|
Volumn 5, Issue 21, 2009, Pages 4266-4271
|
Interfacial fluctuations in an ideal block copolymer resist
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ACCURATE MEASUREMENT;
ELECTRONICS DEVICES;
IDEAL MODEL;
IDEAL SYSTEMS;
INTER-DOMAIN;
INTERFACIAL FLUCTUATIONS;
INTERFACIAL ROUGHNESS;
INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS;
INVERSE POWER LAW;
LONG RANGE ORDERS;
MESOPHASES;
NANOFABRICATION;
BLOCK COPOLYMERS;
COMPUTER SIMULATION;
PLASTIC PRODUCTS;
POWER SPECTRUM;
TECHNOLOGICAL FORECASTING;
COPOLYMERIZATION;
|
EID: 70350089217
PISSN: 1744683X
EISSN: 17446848
Source Type: Journal
DOI: 10.1039/b909292g Document Type: Article |
Times cited : (16)
|
References (28)
|