Self-consistent field theory of directed self-assembly in laterally confined lamellae-forming diblock copolymers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8323, Issue , 2012, Pages

  Laachi, Nabil ^a   Takahashi, Hassei ^a,b   Delaney, Kris T ^a   Hur, Su Mi ^a,b   Shykind, David ^c   Weinheimer, Corey J ^c   Fredrickson, Glenn H ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Santa Barbara   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

defects; directed self assembly; energy barriers; graphoepitaxy; kinetic pathways; Self Consistent Field Theory (SCFT); string method

Indexed keywords

BLOCK COPOLYMERS; DEFECTS; ENERGY BARRIERS; MEAN FIELD THEORY; SELF ASSEMBLY;

DIRECTED SELF-ASSEMBLY; GRAPHOEPITAXY; KINETIC PATHWAY; SELF-CONSISTENT-FIELD THEORY; STRING METHODS;

MOLECULAR ORBITALS;

EID: 84890086781     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.916577     Document Type: Conference Paper

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