Detailed molecular dynamics studies of block copolymer directed self-assembly: Effect of guiding layer properties

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 31, Issue 6, 2013, Pages

  Peters, Andrew J ^a   Lawson, Richard A ^a   Ludovice, Peter J ^a   Henderson, Clifford L ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM SURFACES; DIRECTED SELF-ASSEMBLY; GUIDING LAYER; MOLECULAR DYNAMICS SIMULATIONS; PATTERN PERIODICITY; PROCESS WINDOW;

BLOCK COPOLYMERS; SELF ASSEMBLY;

MOLECULAR DYNAMICS;

EID: 84890104046     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4821652     Document Type: Article

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