXAMINATION; MICROWAVES; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; PHOTOELECTRON SPECTROSCOPY; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SCANNING TUNNELING MICROSCOPY; SPECTRUM ANALYSIS; STRUCTURAL ANALYSIS; SUBSTRATES; SYNTHESIS (CHEMICAL); THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

ATOMIC LAYERS; CARBON RADICALS; CHEMICAL VAPOUR DEPOSITION; COMBINED ANALYSIS; ELEVATED TEMPERATURES; GRAPHENE; GRAPHENE FLAKES; GRAPHENE SHEETS; MASS PRODUCTION; MICROWAVE PLASMA (MP); NANO-ELECTRONIC DEVICES; SCANNING TUNNELLING MICROSCOPY (STM); SUBSTRATE SURFACES; THREE STEP PROCESS; X RAY DIFFRACTION (XRD); X RAY PHOTOELECTRON SPECTROSCOPY (XPS);

X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON; GRAPHENE; NANOMATERIAL;

ARTICLE; ELECTRON MICROSCOPY; MICROWAVE RADIATION; PRIORITY JOURNAL; QUALITATIVE ANALYSIS; RAMAN SPECTROMETRY; SCANNING TUNNELING MICROSCOPY; STRUCTURE ANALYSIS; SURFACE PROPERTY; SYNTHESIS; VAPOR; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 47249130705     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/30/305604     Document Type: Article

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