Hyperthermal atomic oxygen beam irradiation effect on the Ti-containing DLC film

Diamond and Related Materials

Volumn 41, Issue , 2014, Pages 49-52

  Kanda, Kazuhiro ^a   Fukuda, Kazuhiro ^a   Kidena, Kengo ^a   Imai, Ryo ^a   Niibe, Masahito ^a   Fujimoto, Synya ^b   Yokota, Kumiko ^b   Tagawa, Masahito ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b KOBE UNIVERSITY   (Japan)

Author keywords

Bonding configurations; Diamond like carbon; Oxidation; Radiation induced effects; Surface characterization

Indexed keywords

BONDING CONFIGURATIONS; DIAMOND-LIKE CARBON; HYPERTHERMAL ATOMIC OXYGEN; NEAR-EDGE X-RAY ABSORPTION FINE STRUCTURE SPECTROSCOPIES; RADIATION-INDUCED EFFECTS; SPECTRAL SHAPES; SURFACE CHARACTERIZATION; SURFACE STRUCTURAL CHANGES;

CARBON; CARBON DIOXIDE; DESORPTION; IRRADIATION; OXIDATION; OXYGEN; TITANIUM CARBIDE;

ATOMS;

EID: 84888590949     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2013.10.006     Document Type: Article

References (36)

