Modeling the power spectrum of thermal line edge roughness in a lamellar diblock copolymer mesophase

Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

  Bosse, August W ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLOCK COPOLYMERS; POWER SPECTRUM; STOCHASTIC MODELS; STOCHASTIC SYSTEMS;

BULK COMPOSITIONS; DIRECTED SELF-ASSEMBLY; INTERFACIAL FLUCTUATIONS; LAMELLAR DIBLOCK COPOLYMERS; LINE EDGE ROUGHNESS; MESOPHASES; SIMULATION DATA; STOCHASTIC SIMULATIONS;

ROUGHNESS MEASUREMENT;

EID: 84255172719     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3644338     Document Type: Article

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