1. S. Aisenberg, and S. Chabot Deposition of carbon films with diamond properties Carbon 10 1972 356
2. J. Robertson Properties of diamond-like carbon Surf. Coat. Technol. 50 1992 185
3. A. Grill Diamond-like carbon: state of the art Diamond Relat. Mater. 8 1999 428
4. Y. Lifshitz Diamond-like carbon - present status Diamond Relat. Mater. 8 1999 1659
5. A.C. Ferrari, and J. Robertson Interpretation of Raman spectra of disordered and amorphous carbon Phys. Rev. B61 2000 14095
6. C. Donnet, M. Belin, J.C. Auge, J.M. Martin, A. Grill, and V. Patel Tribochemistry of diamond-like carbon coatings in various environments Surf. Coat. Technol. 68/69 1994 626
7. K. Kanda, K. Yokota, M. Tagawa, M. Tode, Y. Teraoka, and S. Matsui Effect of the soft X-rays on highly hydrogenated diamond-like carbon films Jpn. J. Appl. Phys. 50 2011 055801
8. K. Yokota, S. Abe, M. Tagawa, M. Iwata, E. Miyazaki, J. Ichizawa, Y. Kimoto, and R. Yokota Degradation property of commercially available Si-containing polyimide in simulated atomic oxygen and VUV environments for low Earth orbit High Perform. Polym. 22 2010 237
9. K. Yokota, M. Tagawa, A. Kitamura, K. Matsumoto, A. Yoshigoe, and Y. Teraoka Hydrogen desorption from a diamond-like carbon film by hyperthermal atomic oxygen exposures Appl. Surf. Sci. 255 2009 6710
10. M. Tagawa, K. Yokota, A. Kitamura, K. Matsumoto, A. Yoshigoe, Y. Teraoka, K. Kanda, and M. Niibe Synchrotron radiation photoelectron spectroscopy and near-edge x-ray absorption fine structure study on oxidative etching of diamond-like carbon films by hyperthermal atomic oxygen Appl. Surf. Sci. 256 2010 7678 7683
11. K. Oguri, and T. Arai Tribological properties and characterization of diamond-like carbon coatings with silicon prepared by plasma-assisted chemical vapour deposition Surf. Coat. Technol. 47 1991 710
12. A.A. Voevodin, C. Rebholz, and A. Matthews Comparative tribology studies of hard ceramic and composite metal-DLC coatings in sliding fraction conditions Tribol. Trans. 38 1995 829
13. S.R.P. Silva, J. Robertson, and G.A.J. Amaratunga Nitrogen modification of hydrogenated amorphous carbon films J. Appl. Phys. 81 1997 2626
14. K. Baba, and R. Hatada Deposition and characterization of Ti- and W-containing diamond-like carbon films by plasma source ion implantation Surf. Coat. Technol. 169 2003 287
15. D. Hofmann, S. Kunkel, K. Bewilogua, and R. Wittorf From DLC to Si-DLC based layer systems with optimized properties for tribological applications Surf. Coat. Technol. 215 2013 357
16. A. Amanov, T. Watabe, R. Tsuboi, and S. Sasaki Improvement in the tribological characteristics of Si-DLC coating by laser surface texturing under oil-lubricated point contacts at various temperatures Surf. Coat. Technol. 232 2013 549
17. L. Cui, L. Guoqing, C. Wenwu, M. Zongxin, Z. Chengwu, and W. Lian The study of doped DLC films by Ti ion implantation Thin Solid Films 475 2005 279
18. Y.H. Lin, H.D. Lin, C.K. Liu, M.W. Huang, Y.C. Chen, J.R. Chen, and H.C. Shih Annealing effect on the structural, mechanical and electrical properties of titanium-doped diamond-like carbon films Thin Solid Films 518 2009 1503
19. M. Kalin, E. Roman, L. Ožbolt, and J. Vižintin Metal-doped (Ti, WC) diamond-like-carbon coatings: reactions with extreme-pressure oil additives under tribological and static conditions Thin Solid Films 518 2010 4336
20. X. Shia, L. Guo, Y. Bai, and L. Qiao Characterization of coating probe with Ti-DLC for electrical scanning probe microscope Appl. Surf. Sci. 257 2011 7238
21. X. Feng, and Y. Xia Tribological properties of Ti-doped DLC coatings under ionic liquids lubricated conditions Appl. Surf. Sci. 258 2012 2433
22. G. Ma, S. Gong, G. Lin, L. Zhang, and G. Sun A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation Appl. Surf. Sci. 258 2012 3045
23. J. Cui, L. Qiang, B. Zhang, X. Ling, T. Yang, and J. Zhang Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique Appl. Surf. Sci. 258 2012 5025
24. L. Qiang, B. Zhang, Y. Zhou, and J. Zhang Improving the internal stress and wear resistance of DLC film by low content Ti doping Solid State Sci. 20 2013 17
25. K. Edamatsu, Y. Tanaka, T. Yokokawa, K. Seki, M. Tohnan, T. Okada, and T. Ohta Local structures of carbon thin films synthesized by the hot filament chemical vapor deposition method X-Ray-absorption near-edge structure and Raman spectroscopic studies Jpn. J. Appl. Phys. 30 1991 1073
26. A. Gutiérrez, J. Díaz, and M.F. López X-ray absorption spectroscopy study of pulsed-laser-evaporated amorphous carbon films Appl. Phys. A 61 1995 111
27. C. Lenardi, P. Piseri, V. Briois, C.E. Bottani, A. Li Bassi, and P. Milani Near-edge x-ray absorption fine structure and Raman characterization of amorphous and nanostructured carbon films J. Appl. Phys. 85 1999 7159
28. K. Kanda, T. Kitagawa, Y. Shimizugawa, Y. Haruyama, S. Matsui, M. Terasawa, H. Tsubakino, I. Yamada, T. Gejo, and M. Kamada Characterization of hard DLC films formed by Ar gas cluster ion beam-assisted fullerene deposition Jpn. J. Appl. Phys. 41 2002 4295
29. A. Saikubo, K. Kanda, M. Niibe, and S. Matsui Near-edge X-ray absorption fine-structure characterization of diamond-like carbon thin films formed by various method New Diamond Front. Carbon Technol. 16 2006 235
30. A. Saikubo, N. Yamada, K. Kanda, S. Matsui, T. Suzuki, K. Niihara, and H. Saitoh Comprehensive classification of DLC films formed by various methods using NEXAFS measurement Diamond Relat. Mater. 17 2008 1743
31. T. Nakahigashi, Y. Tanaka, K. Miyake, and H. Oohara Properties of flexible DLC film deposited by amplitude-modulated RF P-CVD Tribol. Int. 37 2004 907
32. K. Yokota, M. Tagawa, and N. Ohnae Temperature dependence in erosion rates of polyimide under hyperthermal atomic oxygen exposures J. Spacecr. Rocket. 40 2002 143
33. M. Tagawa, K. Yokota, Y. Ohki, and N. Ohmae Spatially resolved wettability control of polymer surfaces using laser-detonated hyperthermal atomic beams J. Adhes. Sci. Technol. 18 2004 243
34. M. Tagawa, K. Yokota, K. Akamatsu, and H. Nawafune Fluorination of PMDA-ODA polyimide using hyperthermal atomic fluorine beams Polyimide Other High Temp. Polym. 5 2009 249
35. M. Niibe, M. Mukai, S. Miyamoto, Y. Shoji, S. Hashimoto, A. Ando, T. Tanaka, M. Miyai, and H. Kitamura Characterization of light radiated from 11 m long undulator AIP Conf. Proc. 705 2004 576
36. M. Niibe, M. Mukai, H. Kimura, and Y. Shoji Polarization property measurement of the long undulator radiation using Cr/C multilayer polarization elements AIP Conf. Proc. 705 2004 243